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PVT method raw material batch purification device and method

A purification method and raw material technology, which is applied in the field of PVT method raw material batch purification equipment, can solve the problems of long growth cycle, affecting single crystal industrialization and large-scale production, etc.

Inactive Publication Date: 2020-10-23
哈尔滨科友半导体产业装备与技术研究院有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The research and development purpose of the present invention is to solve the problem that the purification of PVT process raw materials requires a relatively long growth cycle, which seriously affects the industrialization and large-scale production of single crystals. A brief overview of the present invention is given below in order to provide an overview of the present invention. basic understanding of some aspects

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  • PVT method raw material batch purification device and method
  • PVT method raw material batch purification device and method
  • PVT method raw material batch purification device and method

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specific Embodiment approach 1

[0037] Specific implementation mode one: combine Figure 1-Figure 3 Describe this embodiment, a kind of PVT raw material batch purification device of this embodiment, comprise induction coil 1, furnace body 2, heater 4 and crucible 5, induction coil 1 is arranged on furnace body 2 outer walls, furnace body 2 is installed The heater 4 and the crucible 5 are arranged inside the heater 4, and the induction coil 1 is used for inductively heating the inside of the furnace body 2. The crucible 5 is arranged in an equilateral triangle in the horizontal direction inside the heater 4, and the triangular arrangement can make the inside of the crucible 5 more heated. Evenly, according to the aspect ratio of the furnace body, 2-3 layers of crucibles 5 can be placed, and the crucibles 5 are loaded with reaction raw materials.

specific Embodiment approach 2

[0038] Specific implementation mode two: combination Figure 1-Figure 3 Describe this embodiment, based on specific embodiment 1, a kind of PVT raw material batch purification device of this embodiment, the furnace body 2 is provided with a temperature measuring window 6, and the temperature measuring window 6 allows the light of the thermometer to pass through, which is convenient to use A pyrometer is used to monitor the temperature of the crucible lid.

specific Embodiment approach 3

[0039] Specific implementation mode three: combination Figure 1-Figure 3 Describe this embodiment, based on specific embodiment one, a kind of PVT method raw material batch purification device of this embodiment, described crucible 5 comprises upper cover 51 and crucible body 52, upper cover 51 is installed on the top of crucible body 52, upper cover 51 It is mounted on the crucible body 52 through threads or buckles.

[0040] Specific implementation mode four: combination Figure 1-Figure 3 Illustrate this embodiment, a kind of PVT raw material batch purification device of this embodiment, also comprise insulation material 3, be provided with insulation material 3 between described furnace body 2 and heater 4, heat insulation material 3 is to furnace body 2 interior To the heat preservation effect, making the device more energy-saving, green and environmentally friendly.

[0041] Specific implementation mode five: combination Figure 1-Figure 3 Describe this embodiment, a...

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Abstract

The invention discloses a PVT method raw material batch purification device and method, and belongs to the field of PVT method preparation. The device comprises an induction coil, a furnace body, a heater and crucibles, wherein the induction coil is arranged on the outer wall of the furnace body, the heater is installed in the furnace body, the crucibles are arranged in the heater, and the purification method comprises the steps of loading the crucibles with the reaction raw materials; putting a plurality of crucibles filled with reaction raw materials into the heater; placing a thermal insulation material between the furnace body and the heater; vacuumizing the interior of the furnace body to 10E<-6> torr or below; heating the heater by the induction coil to 1300 DEG C; introducing Ar until the pressure is 100 to 500 torr; heating to a specified temperature in a range of 1700-2000 DEG C by the heater; maintaining for 10 to 30 hours and then cooling; taking out the crucibles in the step b, and putting the crucibles into a PVT method crystal growth furnace; starting crystal growth. The research and development aim is to solve the problem that the industrialization and large-scale production of single crystals are seriously influenced due to the fact that purification of raw materials of a PVT process needs a long growth period, the identity of raw material treatment can be better guaranteed, and a crystal growth process is optimized in a more targeted mode.

Description

technical field [0001] The invention relates to a PVT method raw material batch purification device and method, belonging to the field of PVT method preparation. Background technique [0002] The third-generation semiconductor materials have great application prospects in emerging industries such as new energy vehicles, rail transit, and high-voltage power grids due to their excellent physical properties. It is represented by silicon carbide and aluminum nitride. At present, the conventional preparation method is PVT process. Usually, due to the requirements of product purity and process, the raw materials need to be purified before entering the crystal growth stage, and the purification and crystal growth are completed on the same equipment, and each process includes the process of heating and cooling, which takes a long time. The growth cycle seriously affects the industrialization and large-scale production of single crystal. There is no specific device to realize the sp...

Claims

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Application Information

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IPC IPC(8): C30B23/00F27B14/04F27B14/06F27B14/14F27B14/20
CPCC30B23/00F27B14/04F27B14/061F27B14/14F27B14/20F27B2014/045
Inventor 不公告发明人
Owner 哈尔滨科友半导体产业装备与技术研究院有限公司
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