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Filter cartridge and filter

A filter and filter cartridge technology, applied in the direction of cartridge filter, fixed filter element filter, filtration and separation, etc., can solve the problems of slow processing speed, pollution and high cost, and achieve the effect of high adsorption and removal efficiency

Active Publication Date: 2019-08-27
KURASHIKI TEXTILE MFG +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As a means of removing such metal impurities, distillation or ion exchange resins can be used, but the cost of distillation is high, and the treatment speed is slow when ion exchange resins are used, or there are problems of pollution caused by leached substances

Method used

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  • Filter cartridge and filter
  • Filter cartridge and filter
  • Filter cartridge and filter

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0088] (Example 1, Comparative Example 1)

[0089]

[0090] The potassium dichromate standard solution (1000ppm) of NacalaiTesque company's special reagent for different purposes was diluted with ultrapure water to prepare a 1000ppb metal solution (Cr=1000ppb, K=2000ppb).

[0091]

[0092] Such as image 3 As indicated, the metal solution (potassium dichromate) was passed through the filter at 3.1 mL / min using a tube pump, and the solution passed through the substrate was sampled into a 100 mL PFA bottle.

[0093] In this example and comparative example, the metal removal performance with respect to K was examined.

[0094] Will (SC K →IDE Cr ) and (IDE Cr → SC K ) The metal removal rate of the functional group composite filter is shown in Figure 4 . From this result, it can be seen that when K is removed in a solution system in which K and Cr are mixed, compared with removing K by SC alone, Cr is removed by IDE group in advance, and then K is removed by SC (IDE C...

Embodiment 2、 comparative example 4

[0098] In this example and the comparative example, the metal removal performance with respect to Cu was examined. The filter structure is the same as in Example 1.

[0099]

[0100] Dilute sodium (Na) standard solution (1000ppm) and copper (Cu) standard solution (1000ppm) of special reagents made by NacalaiTesque with ultrapure water to prepare 1000ppb metal solution (Na=1000ppb, Cu=1000ppb) .

[0101]

[0102] The metal solutions (Na, Cu) were passed through at the same flow rate as in Example 1, and samples were taken.

[0103]

[0104] Will (SC Na,Cu →IDA Cu ) and (IDA Cu → SC Na,Cu ) The metal removal rate of the functional group composite filter is shown in Image 6 . From this result, it can be seen that when Cu is removed in a solution system in which Na and Cu are mixed, a combination of IDA and SC shows a higher removal rate than when Cu is removed by IDA and SC alone. In addition, it can be seen that for the order of IDA and SC, IDA Cu → SC Na,Cu The...

Embodiment 3、 comparative example 7

[0108] This example examines the metal removal performance for Na.

[0109] Will (SC Na,Cu →IDA Cu ) and (IDA Cu → SC Na,Cu ) The metal removal rate of the functional group composite filter is shown in Figure 8 . From this result, it can be seen that when Na is removed in a solution system in which Na and Cu are mixed, Cu is removed by IDA group in advance and Na is removed by SC after that, compared to Na removal by SC group alone (IDA group). Cu → SC Na,Cu ) showed a higher removal rate than the theoretical value.

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Abstract

The filter cartridge according to the present invention has a plurality of types of filtration base fabrics wrapped around a hollow inner cylinder or laminated. The filtration base fabrics are nonwoven fabrics in which a metal-adsorbing group is chemically bonded to a polyolefin fiber, and include a nonwoven fabric layer (A) 17a disposed on the downstream side and a nonwoven fabric layer (B) 17b disposed on the upstream side. The nonwoven fabric layer A is constituted by a polyolefin fiber chemically bonded with a sulfonic acid group as a metal-adsorbing group. The nonwoven fabric layer B is constituted by a polyolefin fiber chemically bonded with at least one group selected from an amino group, an N-methyl-D-glucamine group, an iminodiacetic acid group, an iminodiethanol group, an amidoxime group, a phosphate group, a carboxylic acid group, and an ethylenediaminetriacetic acid group, as a metal-adsorbing group. A filter cartridge and a filter that exhibit high efficiency in the adsorption and removal of metals are thereby provided.

Description

technical field [0001] The present invention relates to a filter cartridge and a filter in which a nonwoven fabric is laminated or wound. Background technique [0002] In recent years, due to the advancement of semiconductor manufacturing technology in the field of electronics industry, the design dimension of the wiring pitch of integrated circuits has been reduced to tens of nanometers. Due to the miniaturization of integrated circuits, there is a tendency to increase the operating speed and reduce the power consumption. In the manufacturing process of integrated circuits, metal impurities contained in the chemical solution can cause a short circuit in the wiring or a decrease in the current value, which will cause a decrease in the yield. Therefore, it is necessary to purify the chemical solution to a high degree. As a means of removing such metal impurities, distillation or ion exchange resin can be used, but the cost is high when using distillation, and the treatment s...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01J20/22B01D27/00B01D29/07B01D29/11B01D39/16B01J20/28B32B1/08B32B5/26
CPCB01D27/00B01D29/07B01D29/11B01D39/16B01J20/22B01J20/28B32B1/08B32B5/26
Inventor 西野徹本田拓也加地惠
Owner KURASHIKI TEXTILE MFG