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Flexible artificial afferent nervous system based on micro-nano structure force-sensitive film and preparation method of system

A technology of micro-nano structure and nervous system, applied in the measurement of the force of the piezoelectric device, semiconductor/solid-state device manufacturing, fluid pressure measurement using the piezoelectric device, etc., can solve slow signal processing, high power consumption, Complicated wiring and other issues can be achieved to improve sensitivity and performance, facilitate mass production, and standardize and order the preparation method

Active Publication Date: 2020-08-04
CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] In the process of realizing artificial tactile perception, as the number of sensors increases, various problems will arise: such as complex wiring, high power consumption, and slow signal processing caused by a large amount of data. The pulse neural network technology is Achieving artificial tactile perception provides a solution. This technology simulates the ability of the brain to process a large number of parallel signals under low power consumption, and converts the analog signal from the sensor into a digital signal. This signal is affected during transmission. The influence of noise is small, the energy consumption is also low, and it can also be used to communicate directly with neurons. Usually, the tactile sensor is used to simulate the receptors of the skin, and the analog-to-digital conversion circuit is used to convert the analog signal of the tactile sensor into a digital signal to simulate actions. potential, and then use the synaptic transistor to simulate the synaptic behavior. The traditional artificial afferent nervous system usually requires additional pulse conversion circuits and power supplies, which complicates the wiring and generates additional power consumption, so this problem needs to be solved urgently

Method used

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  • Flexible artificial afferent nervous system based on micro-nano structure force-sensitive film and preparation method of system
  • Flexible artificial afferent nervous system based on micro-nano structure force-sensitive film and preparation method of system
  • Flexible artificial afferent nervous system based on micro-nano structure force-sensitive film and preparation method of system

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0045] refer to Figure 1-2 , a flexible artificial afferent nervous system based on a micro-nano structure force-sensitive thin film, the flexible artificial afferent nervous system includes a substrate 1, a nanogenerator and an organic synapse transistor; the nanogenerator and the organic synapse Electrical connections between transistors;

[0046] The organic synapse transistor includes a source electrode 2, a drain electrode 5, a gate electrode 9, a channel layer 3 and a gate dielectric layer 4, and the gate electrode 9, the source electrode 2 and the drain electrode 5 are located on the substrate 1, The gate dielectric layer 4 is located on the source electrode 2, the drain electrode 5 and the channel layer 3;

[0047] The nanogenerator includes a dielectric layer 8, an upper electrode 7 and an upper substrate 6 installed on the gate electrode 9 from bottom to top, and the dielectric layer 8 is a force-sensitive thin film with a micro-nano structure.

[0048] In this wa...

Embodiment 2

[0056] A method for preparing a flexible artificial afferent nervous system based on a micro-nano structure force-sensitive film, characterized in that it comprises the following steps:

[0057] S1: Take the PET substrate as the substrate of the artificial nervous system;

[0058] S2: Install the source, drain and gate on the PET substrate cleaned in S1 through a mask;

[0059] S3: preparing a channel layer;

[0060] S4: performing surface hydrophilic treatment on the channel layer;

[0061] S5: preparing a gate dielectric layer;

[0062] S6: Preparation of micro-nano structure force-sensitive film as the dielectric layer of nanogenerator;

[0063] S7: preparing the upper electrode of the nanogenerator.

[0064] Optimized, the specific manufacturing steps of the substrate in step S1 include:

[0065] A1: Take the substrate and clean it with deionized water;

[0066] A2: Ultrasonic cleaning the cleaned substrate in alcohol;

[0067] A3: Ultrasonic clean the substrate in A2...

Embodiment 3

[0090] A flexible artificial afferent nervous system based on micro-nano structure force-sensitive thin film recognizes the magnitude of the force, because the amplitude of the output voltage of the nanogenerator is proportional to the magnitude of the force, the channel current of the organic synaptic transistor It is proportional to the input of the gate (the output voltage of the nanogenerator), so the magnitude of the force can be identified by identifying the magnitude of the channel current of the synaptic transistor.

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Abstract

The invention discloses a flexible artificial afferent nervous system based on a micro-nano structure force-sensitive film, and the system comprises a substrate which is provided with a nano-generatorand an organic synaptic transistor; the organic synaptic transistor comprises a source electrode, a drain electrode, a gate electrode, a channel layer and a gate dielectric layer; the gate electrode,the source electrode and the drain electrode are located on the substrate; and the gate dielectric layer is located on the source electrode, the drain electrode and the channel layer; the nano-generator comprises a lower electrode, a dielectric layer, an upper electrode and an upper substrate from bottom to top; the lower electrode is the gate electrode; and the dielectric layer is a micro-nano structure force-sensitive film. The system has the advantages of low power consumption, small size and convenience in preparation.

Description

technical field [0001] The invention relates to the technical field of artificial intelligence, in particular to a flexible artificial afferent nervous system based on a micro-nano structure force-sensitive film and a preparation method thereof. Background technique [0002] In the process of realizing artificial tactile perception, as the number of sensors increases, various problems will arise: such as complex wiring, high power consumption, and slow signal processing caused by a large amount of data. The pulse neural network technology is Achieving artificial tactile perception provides a solution. This technology simulates the ability of the brain to process a large number of parallel signals with low power consumption, and converts the analog signal from the sensor into a digital signal. This signal is affected during transmission. The influence of noise is small, the energy consumption is also low, and it can also be used to communicate directly with neurons. Usually, ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L51/40H01L51/05G01D5/14G01L1/16G01L9/08G01L23/10G01P13/02
CPCG01L1/16G01L9/08G01L23/10G01D5/14G01P13/02H10K71/12H10K10/462H10K10/471Y02E10/549
Inventor 魏大鹏杨俊唐新悦孙泰史浩飞
Owner CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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