Method for preparing ceramic coating resistant to solid particle erosion by plasmas
A solid particle, ceramic coating technology, applied in coating, ion implantation plating, metal material coating technology and other directions, can solve the problems of increased difficulty in coating preparation, unfavorable promotion and application, etc. High bonding strength
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[0013] (1) Preparation of TiZr alloy transition layer: Vacuum plasma arc deposition method is adopted, and TiZr alloy is used as plasma cathodic arc evaporation source. First, TiZr alloy is assembled on the vacuum chamber wall, and placed between the TiZr alloy and the vacuum chamber wall. Ceramic isolation pad, the thickness of the ceramic isolation pad is 2±0.1mm, to avoid short-circuiting between the TiZr alloy and the furnace wall of the vacuum chamber; enter Ar gas to make the vacuum chamber pressure 1×10 -1 ~9.9×10 -1 Pa, connect the TiZr alloy evaporation source and the vacuum chamber wall to the negative and positive poles of the power supply respectively to form a state where the TiZr alloy is the cathode and the vacuum chamber wall is the anode, and the arc electrode connected to the vacuum chamber is in contact with the TiZr alloy evaporation source instantly And quickly disconnected, the surface of the TiZr alloy evaporation source generates an arc discharge, and t...
Embodiment 1
[0016] First, the TC4 titanium alloy is processed into a Φ30×8mm disc, and the titanium alloy disc is pretreated before the coating is prepared. The pretreatment steps are as follows:
[0017] The titanium alloy discs were polished step by step with water sandpaper, and then polished. The polished titanium alloy discs were ultrasonically cleaned in absolute ethanol, dried and put into sample bags for use. The titanium alloy disc sample with surface pretreatment is put into the vacuum chamber for coating treatment;
[0018] The specific test parameters and steps are as follows:
[0019] Put the titanium alloy disc with the surface pretreatment into the furnace, keep the distance between the titanium alloy test piece and the cathode evaporation source at 250-260mm, then extract the vacuum to the ultimate vacuum degree, and then pass Ar into the furnace to make the furnace The air pressure is kept at 1.1-1.2Pa; after that, the workpiece voltage is adjusted to about -300V, and th...
Embodiment 2
[0022] First, the TC4 titanium alloy is processed into a Φ30×8mm disc, and the titanium alloy disc is pretreated before the coating is prepared. The pretreatment steps are as follows:
[0023] The titanium alloy discs were polished step by step with water sandpaper, and then polished. The polished titanium alloy discs were ultrasonically cleaned in absolute ethanol, dried and put into sample bags for use. The titanium alloy disc sample with surface pretreatment is put into the vacuum chamber for coating treatment.
[0024] The specific test parameters and steps are as follows:
[0025] Put the titanium alloy disc with the surface pretreatment into the furnace, keep the distance between the titanium alloy test piece and the cathode evaporation source at 250-260mm, then extract the vacuum to the ultimate vacuum degree, and then pass Ar into the furnace to make the furnace The air pressure is kept at 1.1-1.2Pa; after that, the workpiece voltage is adjusted to about -300V, and th...
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