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A kind of preparation method of field emission diamond-like carbon-titanium dioxide nanotube composite thin film

A nanotube composite and diamond film technology is applied in the field of field emission diamond-like carbon-titanium dioxide nanotube composite film preparation, and can solve the problems of field emission performance limitation, restricted application, large forbidden band width, etc. Field emission performance, the effect of reducing the electron emission barrier

Active Publication Date: 2021-08-10
TAIYUAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, due to the disadvantages of low carrier concentration and large band gap of diamond-like carbon, and the lack of special tip topography on the surface, the field emission performance is limited, which restricts its application in cold cathode materials.

Method used

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  • A kind of preparation method of field emission diamond-like carbon-titanium dioxide nanotube composite thin film
  • A kind of preparation method of field emission diamond-like carbon-titanium dioxide nanotube composite thin film
  • A kind of preparation method of field emission diamond-like carbon-titanium dioxide nanotube composite thin film

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Embodiment 1

[0036] This embodiment provides a method for preparing a field emission diamond-like carbon-titanium dioxide nanotube composite film by using the above-mentioned device. The operation steps are as follows:

[0037] (1) Substrate pretreatment: Put the polished titanium substrate with a purity of 99.99% into acetone solution, ethanol solution and deionized water for 10 minutes to ultrasonically clean it respectively to remove surface grease and other pollutants, and then place the substrate Place in an oven to dry;

[0038] (2) Fix the treated titanium substrate on the stainless steel working electrode, and fix it on the anodizing device in parallel with the metal platinum counter electrode, and the distance between the two electrodes is 2 cm; at the same time, the titanium substrate and the platinum electrode are completely Immersed in ethylene glycol-ammonium fluoride electrolyte, the mass percentage of ammonium fluoride is 0.5 wt.%, the mass ratio of deionized water is 5 wt....

Embodiment 2

[0043] This embodiment provides a method for preparing a field emission diamond-like carbon-titanium dioxide nanotube composite film by using the device described in Embodiment 1. The operation steps are as follows:

[0044] (1) Substrate pretreatment: Put the polished titanium substrate with a purity of 99.99% into acetone solution, ethanol solution and deionized water for 10 minutes to ultrasonically clean it respectively to remove surface grease and other pollutants, and then place the substrate Place in an oven to dry;

[0045] (2) Fix the treated titanium substrate on the stainless steel working electrode, and fix it on the anodizing device in parallel with the metal platinum counter electrode, and the distance between the two electrodes is 2 cm; at the same time, the titanium substrate and the platinum electrode are completely Immersed in ethylene glycol-ammonium fluoride electrolyte, the mass percentage of ammonium fluoride is 0.5 wt.%, the mass ratio of deionized wate...

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Abstract

The invention discloses a method for preparing a field emission diamond-like-titanium dioxide nanotube composite film. The preparation method comprises: preparing a titanium dioxide nanotube film by anodic oxidation on a pretreated polished titanium substrate, and the electrolyte adopts an ethylene glycol-ammonium fluoride system; then fixing the titanium substrate with the titanium dioxide nanotube film in a vacuum On the sample stage of the chamber, high-purity methane is used as the reaction gas, argon is used as the working gas, and high-purity graphite is used as the sputtering target. The diamond-like carbon film is deposited on the surface of the titanium dioxide nanotube film by radio frequency magnetron sputtering technology to obtain diamond-like carbon. ‑TiO2 nanotube composite film. This method takes advantage of the low electron affinity of the diamond-like film and the special tip effect of the nanotube itself, so that the surface of the prepared diamond-like-titanium dioxide nanotube composite film has a lower electron emission barrier and good field emission performance. Cold cathode materials are used in field emission displays and vacuum microelectronic devices.

Description

technical field [0001] The invention relates to a method for preparing a field emission diamond-like carbon-titanium dioxide nanotube composite film, belonging to the technical field of functional film materials. Background technique [0002] As a functional material with high hardness, low friction coefficient, low electron affinity, good chemical and thermal stability, diamond-like carbon film has broad application prospects in cold cathode materials. However, due to the disadvantages of low carrier concentration and large band gap of diamond-like carbon, and the lack of special tip topography on the surface, the field emission performance is limited, which restricts its application in cold cathode materials. Based on domestic and foreign research and analysis, in order to improve the field emission performance, special methods are often used to prepare special microscopic topography on the surface of diamond-like carbon films to solve the problem of limited field emission...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C25D11/26C23C14/06C23C14/35
CPCC23C14/0605C23C14/35C25D11/26
Inventor 周兵刘竹波于盛旺吴艳霞马永申艳艳
Owner TAIYUAN UNIV OF TECH