Method for modifying thin film material and modified thin film material
A film material modification technology, applied in the field of film material modification and modified film materials, can solve the problems of film pollution, film sample damage, high temperature, etc., and achieve mild reaction conditions, clean preparation process and strong adsorption capacity Effect
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Embodiment 1
[0025] A modified SrCoO 2.5 The thin film material, the modification method of which comprises the following steps:
[0026] (1) The sample is SrCoO 2.5 Thin film, substrate is SrTiO 3 . in clean SrCoO 2.5 On the upper surface of the film 2, the nano-platinum metal layer 1 is deposited by electron beam evaporation to obtain a surface treatment material;
[0027] (2) The above-mentioned treated sample is placed in the tube furnace 6, one end of the tube furnace 6 is provided with an inlet 4, and the other end is provided with an outlet 5, and the vacuum is evacuated through the outlet 5, so that the pressure in the tube furnace is 10 -3 Pa, and then through the inlet 4, hydrogen with a volume concentration of 1% is passed into the tube furnace 6, and at the same time, it is heated and annealed, and the temperature is 100 °C. Obtained modified SrCoO 2.5 film.
Embodiment 2
[0029] In this example, the sample used is VO 2 Thin film samples, the substrate is a sapphire substrate (Al 2 O 3 ), the modification method is as follows:
[0030] (1) Put clean VO 2 The thin film sample was evaporated with a 1-nanometer gold layer on its upper surface by magnetron sputtering as a sensitization layer for hydrogen ion implantation;
[0031] (2) The above-mentioned vapor-deposited VO 2 The film sample is placed in a tube furnace, and the tube furnace is evacuated to a vacuum of 0.1Pa;
[0032] (3) feeding hydrogen with a volume concentration of 4% into the tube furnace;
[0033] (4) to VO 2 The thin film sample was heated to 120 °C for annealing treatment for 30 mins, and then the modified VO was obtained. 2 film.
[0034] For VO deposited with gold layer, respectively 2 Thin film samples and final prepared modified VO 2 Thin films were subjected to XRD tests such as figure 2 shown.
[0035] From the measurement results of XRD, it can be seen that...
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