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HfO2/VO2/HfO2 sandwich structure intelligent window film and preparation method thereof

A smart window, sandwich technology, applied in ion implantation plating, metal material coating process, coating and other directions, can solve the problem of high cost, achieve improved crystal quality, enhanced visible light transmittance, and excellent thermal diffusion barrier performance. Effect

Active Publication Date: 2019-07-09
HENAN POLYTECHNIC UNIV
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

At present, the main problems restricting the application of vanadium dioxide thin films in the field of smart windows are: first: vanadium dioxide thin films with excellent photoelectric properties are generally grown on Al 2 o 3 , MgF 2 and TiO 2 On expensive single crystal substrates, the cost is higher; second: the visible light transmittance (generally less than 40%) and solar energy regulation efficiency (generally less than 10%) of the vanadium dioxide film need to be further improved to adapt to commercial production ; Third: It is still very challenging to grow high-quality vanadium dioxide thin films on inexpensive glass substrates

Method used

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  • HfO2/VO2/HfO2 sandwich structure intelligent window film and preparation method thereof
  • HfO2/VO2/HfO2 sandwich structure intelligent window film and preparation method thereof
  • HfO2/VO2/HfO2 sandwich structure intelligent window film and preparation method thereof

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preparation example Construction

[0029] HfO 2 / VO 2 / HfO 2 A method for preparing a sandwich-structure smart window film, comprising the steps of:

[0030] Step 1: Put the alkali-free glass into acetone, absolute ethanol, and deionized water in sequence, wash it with KQ-50B ultrasonic instrument for 10 minutes, and then dry it with nitrogen;

[0031] Step 2: Before deposition, vacuumize the back to 5.0×10 -4 Pa, deposit the first layer of HfO under the condition of 200℃~250℃ substrate temperature and 0.2Pa~0.4Pa oxygen pressure 2 buffer layer, then raise the substrate temperature to 500°C-550°C and adjust the oxygen pressure to 0.9Pa-1.3Pa, deposit VO 2 thin film (grown VO 2 The laser energy is set to 200mJ and the frequency is 2Hz for the thin film); then the substrate temperature is lowered to room temperature, and the oxygen pressure is lowered to 0Pa at the same time, and the deposition of HfO 2 AR layer (deposited HfO 2 When the anti-reflection layer, the laser energy is set to 200mJ, and the freq...

Embodiment

[0034] HfO 2 / VO 2 / HfO 2 The preparation method of the sandwich structure intelligent window film, the steps are as follows:

[0035] Step 1: First put the alkali-free glass into a beaker filled with acetone, absolute ethanol, and deionized water in sequence, clean it with KQ-50B ultrasonic instrument for 10 minutes, and then dry it with nitrogen;

[0036] Step 2: Before deposition, vacuumize the back to 5.0×10 -4 Pa, the first layer of HfO was deposited at a substrate temperature of 200°C and an oxygen pressure of 0.2Pa 2 buffer layer, then raise the substrate temperature to 550°C and adjust the oxygen pressure to 0.9Pa, deposit VO 2 thin film (grown VO 2 The laser energy is set to 200mJ and the frequency is 2Hz for the thin film); then the substrate temperature is lowered to room temperature, and the oxygen pressure is lowered to 0Pa at the same time, and the deposition of HfO 2 AR layer (deposited HfO 2 When the anti-reflection layer, the laser energy is set to 200m...

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Abstract

The invention discloses an HfO2 / VO2 / HfO2 sandwich structure intelligent window film and a preparation method thereof, and belongs to the technical field of functional materials and films. The preparation method of the HfO2 / VO2 / HfO2 sandwich structure intelligent window film comprises the following steps of cleaning and drying alkali-free glass; before deposition, vacuumizing the back bottom, depositing a first HfO2 buffer layer, raising the temperature of a substrate, adjusting the oxygen pressure, and depositing a VO2 thin film; and reducing the temperature of the substrate, simultaneously regulating the oxygen pressure to be low, starting to deposit an HfO2 anti-reflection layer, and obtaining the HfO2 / VO2 / HfO2 sandwich structure intelligent window film after the deposition is finished.The HfO2 / VO2 / HfO2 sandwich structure intelligent window film can ensure that the vanadium dioxide film has high solar energy regulation efficiency (10%), and meanwhile, the visible light transmittanceis kept at about 50%.

Description

technical field [0001] The invention belongs to the technical field of functional materials and thin films, in particular to a HfO 2 / VO 2 / HfO 2 A sandwich-structure smart window film and a preparation method thereof. Background technique [0002] Vanadium dioxide (VO 2 ) at 68°C, a transition from the semiconductor state of the low-temperature monoclinic rutile phase to the metallic state of the high-temperature tetragonal rutile phase occurs. At the same time, the electrical properties of vanadium dioxide and the optical properties in the near-infrared wavelength range will also undergo tremendous changes: (1) the resistivity of vanadium dioxide will decrease by 2 to 4 orders of magnitude; (2) the vanadium dioxide film will The near-infrared band changes from high transmission to high reflection of light. These properties make vanadium dioxide thin films have broad application prospects in the fields of smart windows and optical switching devices. At present, the ma...

Claims

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Application Information

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IPC IPC(8): C23C14/28C23C14/08C23C14/54C23C14/50
CPCC23C14/083C23C14/28C23C14/505C23C14/54
Inventor 宗海涛李明康朝阳卞琳艳曹国华张宝庆
Owner HENAN POLYTECHNIC UNIV
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