5-methyl 5-nonyl methacrylate and preparation method and application thereof
A technology of nonyl methacrylate and methyl methacrylate is applied in the field of 5-methyl 5-nonyl methacrylate and its preparation, and can solve the problems of general flexibility of adamantane esters, many side reaction impurities, complicated separation process, etc. problems, to achieve the effect of fast photosensitive speed, high purity and yield, and simple synthesis process
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[0026] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with specific embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0027] The invention is mainly used in semiconductor materials and various optical materials, and is an excellent raw material required in the production of integrated circuits. The raw material adamantane ester used in the manufacture of semiconductor electronic components has high corrosion resistance in the semiconductor manufacturing process and has optical properties. It can be used as a photoresist for semiconductors, a sealant for semiconductors, etc. The development prospects of materials are broad, but the flexibility of adamantane esters is general, and there are too many impurities produced by too many side ...
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