Flexible underwater pressure sensor and preparation method thereof
A pressure sensor, flexible piezoelectric technology, applied in piezoelectric devices/electrostrictive devices, fluid pressure measurement using piezoelectric devices, piezoelectric/electrostrictive/magnetostrictive devices, etc., can solve array assembly To solve the problems of complex packaging process, poor flexibility, and complex manufacturing process, it achieves the effects of high sensitivity, large frequency response range, and simple process
Active Publication Date: 2019-12-20
FUDAN UNIV
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Problems solved by technology
However, the PZT-based piezoelectric sensor has poor flexibility, complex manufacturing process, complex array assembly and packaging process
Method used
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[0037] The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.
[0038] The invention provides a flexible underwater pressure sensor. The whole pressure sensor has a membrane structure, and the whole body is made of flexible materials. Such as figure 1 As shown, the pressure sensor includes a lower flexible substrate 1 , a force-sensitive structural layer 2 and an upper flexible packaging layer 3 . The force sensitive structure layer 2 includes a lower electrode layer 201 , a flexible piezoelectric material layer 202 and an upper electrode layer 203 . The sensor has the advantages of simple structure and easy array manufacturing. The preparation process of the sensor of the present invention is specifically as follows:
[0039] (1) Spin-coat the polyimide solution on the silicon wafer, and the curing temperature and time are 120°C for 30 min, 180°C for 30 min and 250°C for 30 min, respectively. The thickness of...
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Abstract
The invention belongs to the technical field of pressure measurement, and particularly relates to a flexible underwater pressure sensor and a preparation method thereof. The pressure sensor comprisesa lower-layer flexible substrate, a force-sensitive structure layer and an upper-layer flexible packaging layer which are tightly attached from bottom to top. The lower-layer flexible substrate is a polyimide film, the lower surface of the lower-layer flexible substrate is provided with a cylindrical cavity, and the cavity wall of the cavity is provided with a micro-channel used for being communicated with the external water environment; the force-sensitive structure layer comprises a lower electrode layer, a flexible piezoelectric material layer and an upper electrode layer from bottom to top, and the flexible piezoelectric material layer is a polyvinylidene fluoride material with piezoelectric characteristics; and the upper flexible packaging layer is made of a waterproof poly-p-xylylenematerial. The flexible underwater pressure sensor is simple in process and easy for array manufacturing; the prepared sensor has the advantages of being good in flexibility, ultrathin, ultra-light, capable of measuring underwater dynamic pressure signals and the like.
Description
technical field [0001] The invention belongs to the technical field of pressure measurement, and in particular relates to a flexible underwater pressure sensor and a preparation method thereof. Background technique [0002] In underwater detection activities, underwater acoustic technology is the main means of detecting, locating, tracking, and identifying underwater targets. It is the eyes and ears of underwater activities and is widely used. The underwater acoustic sensor can pick up detailed flow field and sound field information for processing and analysis and make judgments to determine the existence, state and parameters of the target. High-performance flexible pressure sensors are of great significance to underwater vehicles, which can help them realize high-concealment, low-noise environmental detection, automatic cruise and autonomous obstacle avoidance activities, and have important application prospects in both military and civilian applications. [0003] Piezoel...
Claims
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Login to View More IPC IPC(8): B81B3/00B81C1/00G01L9/08
CPCB81B3/0018G01L9/08B81C1/00349
Inventor 卢红亮刘梦洋张卫
Owner FUDAN UNIV