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Vacuum diffusion welding method for protective layer of miniature high-temperature oxygen concentration sensor

An oxygen concentration sensor and vacuum diffusion welding technology, which is applied in the direction of instruments, scientific instruments, measuring devices, etc., can solve the problems of inability to realize the miniaturization of the structure, crack failure in the middle layer, and low heating temperature, so as to meet the requirements of stability and high Oxygen measurement accuracy requirements, low heating temperature, and the effect of uniform solder spreading

Pending Publication Date: 2020-06-12
青岛少氏基业科技服务平台有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The present invention aims to solve the problems in the prior art that large residual stress, cracks, etc. cause failure during the connection process of the protective layer of the miniature high-temperature oxygen concentration sensor, and that the intermediate layer is too large to realize the miniaturization of its structure. Through vacuum diffusion welding technology, Adding solder with different functions provides a welding process method with low heating temperature, which can obtain low stress and high strength structure, realizes single processing and mass production, and realizes high miniature high temperature oxygen concentration sensor protective layer alumina / zirconia Effective connection of ceramic structure to obtain high-quality oxygen concentration sensor

Method used

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Experimental program
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Effect test

Embodiment 1

[0020] In this embodiment, an alumina ceramic sheet with a thickness of 0.4 mm and a diameter of 5.5 mm and a zirconia ceramic sheet with a thickness of 0.6 mm and a diameter of 5.5 mm are used as workpieces to be welded. 2.2mm, outer diameter 5.2mm, depth 0.095mm annular groove, the specific structure is shown in the schematic diagram of the sensor structure ( figure 1 ) and a schematic diagram of the structure of the alumina ceramic protective layer ( figure 2 ). Two kinds of solder foils, B-Ti72Ni28 and B-Ag85Zr15, are selected and connected by vacuum diffusion welding.

[0021] The specific vacuum diffusion welding process steps of the alumina / zirconia ceramic structure of the miniature oxygen concentration sensor protective layer are as follows:

[0022] (1) Two brazing foils, B-Ti72Ni28 with a thickness of 0.05mm and B-Ag85Zr15 with a thickness of 0.06mm, were selected to form a ring structure with an inner diameter of 2.2mm and an outer diameter of 5.2mm;

[0023] (...

Embodiment 2

[0028] In this embodiment, an alumina ceramic sheet with a thickness of 0.4 mm and a diameter of 5.5 mm and a zirconia ceramic sheet with a thickness of 0.6 mm and a diameter of 5.5 mm are used as workpieces to be welded. 2.2mm, outer diameter 5.2mm, depth 0.095mm annular groove, the specific structure is shown in the schematic diagram of the sensor structure ( figure 1) and a schematic diagram of the structure of the alumina ceramic protective layer ( figure 2 ). Two kinds of solder foils, B-Ti72Ni28 and B-Ag85Zr15, are selected and connected by vacuum diffusion welding.

[0029] The specific vacuum diffusion welding process steps of the alumina / zirconia ceramic structure of the miniature oxygen concentration sensor protective layer are as follows:

[0030] (1) Two brazing foils, B-Ti72Ni28 with a thickness of 0.05mm and B-Ag85Zr15 with a thickness of 0.06mm, were selected to form a ring structure with an inner diameter of 2.2mm and an outer diameter of 5.2mm;

[0031] (2...

Embodiment 3

[0036] In this embodiment, an alumina ceramic sheet with a thickness of 0.4 mm and a diameter of 5.5 mm and a zirconia ceramic sheet with a thickness of 0.6 mm and a diameter of 5.5 mm are used as workpieces to be welded. 2.2mm, outer diameter 5.2mm, depth 0.095mm annular groove, the specific structure is shown in the schematic diagram of the sensor structure ( figure 1 ) and a schematic diagram of the structure of the alumina ceramic protective layer ( figure 2 ). Two kinds of solder foils, B-Ti72Ni28 and B-Ag85Zr15, are selected and connected by vacuum diffusion welding.

[0037] The specific vacuum diffusion welding process steps of the alumina / zirconia ceramic structure of the miniature oxygen concentration sensor protective layer are as follows:

[0038] (1) Two brazing foils, B-Ti72Ni28 with a thickness of 0.05mm and B-Ag85Zr15 with a thickness of 0.06mm, were selected to form a ring structure with an inner diameter of 2.2mm and an outer diameter of 5.2mm;

[0039] (...

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Abstract

The invention belongs to the field of sensor manufacturing, and relates to a vacuum diffusion welding method for a protective layer of a miniature high-temperature oxygen concentration sensor with thevolume of 59mm < 3 >, in particular to a vacuum diffusion welding method for an aluminum oxide / zirconium oxide ceramic structure with the diameter of 5.5 mm. Two brazing filler metal foils of B-Ag85Zr15 and B-Ti72Ni28 are selected and added into an aluminum oxide ceramic prefabricated annular groove, sensors assembled in sequence are placed on a vacuum heating furnace workbench, a pressurizing block is arranged outside an aluminum oxide ceramic piece, and welding is conducted. The welding process parameters are as follows: the highest heating temperature is 1040-1120 DEG C, the heat preservation time is 30-60 min, the pressure is 0.08-0.10 MPa, and the vacuum degree is 6.5 * 10 <-4 > Pa. The method has the advantages that the heating temperature is low, a low-stress and high-strength structure can be obtained, large-batch production is achieved, the connecting structure which is free of cracks, even in brazing filler metal spreading, free of overflowing and attractive in appearance isobtained, and the requirements for high-temperature use stability and high oxygen measurement precision of the sensor can be met.

Description

technical field [0001] The invention belongs to the field of sensor manufacturing, and relates to a vacuum diffusion welding method with a volume of 59mm3 used for the protective layer of a miniature high-temperature oxygen concentration sensor, in particular to a vacuum diffusion welding method for an alumina / zirconia ceramic structure with a diameter of 5.5mm. Background technique [0002] The zirconia oxygen concentration sensor has high oxygen measurement accuracy and high temperature stability, and is widely used in the detection fields of exhaust emissions of internal combustion engines, gas content of nuclear power reactors and oxygen content of aircraft oxygen masks. To ensure the insulation between the heater and the sensing components, the alumina ceramic layer and the zirconia ceramic layer on the outside of the zirconia oxygen concentration sensor are usually connected by high-temperature sintering or bonding. Among them, the bonding method is obviously not suita...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B37/00G01N27/407G01N27/409
CPCC04B37/003C04B2237/122C04B2237/125C04B2237/52G01N27/4078G01N27/409
Inventor 杨刘波刘鹏王静肖康
Owner 青岛少氏基业科技服务平台有限公司
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