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Flexible tactile sensor and preparation method and application thereof

A tactile sensor and flexible technology, applied in the field of sensors, can solve the problems of unstable nature, complex preparation process, and biological safety, etc., and achieve the effects of high-sensitivity tactile perception, simple system structure, and low pressure detection limit.

Active Publication Date: 2019-11-22
SOUTH UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This design bundles the lead wires of the upper and lower electrode plates on the same flexible substrate, which is beneficial to solve the problems of cumbersome lead wires and difficult maintenance in the sensor array design; however, because the sensor adopts a multi-layer structure design, there are disadvantages such as difficult packaging and complicated manufacturing process
CN109443607A discloses a new sensory system structure of human bionic electronic skin, said structure includes positioning layer gel based on acrylamide and lithium chloride and BMIMBF based on ionic liquid 4 Polymer sensing layer gel; VHB band is arranged between the positioning layer gel based on acrylamide and lithium chloride and the sensing layer gel based on ionic liquid BMIMBF4 polymer; this patent helps to improve the sensing system positioning accuracy without increasing the complexity of the system; however, the ion gel introduced by the sensor is unstable and has biological safety hazards, and has strict requirements on device packaging, which is not conducive to practical application
CN107941386A discloses a flexible force tactile sensor based on transparent biomaterials, a sensitive element and a preparation method thereof. The sensitive element includes a water-retaining layer substrate and a hydrogel wrapped therein, and the solute of the hydrogel is composed of sodium alginate, Calcium disodium EDTA and δ-lactone gluconate are composed of a mass ratio of 2:(0.5-1.5):(0.5-1.5), wherein the mass concentration of sodium alginate is 2-6%; the sensor includes sequentially wired Or wirelessly connected sensitive components, measurement circuits, AD conversion circuits, and displays; the hydrogel system used in this design has high requirements for environmental humidity and temperature, and strict water-retaining and sealing conditions are required for preparation and use. Slow volatilization will reduce the stability of the device, and there will be problems in long-term use

Method used

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0066] A flexible tactile sensor such as figure 1 As shown, it consists of a flexible electrode with a micro-nano structure and a flexible gasket layer, and the side of the flexible electrode with the micro-nano structure is attached to the flexible gasket layer.

[0067] like figure 2 As shown, the flexible electrode has a micro-nano structure array, and the micro-nano structure is a high-diameter ratio micro-column; as image 3 As shown, the flexible spacer layer has a circular through-hole. It should be noted that the size in the figure may not represent the actual size, and is only for illustration.

[0068] The preparation method is as follows:

[0069] (1) Using photolithography technology, etch a circular hole structure with a high-diameter ratio on the silicon plate as a primary template. The diameter of the microhole is 5 μm, the depth is 10 μm, and the center distance of the microhole is 15 μm; use hot pressing Printing technology, using polycarbonate polymer fi...

Embodiment 2

[0076] A flexible tactile sensor is composed of a flexible electrode with a micro-nano structure and a flexible pad layer, and the side of the flexible electrode with the micro-nano structure is attached to the flexible pad layer.

[0077] The flexible electrode has a micro-nano structure array, and the micro-nano structure is a high-diameter ratio micro-column; the flexible gasket layer has a circular through hole.

[0078] The preparation method is as follows:

[0079] (1) Using photolithography technology, etch a circular hole structure with a high-diameter ratio on the silicon plate as a primary template. The diameter of the microhole is 15 μm, the depth is 50 μm, and the center distance of the microhole is 40 μm; use hot pressing Printing technology, using polycarbonate polymer film as the transfer material, using the primary template as the template, and preparing a secondary template with a micro-column structure by transfer printing;

[0080] (2) Using ion gel as raw ...

Embodiment 3

[0086] A flexible tactile sensor is composed of a flexible electrode with a micro-nano structure and a flexible pad layer, and the side of the flexible electrode with the micro-nano structure is attached to the flexible pad layer.

[0087] The flexible electrode has a micro-nano structure array, and the micro-nano structure is a high-diameter ratio micro-column; the flexible gasket layer has a circular through hole.

[0088] The preparation method is as follows:

[0089] (1) Using photolithography technology, etch a circular hole structure with a high-diameter ratio on the silicon plate as a primary template. The diameter of the microhole is 20 μm, the depth is 30 μm, and the center distance of the microhole is 50 μm; use hot pressing Printing technology, using polycarbonate polymer film as the transfer material, using the primary template as the template, and preparing a secondary template with a micro-column structure by transfer printing;

[0090] (2) Using polydimethylsil...

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Abstract

The invention provides a flexible tactile sensor and a preparation method and an application thereof. The flexible tactile sensor comprises a working electrode and a counter electrode, wherein the working electrode comprises a flexible electrode and a flexible gasket layer, a side of the flexible electrode close to the flexible gasket layer is provided with a micro-nano structure, and the flexiblegasket layer is provided with a through hole. The flexible tactile sensor has advantages of high softness, high sensitivity, low pressure detection limit, simple system structure, low cost and capability of realizing large-area array preparation.

Description

technical field [0001] The invention belongs to the technical field of sensors, and relates to a flexible tactile sensor, a preparation method and an application thereof. Background technique [0002] Bionic intelligent sensing technology is playing an increasingly widespread role in the current information and intelligent society. Among them, in the field of human prosthetics, the use of sensing technology to re-endow patients with skin hypoesthesia with normal tactile sensation function is of great significance for the rehabilitation treatment of patients and the improvement of their quality of life. Skin hypoesthesia refers to a sensory disorder in which the skin's ability to sense external stimuli is reduced. For example, strong painful stimuli will only cause slight or even no sensation. This symptom is generally caused by nerve damage, and it is more common in patients with hysteria and organic diseases of the nervous system, as well as disabled patients who have unde...

Claims

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Application Information

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IPC IPC(8): G01L1/14A61B5/0205
CPCA61B5/0205G01L1/146
Inventor 郭传飞黄思雅朱胖
Owner SOUTH UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA
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