Production device and production method of electronic-grade hydrofluoric acid

A technology for electronic grade hydrofluoric acid and production equipment, which is applied in separation methods, chemical instruments and methods, perfluorocarbon/hydrofluorocarbon capture, etc., and can solve the problems of increasing preparation costs, low yield, and waste Environmental pollution and other issues, achieve high economic benefits and environmental protection, avoid waste of resources, and reduce the effect of purification processes
CN112010263AActive Publication Date: 2020-12-01BEIJING UNIV OF CHEM TECH
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Patent Information

Authority / Receiving Office
CN ยท China
Patent Type
Applications(China)
Current Assignee / Owner
BEIJING UNIV OF CHEM TECH
Publication Date
2020-12-01

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Abstract

The invention discloses a production device and a production method of electronic-grade hydrofluoric acid. The production method comprises the following steps: gasifying industrial anhydrous hydrogenfluoride serving as a raw material through an evaporator, conveying the gasified anhydrous hydrogen fluoride to a purification tower, and carrying out rectifying to obtain high-purity hydrogen fluoride gas; conveying the high-purity hydrogen fluoride gas to an absorption tower, and conducting absorbing with a hydrofluoric acid liquid phase having a certain concentration to obtain a crude electronic-grade hydrofluoric acid product; and finally, carrying out ultra-pure filtration to obtain a finished electronic-grade hydrofluoric acid product. The technical problems of low yield and low purity in the prior art are solved in the invention, and the production method meets environmental protection requirements and is suitable for industrial large-scale production.
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Description

technical field

[0001] The invention relates to the technical field of fine chemicals, in particular to a production device and production method of electronic grade hydrofluoric acid. Background technique

[0002] Electronic grade hydrofluoric acid is a kind of inorganic acid, with weak acidity, it is a colorless transparent liquid at room temperature, volatile and has a strong pungent smell. It is highly corrosive, making it one of the key basic chemical materials in the microelectronics industry. Its purity and cleanliness have a very important impact on the yield, electrical performance and reliability of integrated circuits. According to the statistics of the International Semiconductor Industry Association (SEMI), before 2020, 62 fabs will be built in the world, of which 26 are in China, accounting for as high as 42%. The global semiconductor production capacity is gradually shifting to China. The rapid development of downstream semiconductors, liquid crystal panels, ...

Claims

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