Preparation method of diamond-like coating with antibacterial and high corrosion resisting performances

A diamond coating and performance technology, applied in metal material coating process, coating, ion implantation plating, etc., can solve the problems of diamond-like carbon coating not having antibacterial properties, limiting the practical application of diamond-like carbon, insufficient adhesion strength, etc. , to achieve excellent mechanical and tribological properties, protect silver nanoparticles, and maintain long-term effects

Inactive Publication Date: 2019-08-13
东莞市和荣纳米技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, the diamond-like material itself has brittleness and high stress, which greatly limits the practical application of diamond-like, and the adhesion strength of diamond-like coatings on many metal substrates is insufficient, and diamond-like coatings do not have antibacterial properties.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] A method for preparing a diamond-like coating with antibacterial and high wear resistance, comprising the following steps:

[0025] Step 1: After cleaning and drying the workpiece, put it into the workpiece rack in the vacuum chamber, and then use the mechanical pump and turbomolecular pump to pump the vacuum chamber to high vacuum;

[0026] Step 2: Install six rectangular magnetron targets on the outer wall of the vacuum chamber, arranged symmetrically, and circulated and cooled by water cooling. The magnetic poles of adjacent magnetron targets are opposite. The three magnetron targets use graphite, and the two magnetron targets The target is chromium, and one of the magnetron targets is silver, and a pulse power supply is used to apply a bias;

[0027] Step 3: use high-purity argon as the working gas to carry out the sputtering process, and use a radio frequency electrode to ionize the high-purity argon to finally form a diamond-like coating on the surface of the subs...

Embodiment 2

[0035] A method for preparing a diamond-like coating with antibacterial and high wear resistance, comprising the following steps:

[0036] Step 1: After cleaning and drying the workpiece, put it into the workpiece rack in the vacuum chamber, and then use the mechanical pump and turbomolecular pump to pump the vacuum chamber to high vacuum;

[0037] Step 2: Install six rectangular magnetron targets on the outer wall of the vacuum chamber, arranged symmetrically, and circulated and cooled by water cooling. The magnetic poles of adjacent magnetron targets are opposite. The three magnetron targets use graphite, and the two magnetron targets The target is made of titanium, one of the magnetron targets is made of silver, and a pulse power supply is used to apply a bias voltage;

[0038] Step 3: use high-purity argon as the working gas to carry out the sputtering process, and use a radio frequency electrode to ionize the high-purity argon to finally form a diamond-like coating on the...

Embodiment 3

[0046] A method for preparing a diamond-like coating with antibacterial and high wear resistance, comprising the following steps:

[0047] Step 1: After cleaning and drying the workpiece, put it into the workpiece rack in the vacuum chamber, and then use the mechanical pump and turbomolecular pump to pump the vacuum chamber to high vacuum;

[0048] Step 2: Install six rectangular magnetron targets on the outer wall of the vacuum chamber, arranged symmetrically, and circulated and cooled by water cooling. The magnetic poles of adjacent magnetron targets are opposite. The three magnetron targets use graphite, and the two magnetron targets The target is chromium, and one of the magnetron targets is silver, and a pulse power supply is used to apply a bias;

[0049] Step 3: use high-purity argon as the working gas to carry out the sputtering process, and use a radio frequency electrode to ionize the high-purity argon to finally form a diamond-like coating on the surface of the subs...

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Abstract

The invention relates to the technical field of coating preparation, and specifically relates to a preparation method of a diamond-like coating with antibacterial and high corrosion resisting performances. The method comprises the following steps: washing and drying a workpiece; feeding into a workpiece rack in a vacuum chamber; correspondingly pumping the vacuum chamber to reach high vacuum degree through a mechanical pump and a turbo molecular pump; mounting six rectangular magnetron targets on the outer wall of the vacuum chamber, wherein three magnetron targets are manufactured through graphite, two magnetron targets are manufactured through chrome or titanium, and one magnetron target is manufactured through silver; sputtering with working gas which is high-purity argon; and ionizingthe high-purity argon through a radio frequency electrode so as to form the diamond-like coating on the surface of a substrate, wherein the diamond-like coating is doped with silver nanoparticles. According to the method, the diamond-like coating with high adhesion and high abrasion resistance is prepared on a metal substrate by a sputtering technology; and moreover, the silver nanoparticles are doped, so that the antibacterial function is realized.

Description

technical field [0001] The invention relates to the technical field of coating preparation technology, in particular to a preparation method of a diamond-like coating with antibacterial and high wear resistance properties. Background technique [0002] Diamond-like carbon coatings have attracted extensive attention due to their high hardness and elastic modulus, optical transparency, good thermal conductivity, chemical inertness, excellent tribological properties, and biocompatibility. Usually DLC coating has an amorphous structure, and the main element constituting diamond-like carbon is carbon, and its coating structure is composed of carbon sp 3 and sp 2 The properties of diamond-like coatings largely depend on the sp in the film layer. 3 / sp 2 proportion. [0003] However, the diamond-like material itself has brittleness and high stress, which greatly limits the practical application of diamond-like, and the adhesion strength of diamond-like coatings on many metal su...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/06C23C14/02C23C14/14
CPCC23C14/0036C23C14/022C23C14/0605C23C14/0635C23C14/14C23C14/352
Inventor 黄惠黄兴王磊黄亮
Owner 东莞市和荣纳米技术有限公司
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