Light source module unit for exposure and exposure device provided with the light source module unit

Abstract

Disclosed is a light source module unit for exposure. The disclosed light source module unit for exposure includes: a light source panel, which includes a plurality of ultraviolet light emitting elements formed in an array structure; A plurality of unit condensing lenses formed by a matrix array structure in which the center of the element array is eccentric to any reference central axis side, and the plurality of unit condensing lenses are arranged on the light-transmitting panel on the light-emitting side of the light-emitting element. The body-shaped array arrangement structure is integrated, and the unit condenser lens has the following configuration: the light incident surface is formed as a flat surface, a concave surface with a curvature (R) within (‑) 0.15, and a concave surface with a curvature (R) within (+) 0.15 Any form selected from the convex surface, at the same time, the light exit surface is formed as a convex lens, and the distance (C1) between the ultraviolet light emitting element and the unit condenser lens is arranged so that it satisfies C1 / d<0.5 relative to the diameter (d) of the condenser lens value.

Description

technical field [0001] The present invention relates to a light source for exposure, and more specifically relates to an ultraviolet light emitting element (UVLED) light source module unit for exposure, which is used in photolithography (Photolithography) to form fine circuit patterns on semiconductor wafers or image display panels. ) process, in particular, relates to an ultraviolet light-emitting element (UV LED) light source module unit for exposure and an exposure device provided with the light source module unit, which is improved in the following form: use an optimal combination of modules to form a light source The shape and array arrangement structure of the ultraviolet light emitting element (UV LED) array (array) and the condenser lens integrated in the light-transmitting panel can be effectively achieved by maximizing the light output power (power) and illuminance distribution. While improving the exposure performance and exposure efficiency, the light source module...

AI Technical Summary

Problems solved by technology

[0003] Usually, the light sources for exposure used in the existing exposure process mainly use ultra-high pressure mercury lamps or halogen lamps, but the fact is that, as well known, the existing light sources for exposure as described above are exposed due to low life and high consumption. Not only the low efficiency caused by electricity and the efficiency of the exposure process caused by high costs, but also many problems in the environment

[0004] In particular, recently, in the manufacture of thin film transistors (TFT, Thin Film Transistor) or color filters (CF, Color Filter) in the display field similar to liquid crystal displays (LCD) or organic light emitting diodes (OLED), the market has become increasingly interested in the use of exposure patterns. There is an urgent need for miniaturization technology to achieve ultra-high definition. However, due to the technical limitations of the miniaturization process of the exposure pattern using the existing exposure light source (Hg Lamp, mercury lamp), although it is a pity, the reality is that it cannot be realized as an exposure pattern. The miniaturization and ultra-high definition of the core technology of the display industry

[0005] In addition, due to the recent trend of miniaturization, increase in capacity, and high integration and high density of semiconductor elements, there is an increasing demand for miniaturization and high precision of exposure patterns. Therefore, there is a problem in using Existing light sources for exposure have limitations in meeting the current requirements for miniaturized patterns

Therefore, since the condensing efficiency decreases due to the light loss from the non-light-transmitting portion between the individual unit condensing lenses, there is a limit on the overall light output power and illuminance distribution map, making it difficult to pass through the fine details of the exposure pattern. The problem of realizing ultra-high-definition

[0010] In addition, the heat dissipation performance of the non-translucent metal panel of the existing light source module unit for exposure is limited. Therefore, the driving heat is accumulated and concentrated on the non-translucent metal panel, so that the driving time increases and the heat gradually increases. There is a problem of degradation of exposure quality due to reduction of light output power and illuminance profile

Therefore, there is a problem that the productivity of the exposure process decreases and the cost increases because of frequent replacement of the optical panel

[0011] And, with respect to existing exposure light source module unit, on the hole that is perforated in the lens panel 11 that is formed by non-translucent metal panel, set unit condenser lens 12 one by one, because such combination process, has the advantage of making manufacturing The problem of rising costs and falling productivity

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