Preparation method of polycrystalline silicon wafer texturing liquid and black silicon material and its application in accelerating the letid recovery of perc battery
A technology for polycrystalline silicon wafers and texturing liquid, applied in chemical instruments and methods, sustainable manufacturing/processing, circuits, etc., can solve the problems of complicated steps, high cost, environmental pollution, etc. Environmentally friendly effect
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Embodiment 1
[0057] A polysilicon texturing liquid, the preparation method is as follows:
[0058] (1) Take 1 mL of PNVA aqueous solution and dissolve it in 8 mL of water;
[0059] (2) Take 16mL of HF aqueous solution, Mn(NO 3 ) 2 64mL of the aqueous solution, join in the solution that step (1) obtains, mix uniformly, obtain polysilicon texturing liquid (wherein, the molar concentration of HF is 4.24mol / L, Mn(NO 3 ) 2 The molar concentration is 3.1mol / L).
[0060] A kind of black silicon material, preparation method is as follows:
[0061] (1) Place the prepared polysilicon texturing solution in a constant temperature water bath at 25°C;
[0062] (2) Etching the polysilicon wafer in the above-mentioned polysilicon wafer texturing solution for 3 minutes;
[0063] (3) Cleaning the etched polysilicon wafer by RCA standard cleaning method to remove impurities and drying to obtain black silicon material.
[0064] figure 1 It is the scanning electron micrograph of the black silicon mater...
Embodiment 2
[0066] A polysilicon texturing liquid, the preparation method is as follows:
[0067] (1) Take 8 mL of PNVA aqueous solution and dissolve it in 16 mL of water;
[0068] (2) Take 16mL of HF aqueous solution, Mn(NO 3 ) 2 64mL of the aqueous solution of HF, join in the solution that step (1) obtains, mix uniformly, obtain polysilicon texturing liquid (wherein, the molar concentration of HF is 3.63mol / L, Mn(NO 3 ) 2 The molar concentration is 2.6mol / L).
[0069] A kind of black silicon material, preparation method is as follows:
[0070] (1) Place the prepared polysilicon texturing solution in a constant temperature water bath at 15°C;
[0071] (2) Etching the polysilicon wafer in the above-mentioned polysilicon wafer texturing solution for 3 minutes;
[0072] (3) Cleaning the etched polysilicon wafer by RCA standard cleaning method to remove impurities and drying to obtain black silicon material.
[0073] figure 2 It is the scanning electron micrograph of the black silic...
Embodiment 3
[0075] A polysilicon texturing liquid, the preparation method is as follows:
[0076] (1) Take 4 mL of the aqueous solution of PNVA and dissolve it in 8 mL of water;
[0077] (2) Take 16mL of HF aqueous solution, Mn(NO 3 ) 2 64mL of the aqueous solution, join in the solution that step (1) obtains, mix uniformly, obtain polysilicon texturing liquid (wherein, the molar concentration of HF is 4.24mol / L, Mn(NO 3 ) 2 The molar concentration is 3.1mol / L).
[0078] A kind of black silicon material, preparation method is as follows:
[0079] (1) Place the prepared polysilicon texturing solution in a constant temperature water bath at 18°C;
[0080] (2) Etching the polysilicon wafer in the above-mentioned polysilicon wafer texturing solution for 1 min;
[0081] (3) Cleaning the etched polysilicon wafer by RCA standard cleaning method to remove impurities and drying to obtain black silicon material.
[0082] image 3 It is the scanning electron micrograph of the black silicon ma...
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