Zirconium-based non-evapotranspiration getter and preparation method and application thereof

Abstract

The invention discloses a zirconium-based non-evapotranspiration getter which comprises, by mass, 60%-80% of zirconium, 5%-25% of vanadium, 2%-15% of iron, 2%-15% of titanium and 2%-10% of aluminum. The zirconium, the vanadium, the iron, the titanium and the aluminum are mixed to be uniform, heated to be liquefied, subjected to heat preservation for at least 30 minutes, cooled, crushed, subjectedto ball milling and sieved to reach 200 micrometers so as to obtain the getter. The oxidation resistance of the getter is better than that of a traditional low-temperature activated zirconium vanadiumiron getter, the combustion point of the getter is higher than that of the zirconium vanadium iron getter, and meanwhile getting performance of the getter is better than that of activated zirconium vanadium iron getting alloy. The getter is more beneficial to being applied in high-medium temperature vacuum devices, and fills a gap in 500-800 DEG C activated medium temperature getters.

Description

technical field [0001] The application relates to the field of getters, in particular to a zirconium-based non-evaporable getter. Background technique [0002] Getter is a general term for a class of preparations or devices that effectively absorb certain (species) of gas molecules to obtain or maintain vacuum and purify gases. Getters are mostly used in the field of electric vacuum devices and vacuum technology, such as electric light sources, thermal insulation devices (such as heat preservation containers, vacuum glass, etc.), electric vacuum devices (such as receiving amplifier tubes, power transmitting tubes, high-voltage pulse modulation tubes, Oscilloscope tube, traveling wave tube, etc.), as well as basic physics research (such as controlled nuclear fusion device, electron-positron collider, etc.), to absorb the residual gas in the preparation process and the gas released when the device is working, to improve and The function of maintaining the vacuum degree of the...

AI Technical Summary

Problems solved by technology

Taking the vacuum insulation cup process as an example, when the traditional zirconium vanadium iron getter is used, the insulation cup is exhausted at high temperature, and the temperature reaches above 600 degrees. When the exhaust is completed and the furnace is charged, there is a temperature difference between the thermocouple and the furnace wall. The temperature of the furnace wall is around 300°C. The production line takes out the last batch of vacuum insulation cups after baking and exhausting, and replaces a new batch of vacuum insulation cups into the furnace for exhaust. The oxygen concentration around the gas agent is high, the temperature in the furnace is uneven, the getter is exposed to a large amount of air at a high temperature, and the strong oxidation even causes the getter to burn in some products near the furnace wall, resulting in the failure of the getter or the absorption of the getter. Partial failure of the air agent greatly affects the quality of the product, and the product qualification rate is low

In addition, for some titanium vacuum devices or vacuum devices that require lead-free sealing, the sealing temperature is relatively high during the production process, such as 500°C-700°C for more than 1 hour, and the vacuum device material outgasses greatly

Some existing products add anti-oxidation materials to ferro-zirconium-vanadium getter alloys, or reduce the content of vanadium and zirconium to increase the anti-combustion temperature, but reduce the activity of the getter material, sacrifice the getter performance, and the getter capacity and rate are also reduced. decline

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