Super-hydrophilic high-wear-resistance film layer and preparation method thereof

Abstract

The invention relates to a super-hydrophilic high-wear-resistance film layer and a preparation method thereof. The preparation method comprises the following steps: cleaning and drying a glass substrate to obtain a glass substrate, and placing the glass substrate in an internal chamber of coating equipment; selecting high-purity Si, SnSb alloy, TiO2 and conductive ZrOx as sources of Si, Sn, Sb, Tiand Zr elements, and placing the Si, Sn, Sb, Ti and Zr elements in an internal chamber of the coating equipment; vacuumizing the internal chamber, heating the chamber and the glass substrate, introducing argon after the heating is completed, and carrying out glow cleaning on the chamber and the target material; introducing oxygen, and after the air pressure in the cavity reaches a set value, sputtering Si, TiO2, SnSb alloy, TiO2 and conductive ZrOx on the surface of the glass substrate in sequence to obtain a multi-layer composite film; and after sputtering is finished, relieving the vacuum pressure, and taking out the coated glass. According to the target material, the coating method and the film layer structure provided by the invention, the super-hydrophilic film with strong wear resistance and high transmittance can be obtained.

Description

technical field [0001] The invention belongs to the field of composite materials, and in particular relates to a superhydrophilic and highly wear-resistant film layer and a preparation method thereof. Background technique [0002] The process of gas on a solid surface being replaced by a liquid becomes wettability. The wettability of water on a solid surface is usually expressed by the contact angle (θ), which can be divided into four categories: Superhydrophobic surfaces (θ>150°) , hydrophobic surface (θ>90°), hydrophilic surface (θ<90°) and superhydrophilic surface (θ<5°). Among them, both superhydrophobic and superhydrophilic surfaces have anti-fogging and self-cleaning properties, so they have attracted great attention. In our daily life, it can be applied to automobile glass, bathroom anti-fog glass, solar panels, optical lenses and displays of other electronic products. [0003] At present, there are two main ways to manufacture superhydrophilic films, on...

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Problems solved by technology

[0004] The invention aims at the problems of large water contact angle and short service life caused by the large surface roughness and low wear resistance of the super-hydrophilic film, and provides a super-hydrophilic film with strong wear resistance, dense and smooth film layer and high light transmittance. The vacuum sputtering coating method, the target material, coating method and film structure provided by the present invention can obtain a film with strong wear resistance, high transmittance, and superhydrophilicity, and has the advantages of simple preparation process and low cost. , suitable for all glass coating production lines, no need to modify existing coating equipment and add new equipment to change existing processes, etc.

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