Lateral double-diffused transistor and manufacturing method thereof

Abstract

The invention discloses a lateral double-diffused transistor and a manufacturing method thereof. The lateral double-diffused transistor comprises: a substrate; a drift region located at the top of thesubstrate; a drain region and a body region respectively positioned on two opposite sides of the top of the drift region; a source region and a body contact region positioned in the body region and adjacent to each other; and a dielectric layer and a field plate layer sequentially stacked on the surface of the drift region, wherein the body region partially extends towards the direction of the drain region to form at least one body region extending region, the body region extending region and the drift region adjacent to the body region extending region are distributed in an interdigitated manner, at least one groove is formed in the side, away from the drain region, of the top of the body region, the source region and the body contact region are located on the side, provided with the groove, in the body region, and the source region is located at the top of the body region and located above the body contact region. Due to the existence of the interdigitated body region and the body contact region of the lateral double-diffused transistor, the channel density of the device is increased, and the leading-out area of the body contact region is increased, so that the on resistance andthe body region resistance are reduced, and parasitic NPN mis-opening is effectively prevented.

Description

technical field [0001] The present invention relates to the technical field of semiconductors, in particular to a lateral double-diffused transistor and a manufacturing method thereof. Background technique [0002] As a type of power field effect transistor, lateral double-diffused MOS (Lateral Double-Diffused MOSFET, LDMOS) transistor has process compatibility, good thermal stability and frequency stability, high gain, low feedback capacitance and thermal resistance, and constant input impedance and other excellent properties, so it has been widely used. In the application of LDMOS, it is required to reduce the source-drain on-resistance Rdson of the device as much as possible under the premise of satisfying the high source-drain breakdown voltage BV-dss, but the optimization requirements of source-drain breakdown voltage and on-resistance are indeed contradictory Therefore, it is difficult to reduce the on-resistance while increasing the breakdown voltage. [0003] LDMOS...

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Problems solved by technology

In the application of LDMOS, it is required to reduce the source-drain on-resistance Rdson of the device as much as possible under the premise of satisfying the high source-drain breakdown voltage BV-dss, but the optimization requirements of source-drain breakdown voltage and on-resistance are indeed contradictory Therefore, it is difficult to reduce the on-resistance while increasing the breakdown voltage

[0003] LDMOS devices are usually used in the case of high current and high voltage. When the device

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