Method for manufacturing filled container, and filled container

A manufacturing method and container technology, which are applied to the manufacture of filled containers and the field of filled containers, can solve problems such as lowering the yield of products, and achieve the effects of preventing mixing and suppressing the reduction of purity

Active Publication Date: 2020-02-21
CENT GLASS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In such a case, the impurities contained in the material of the semiconductor device may cause problems such as lowering the yield of the product in the manufacturing process of the semiconductor device.

Method used

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  • Method for manufacturing filled container, and filled container
  • Method for manufacturing filled container, and filled container

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0073] The inner surface of a 3.4L gas cylinder made of manganese steel (code STH12, containing Mn: 1.35-1.70% by mass, C: 0.30-0.41% by mass, and Si, P, and S) was polished by electropolishing. Use a contact surface roughness tester and an atomic force microscope (AFM) to measure the test piece (cut the container into a 20mm x 20mm metal piece) treated under the same grinding conditions to evaluate the surface roughness of the ground inner surface . As a result, the surface roughness R max 1 μm or less.

[0074] After that, at 40°C, F as the first fluorine-containing gas is sealed under atmospheric pressure without dilution 2 Gas for 24 hours, after fluorinating the inner surface, replace it with helium.

[0075] The composition of the inner surface of the gas cylinder was evaluated as follows: The aforementioned test piece treated under the same conditions was evaluated with an X-ray photoelectron spectrometer. As a result, F / Fe was 1.94 and O / Fe was 0.65.

[0076] In t...

Embodiment 2

[0078] Changed the second fluorine-containing gas to WF 6 Gas was carried out in the same manner as in Example 1 except for that. WF after storage 6 The contents of Fe, Mn, Cr, and Ni in the gas were all less than 5 mass ppb, and the purity of the gas exceeded 99.9% by volume, which was unchanged from before storage. The concentration of HF is below 100 ppm by volume.

Embodiment 3

[0080] Change the second fluorine-containing gas to ClF 3 Gas was carried out in the same manner as in Example 1 except for that. ClF after storage 3 The contents of Fe, Mn, Cr, and Ni in the gas were all less than 5 mass ppb, and the purity of the gas exceeded 99.9% by volume, which was unchanged from before storage. The concentration of HF is below 100 ppm by volume.

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Abstract

A method for manufacturing a filled container is characterized by including: a step for preparing a metal-made storage container in which at least an inner surface thereof is formed from manganese steel and the surface roughness Rmax of the inner surface is 10 microns or less; a fluorination step for bringing the inner surface of the storage container into contact with a gas including at least onespecies of first fluorine-containing gas selected from the group consisting of ClF3, IF7, BrF5, F2, and WF6 at a temperature of 50 DEG C or less; a step for replacing the inside of the storage container with an inert gas; and a step for filling the inside of the storage container with at least one species of second fluorine-containing gas selected from the group consisting of ClF3, IF7, BrF5, F2,and WF6.

Description

technical field [0001] The present invention relates to the filling of ClF in metal storage containers 3 , IF 7 A method for manufacturing a filled container by waiting for a fluorine-containing gas, and the above-mentioned filled container. Background technique [0002] fill ClF 3 , IF 7 As storage containers for fluorine-containing gases, stainless steel containers are used. [0003] However, the fluorine-containing gas is highly corrosive. Therefore, if it comes into contact with stainless steel, the fluorine-containing gas reacts with the surface of the stainless steel. 3 By-product ClF, or by IF 7 by-product IF 5 , Therefore, there is a problem that the purity of the fluorine-containing gas decreases. Furthermore, when the fluorine-containing gas reacts with stainless steel, metal fluorides, oxyfluorides, and the like are mixed into the fluorine-containing gas, and there is a problem that a large amount of metal impurities is generated. [0004] In order to supp...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C8/08F16J12/00F17C1/10F17C13/00
CPCC23C8/08F16J12/00F17C1/10F17C13/00F17C2203/0643F17C2203/0648F17C2203/0675F17C2203/0607F17C2221/037F17C2221/05F17C2270/0518F17C2209/232F17C3/00F17C13/002F17C2203/0639F17C2221/03C23F11/00
Inventor 八尾章史长友真圣池田晋也
Owner CENT GLASS CO LTD
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