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Metasurface microscope, preparation method thereof, and optical path measurement system

A metasurface and microscope technology, applied in the field of biological research, can solve problems such as the function of microscopic objects that cannot be observed by a microscope, a single lens, etc., and achieve the effect of being conducive to integration, simple optical path measurement system, and simple structure

Active Publication Date: 2022-04-01
HARBIN INST OF TECH SHENZHEN GRADUATE SCHOOL
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] Although the metalens has many advantages, it is only a single lens and cannot achieve the effect of traditional microscopes for observing subtle objects.

Method used

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  • Metasurface microscope, preparation method thereof, and optical path measurement system
  • Metasurface microscope, preparation method thereof, and optical path measurement system
  • Metasurface microscope, preparation method thereof, and optical path measurement system

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Experimental program
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Effect test

Embodiment 1

[0049] Data simulation:

[0050] In the range of visible light, the dielectric material has high refractive index, low loss, and strong coupling with light, so the efficiency of a metasurface composed of all dielectrics is very high. The present invention adopts titanium dioxide as the material of the basic structure, its refractive index is 2.28 at a wavelength of 520nm, and its loss is 0.

[0051] S1, use Comsol simulation software to simulate 8 basic structural units: use ITO as the substrate, etch a super-lens structure of titanium dioxide cylinders on the surface of the substrate, and meet the transmittance of each basic structural unit to reach more than 90%, and the thickness H The wavelength is 50nm, the period is 265nm, and the phase gradient is π / 4, which meets the requirement of phase coverage 2π and can achieve complete control of the wavefront. Table 1 is the diameter, transmittance and representative phase of each basic structural unit, where D is the diameter, T ...

Embodiment 2

[0068] In order to observe the magnification effect of the metasurface microscope, the present invention also designs and builds a set of optical path imaging system, which is used as an optical path measurement system.

[0069] Such as Figure 8 As shown, the optical path measurement system includes a red laser 1, a first reflector 2, a second reflector 3, a white light source 4, a beam splitter 5, a 532 bandpass filter 6, a 100x objective lens 7, a 50x objective lens 8, CCD camera9.

[0070] (1) When the optical path is collimated and debugged, the laser light emitted by the red laser 1 passes through the first reflector 2, the second reflector 3, the beam splitter 5, the 532 bandpass filter 6, the 100x objective lens 7, and the 50x objective lens After 8, enter the CCD camera 9, and fix the routes of the first reflector 2, the second reflector 3, the beam splitter 5, 532 color filters 6, the 100 times objective lens 7, the 50 times objective lens 8, and the CCD camera 9. ...

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Abstract

The invention provides a metasurface microscope, a preparation method thereof, and an optical path measurement system. The preparation method uses titanium dioxide metasurface to prepare a metasurface microscope composed of two metalenses with different focal lengths and diameters as small as 100 μm. It also provides An optical path measurement system. Compared with the existing technology, the super lens of the present invention does not have spherical aberration; it has a simple structure, consisting of two simple planar super lenses, and does not need to add additional lens groups; its size is very small, and the diameter can reach 100 μm, which is beneficial to Integration; the preparation method of the present invention all uses conventional reagents and instruments, and each step is easy to perform and has strong operability; the optical path measurement system of the present invention is simple and fast, and can quickly measure the finished product of the metasurface microscope.

Description

technical field [0001] The invention belongs to the technical field of biological research, in particular to a metasurface microscope applicable to biological microscopic research and observation, a preparation method thereof, and an optical path measurement system. Background technique [0002] Traditional optical microscopes use two lens groups to obtain an inverted virtual image with a suitable magnification through the primary magnification of the objective lens group and the secondary magnification of the eyepiece group. The working principle of the traditional lens is to achieve the purpose of light convergence through the accumulation of phases, and its phase is cumulative and gradual; due to the working principle of the traditional lens, the volume cannot be made very small; It is impossible to make a 100% spherical surface, there is spherical aberration, and lens groups have to be added to eliminate spherical aberration, which greatly increases the volume of traditi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B21/00C23C14/08C23C14/18C23C14/34G01N21/84
CPCG02B21/0004C23C14/3478C23C14/083C23C14/185G01N21/84
Inventor 肖淑敏余烈国宋清海
Owner HARBIN INST OF TECH SHENZHEN GRADUATE SCHOOL
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