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Preparation method of SrMoO3 ceramic target material

A ceramic target and powder technology, which is applied in the field of SrMoO3 ceramic target preparation, can solve the problems such as inability to use large-size ceramic targets for sintering, cumbersome operation process, increased target cost, etc., and achieves low cost, simple equipment, The effect of high reducing activity

Pending Publication Date: 2019-06-25
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the above three methods are not suitable for large-scale and low-cost production, and their disadvantages are as follows: (1) Limited by the crucible and the cavity of the hot isostatic pressing equipment, they can only be used for small-sized laboratory samples, and cannot Applied to the sintering of large-scale ceramic targets in batches; (2) The equipment costs of hot isostatic pressing, vacuum, and SPS sintering are relatively high, which will also increase the cost of target preparation
(3) The operation process is cumbersome and the energy consumption is high

Method used

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  • Preparation method of SrMoO3 ceramic target material
  • Preparation method of SrMoO3 ceramic target material
  • Preparation method of SrMoO3 ceramic target material

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0027] Follow the specific steps below to prepare SrMoO 3 Ceramic target:

[0028] 1) SrCO with a particle size of 0.8-1.5 μm 3 Powder and MoO with a particle size of 0.8-1.2μm 3 The powders were mixed according to a molar ratio of 1:1, then added to deionized water containing 2wt% carboxymethylcellulose, and ball milled to form a slurry; then the slurry was dried in a drying oven at 100°C for 24 hours to obtain SrMoO 4 powder; the SrMoO 4 The particle size of the powder is 1.2-2.0 μm; the SrMoO 4 The powder was put into a crucible and placed in an atmosphere furnace. 2 In a mixed gas atmosphere with Ar, reduce at 1145°C for 10 hours to obtain SrMoO 3 Precursor powder; the SrMoO 3 The particle size of the precursor powder is 0.6-2.0 μm;

[0029] 2) The SrMoO 3 The precursor powder is put into the mold and subjected to 20-50MPa single-item molding and 120-300MPa cold isostatic pressing. The holding time is 60-600s to form a ceramic green body with a density of 60-75%. In...

Embodiment 2

[0035] Follow the specific steps below to prepare SrMoO 3 Ceramic target:

[0036] 1) SrCO with a particle size of 0.8-1.5 μm 3 Powder and MoO with a particle size of 0.8-1.2μm 3 The powder is mixed according to the molar ratio of 1:1, then added to deionized water containing 0.1-2wt% polyvinyl alcohol, and ball milled to form a slurry; then the slurry is dried in a drying oven at 60-100°C for 10-24 hours , get SrMoO 4 powder; the SrMoO 4 The particle size of the powder is 1.2-2.0 μm; the SrMoO 4 The powder was put into a crucible and placed in an atmosphere furnace. 2 In the atmosphere of mixed gas with Ar, reduce at 1160°C for 10 hours to obtain SrMoO 3 Precursor powder; the SrMoO 3 The particle size of the precursor powder is 0.6-2.0 μm; the H 2 H in a mixed gas atmosphere with Ar 2 The content is 4-20%;

[0037] 2) The SrMoO 3 The precursor powder is put into the mold and subjected to 20-50MPa single-item molding and 120-300MPa cold isostatic pressing. The holdi...

Embodiment 3

[0041] Follow the specific steps below to prepare SrMoO 3 Ceramic target:

[0042] 1) SrCO with a particle size of 0.8-1.5 μm 3 Powder and MoO with a particle size of 0.8-1.2μm 3 The powder is mixed according to the molar ratio of 1:1, then added to deionized water containing 0.1-2wt% polyvinylpyrrolidone, and ball milled to form a slurry; then the slurry is dried in a drying oven at 60-100°C for 10-24 hours , get SrMoO 4 powder; the SrMoO 4 The particle size of the powder is 1.2-2.0 μm; the SrMoO 4 The powder was put into a crucible and placed in an atmosphere furnace. 2 In the atmosphere of mixed gas with Ar, reduce at 1180°C for 10 hours to obtain SrMoO 3 Precursor powder; the SrMoO 3 The particle size of the precursor powder is 0.6-2.0 μm;

[0043] 2) The SrMoO 3 The precursor powder is put into the mold and subjected to 20-50MPa single-item molding and 120-300MPa cold isostatic pressing. The holding time is 60-600s to form a ceramic green body with a density of 6...

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Abstract

The invention provides a preparation method of a SrMoO3 ceramic target material based on a perovskite structure. Under the premise of avoiding oxidation of Mo<4+> cations, a convenient and low-cost method is employed to synthesize SrMoO3 precursor particles with high sintering activity and small and uniform size; then single mould pressing and cold isostatic pressing molding are carried out; and finally, a SrMoO3 ceramic sintering method with low energy consumption and small equipment cost is selected. The prepared high density, low resistivity and pure perovskite phase high quality SrMoO3 ceramic can meet multiple SrMoO3 film coating application needs.

Description

technical field [0001] The invention belongs to the technical field of perovskite structure thin film coating, in particular to a kind of SrMoO 3 Preparation method of ceramic target material. Background technique [0002] Perovskite oxides have attracted extensive attention due to their important applications in ferromagnetism, ferroelectricity, superconductivity, and semiconductors. SrO 3 As one of the representative perovskite oxides, it has been intensively studied due to its excellent superconductor properties, Pauli paramagnetism, transport properties and strong electron-electron correlation. [0003] In recent years, bulk perovskite SrMoO 3 Ceramics are of great importance in various fields of application. For example, as a coating target, use magnetron sputtering or PLD technology to deposit high-quality SrMoO 3 Thin films are used as transparent electrodes in advanced electronic devices such as microwave devices, plasma heating, and thin film capacitors. Regar...

Claims

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Application Information

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IPC IPC(8): C04B35/495C04B35/622C04B35/626
Inventor 宋伟杰盛伟杨晔兰品军李佳黄金华
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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