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Method for manufacturing grating micro-lens array through strain modulation self-assembly, and product

A microlens array and self-assembly technology, which is applied in the field of optical instruments, can solve the problems of complex, bulky and expensive optical spectrometers, and achieve the effect of simple and flexible process flow, simple steps and low cost

Inactive Publication Date: 2020-03-27
UNIV OF SHANGHAI FOR SCI & TECH
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Problems solved by technology

However, typical discrete optical components including curved collimating collection mirrors and diffraction gratings make traditional optical spectrometers complex, bulky and expensive

Method used

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  • Method for manufacturing grating micro-lens array through strain modulation self-assembly, and product
  • Method for manufacturing grating micro-lens array through strain modulation self-assembly, and product

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Embodiment Construction

[0017] The technical solution adopted by the present invention will be further described below in combination with schematic diagrams.

[0018] The first embodiment of the present invention provides a method for fabricating a grating microlens array using strain-modulated self-assembly, see Figure 1-2 , which includes the following processes:

[0019] Step 1, take a positive microlens array as a master plate, and use PDMS material (polydimethylsiloxane) to copy a negative microlens array mold.

[0020] Step 2, fix the prepared negative microlens array mold on a fixture that can be stretched uniaxially to realize the pre-stretching of the negative microlens array mold, and use an ion beam etching machine for the negative microlens array mold Oxygen plasma treatment or ultraviolet ozone treatment forms a layer of silicon dioxide-like hard film.

[0021] Step 3, the pre-stretching of the negative microlens array mold is released, and due to the difference in Young’s modulus be...

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Abstract

The invention provides a method for manufacturing a grating micro-lens array through strain modulation self-assembly, and a product. The method comprises: copying a negative micro-lens array mold froma positive micro-lens array mother set by utilizing a PDMS; carrying out uniaxial pre-stretching on the negative micro-lens array mold; forming a silicon dioxide-like hard film on the surface of thePDMS negative micro lens array subjected to pre-stretching treatment; and after the pre-stretching of the negative micro-lens array is relieved, forming a grating microstructure on the surface of thenegative micro-lens array then, and obtaining the self-assembled negative focal length GMA. And the prepared negative focal length GMA is used as a mold for copying, so that the positive focal lengthGMA can be prepared. The method has the advantages of simple steps, no need of complex equipment and low cost; and, compared with manufacturing of a traditional grating / micro lens array, the method has the advantages of being simple and flexible in technological process, short in manufacturing time and low in cost, and is advantageous in that the negative focal length GMA and the positive focal length GMA can be manufactured by copying different mother set micro lens arrays according to different requirements in the manufacturing process.

Description

technical field [0001] The invention relates to the field of optical instruments, in particular to a method and product for making a grating microlens array by strain modulation self-assembly. Background technique [0002] Today, small, portable spectrometers are among the most important and widely used instruments for many biological, medical, and environmental measurement tasks. With the continuous improvement of spectrometer performance, traditional spectroscopic techniques can meet the main demands of current scientific and engineering applications. However, typical discrete optical components including curved collimating collection mirrors and diffraction gratings make conventional optical spectrometers complex, bulky, and expensive. To reduce the size and cost of the optical system, we reduce the number of components by combining different optical functions into one component. In conventional spectrometer systems, focusing and dispersion are the two main optical func...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B3/00G02B5/18
CPCG02B3/0031G02B5/1847
Inventor 佟健豪盛斌史俊黄元申汪琪
Owner UNIV OF SHANGHAI FOR SCI & TECH
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