Flexible sensor and preparation method thereof and method for simultaneously measuring rigidity and dielectric constant

A flexible sensor and dielectric constant technology, applied in the field of sensors, can solve the problems of inability to produce large bends, high requirements for sample shape, and large volume of measuring devices, and achieve the effects of simple structure, weight reduction, and accurate measurement results

Inactive Publication Date: 2021-01-05
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The existing methods for measuring the stiffness and dielectric constant of objects are relatively complicated, and the measuring device still has the problems of large volume and high requirements for the shape of the sample
Moreover, most of the existing sensors are made of hard materials such as metal, which cannot produce large bends, and are difficult to be installed on various complex curved surfaces

Method used

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  • Flexible sensor and preparation method thereof and method for simultaneously measuring rigidity and dielectric constant
  • Flexible sensor and preparation method thereof and method for simultaneously measuring rigidity and dielectric constant
  • Flexible sensor and preparation method thereof and method for simultaneously measuring rigidity and dielectric constant

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preparation example Construction

[0047] The present invention also provides a method for preparing a flexible sensor, comprising the following steps:

[0048] Step 1, cleaning the flexible substrate 1 made of flexible polymer;

[0049] Step 2, performing photolithographic treatment on the cleaned flexible substrate 1, and transferring the photolithographic pattern to the flexible substrate 1;

[0050] Step 3, using electron beam evaporation to deposit different metals on the surface of the flexible substrate 1 to form the bonding layer 2 and the conductive layer 3 respectively;

[0051] Step 4, using a stripping process to transfer the pattern to the bonding layer 2 and the conductive layer 3 to form two mutually insulated electrodes, and finally form the flexible sensor 5 .

[0052] In step 4, the conductive layer 3 is covered with a flexible polymer to form a flexible protective layer 4 , and part of the flexible polymer is removed by photolithography and etching processes to form an opening 7 communicatin...

Embodiment 1

[0055] like figure 1 As shown, the present embodiment provides a flexible sensor capable of simultaneously measuring stiffness and permittivity, the flexible sensor is as follows from bottom to top: flexible substrate 1, bonding layer 2, conductive layer 3 and flexible protective layer 4; wherein, The flexible substrate 1 is polyimide with a thickness of 100 microns; the bonding layer 2 is chromium with a thickness of 20 nanometers; the conductive layer 3 is gold with a thickness of 200 nanometers;

[0056] like figure 2 As shown, both the bonding layer 2 and the conductive layer 3 form interdigitated electrodes insulated from each other in the same plane.

[0057] like image 3 As shown, when measuring stiffness, two flexible sensors 5 are respectively attached to both sides of the same object 6 to be measured. When the object 6 to be measured is compressed and deformed, the distance between the two flexible sensors 5 changes, and the capacitance C between the two flexibl...

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Abstract

The invention relates to a flexible sensor and a preparation method thereof and a method for simultaneously measuring rigidity and dielectric constant. The flexible sensor comprises a flexible substrate, a bonding layer and a conductive layer which are sequentially arranged from bottom to top, the horizontal section shapes of the bonding layer and the conducting layer are the same, and the bondinglayer and the conducting layer form two electrodes which are insulated from each other in the same plane; and the thickness of the bonding layer is smaller than that of the conductive layer, and theconductivity of the bonding layer is smaller than that of the conductive layer. The method for simultaneously measuring the rigidity and the dielectric constant comprises the following steps of: 1, respectively clinging two flexible sensors to two sides of the same to-be-measured object; 2, measuring the change of the capacitance C between the two flexible sensors when the to-be-measured object isextruded to deform, and calculating to obtain the rigidity of the to-be-measured object. The change of the capacitance C' of the electrode in the flexible sensor is measured to calculate the dielectric constant of the to-be-measured object. The flexible sensor is small in size, light in weight, bendable, capable of measuring rigidity and the dielectric constant at the same time, high in efficiency and capable of being produced in batches.

Description

technical field [0001] The invention relates to the field of sensors, in particular to a flexible sensor, a preparation method and a method for simultaneously measuring stiffness and dielectric constant. Background technique [0002] In the 21st century, new sensors have become a very active field of engineering technology research, and it is called the three pillars of information technology together with computer technology and communication. The sensor can sense the specified measured object and convert it into a usable signal according to certain rules, which is a necessary part of the system to perceive the external environment. The stiffness of an object is an important mechanical parameter that characterizes its ability to resist elastic deformation. The greater the stiffness of an object, the smaller the deformation when it is stressed. Dielectric constant, also known as permittivity or relative permittivity, is an important data that characterizes the electrical pr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01D5/241G01M5/00G01R27/26
CPCG01D5/2417G01M5/0083G01R27/2623
Inventor 林启敬王作为赵娜张福政韩枫赵立波杨萍蒋庄德
Owner XI AN JIAOTONG UNIV
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