Polarization-independent double-ridge indium phosphorus-based optical mixer and its preparation method

Abstract

A polarization-independent double-ridge type indium-phosphorus-based optical mixer and a preparation method thereof. The optical mixer includes an epitaxial wafer device layer formed on an indium phosphide substrate; wherein: the epitaxial wafer device layer It includes a multi-mode interference region, which is used to achieve polarization independence; the multi-mode interference region is a double-ridge waveguide, which is used to suppress the excitation of more high-order modes in the multi-mode interference region and improve the phase accuracy of the mixer output; The epitaxial wafer device layer further includes an anti-reflection film, which is formed on both ends of the epitaxial wafer device layer; a silicon dioxide upper cladding layer is formed on the epitaxial wafer device layer to improve the epitaxial wafer device layer. Device layer stability. The indium-phosphorus-based optical mixer proposed by the invention can be directly prepared by a photolithography process, and has the comprehensive performance of low process cost, device miniaturization, polarization independence, high phase accuracy, preparation process compatible with CMOS process, and easy batch preparation. .

Description

technical field [0001] The invention relates to the field of coherent optical communication, in particular to a polarization-independent double-ridge indium phosphorus-based optical mixer and a preparation method thereof. Background technique [0002] In the face of increasing communication rate and bandwidth requirements, coherent optical communication can solve the problem of increasing channel information bits in data centers. The advent and development of 400G communication rate and 5G will be inseparable from coherent optical communication system. Coherent optical communication is a new type of communication system that uses a local oscillator light source at the receiving end to coherently demodulate the received signal. The development of coherent optical communication systems has greatly improved the transmission rate, transmission capacity and transmission distance of traditional optical communication systems. The key to its development lies in the application of co...

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Problems solved by technology

However, so far there is no laser source capable of outputting a single polarization state

This adds significant complexity to mixer performance detection and mode of operation

[0005] The deep etching technology can further increase the refractive index difference of the InP optical waveguide, but on the other hand, it will also cause more high-order modes to be excited in the multimode interference area, resulting in blurred imaging at the interference position, which seriously affects the mixer. Phase Accuracy

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