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Production device and production method of electronic-grade hydrofluoric acid

A technology for electronic grade hydrofluoric acid and production equipment, which is applied in separation methods, chemical instruments and methods, perfluorocarbon/hydrofluorocarbon capture, etc., and can solve the problems of increasing preparation costs, low yield, and waste Environmental pollution and other issues, achieve high economic benefits and environmental protection, avoid waste of resources, and reduce the effect of purification processes

Active Publication Date: 2020-12-01
BEIJING UNIV OF CHEM TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Such as gas absorption technology can be used for large-scale production, but sub-boiling distillation technology can only be used to prepare a small amount of products, and the production method in the prior art may introduce new impurities, or the output rate is low, or the production cost is high, It is difficult to meet industrial needs, and the waste produced in the production process pollutes the environment, and waste disposal increases the cost of preparation

Method used

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  • Production device and production method of electronic-grade hydrofluoric acid
  • Production device and production method of electronic-grade hydrofluoric acid

Examples

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Embodiment 1

[0032] as attached figure 1 As shown, a kind of production device of electronic grade hydrofluoric acid provided by the present invention includes a purification system, a reabsorption system and a first tail gas absorption system;

[0033] The purification system comprises a raw material tank 11, an evaporator 12 connected to the bottom of the raw material tank 11 at the inlet, a purification tower 13 connected to the outlet of the evaporator 12 at the bottom, an absorption tower 14 connected to the top of the purification tower 13 at the bottom, and connected to the absorption tower 14 Absorption tower still storage tank 15 at the bottom, the bottom of absorption tower still storage tank 15 is connected with the first delivery pump 16, ultrapure filter device 17 and filling device 18 in turn, and the bottom of purification tower 13 is connected with raffinate storage tank 19.

[0034] The operating process of the above-mentioned device is:

[0035] (1) Rectification: transp...

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PUM

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Abstract

The invention discloses a production device and a production method of electronic-grade hydrofluoric acid. The production method comprises the following steps: gasifying industrial anhydrous hydrogenfluoride serving as a raw material through an evaporator, conveying the gasified anhydrous hydrogen fluoride to a purification tower, and carrying out rectifying to obtain high-purity hydrogen fluoride gas; conveying the high-purity hydrogen fluoride gas to an absorption tower, and conducting absorbing with a hydrofluoric acid liquid phase having a certain concentration to obtain a crude electronic-grade hydrofluoric acid product; and finally, carrying out ultra-pure filtration to obtain a finished electronic-grade hydrofluoric acid product. The technical problems of low yield and low purity in the prior art are solved in the invention, and the production method meets environmental protection requirements and is suitable for industrial large-scale production.

Description

technical field [0001] The invention relates to the technical field of fine chemicals, in particular to a production device and production method of electronic grade hydrofluoric acid. Background technique [0002] Electronic grade hydrofluoric acid is a kind of inorganic acid, with weak acidity, it is a colorless transparent liquid at room temperature, volatile and has a strong pungent smell. It is highly corrosive, making it one of the key basic chemical materials in the microelectronics industry. Its purity and cleanliness have a very important impact on the yield, electrical performance and reliability of integrated circuits. According to the statistics of the International Semiconductor Industry Association (SEMI), before 2020, 62 fabs will be built in the world, of which 26 are in China, accounting for as high as 42%. The global semiconductor production capacity is gradually shifting to China. The rapid development of downstream semiconductors, liquid crystal panels, ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B7/19
CPCC01B7/195C01B7/196C01B7/197B01D53/1456B01D2257/2047Y02C20/30B01D53/1406B01D53/1418B01D2252/10B01D53/1493B01D53/1431
Inventor 李群生
Owner BEIJING UNIV OF CHEM TECH
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