Ceramic plate cleaning liquid medicine for plasma chamber and application thereof

A technology of plasma and ceramic plates, which is applied to the field of cleaning chemicals for ceramic plates in plasma chambers, can solve problems such as difficult to achieve thorough cleaning, and achieve the effects of restoring color, odor, and reducing energy consumption.

Inactive Publication Date: 2021-02-12
合肥微睿科技股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In this way, general ceramic cleaning methods such as grinding, polishing, etc., are difficult to achieve the purpose of thorough cleaning, so it is necessary to explore a chemical solution that can realize the thorough cleaning of ceramic plates in plasma chambers.
[0004] The currently reported cleaning of ceramics is mainly aimed at cleaning during the production and processing of ceramics. The cleaning methods mainly include grinding, polishing, etc. There are few reports on the liquid medicine for cleaning ceramic plates contaminated by fluoride ions in the plasma chamber.

Method used

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  • Ceramic plate cleaning liquid medicine for plasma chamber and application thereof
  • Ceramic plate cleaning liquid medicine for plasma chamber and application thereof
  • Ceramic plate cleaning liquid medicine for plasma chamber and application thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] A plasma chamber cleaning liquid for a ceramic plate is composed of the following raw materials in mass percentage:

[0033] Citric Acid 12.5%,

[0034] Nitric acid 2.5%,

[0035] Deionized water 85%,

[0036] The preparation process is as follows: mix citric acid and nitric acid into deionized water, stir evenly until completely dissolved.

[0037] Put the contaminated ceramic plate into the ceramic cleaning solution with a mass concentration of 12.7%, heat it to 40°C, soak for 40 minutes, take out the ceramic and dry it with an air gun, and observe the cleaning effect of the ceramic. The results are shown in Table 1 and figure 1 As shown, there is no stain on the ceramic surface, and the cleaning effect is obvious.

Embodiment 2

[0039] A plasma chamber cleaning liquid for a ceramic plate is composed of the following raw materials in mass percentage:

[0040] Citric Acid 10%,

[0041] Nitric acid 3%,

[0042] Deionized Water 87%,

[0043] The preparation process is as follows: mix citric acid and nitric acid into deionized water, stir evenly until completely dissolved.

[0044] Put the contaminated ceramic plate into the ceramic cleaning solution with a mass concentration of 7.6%, heat it to 45°C, soak for 60 minutes, take out the ceramic and dry it with an air gun, and observe the cleaning effect of the ceramic. The results are shown in Table 1 and figure 2 As shown, there is no stain on the ceramic surface, and the cleaning effect is obvious.

Embodiment 3

[0046] A plasma chamber cleaning liquid for a ceramic plate is composed of the following raw materials in mass percentage:

[0047] Citric Acid 5%,

[0048] Nitric acid 0.03%,

[0049] Deionized Water 94.97%,

[0050] The preparation process is as follows: mix citric acid and nitric acid into deionized water, stir evenly until completely dissolved.

[0051] Put the contaminated ceramic plates into the ceramic cleaning solution with a mass concentration of 10%, heat to 48°C, soak for 70 minutes, take out the ceramics and dry them with an air gun, and observe the cleaning effect of the ceramics. The results are shown in Table 1.

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Abstract

The invention discloses a ceramic plate cleaning liquid medicine for a plasma chamber and application of the ceramic plate cleaning liquid medicine. The ceramic plate cleaning liquid medicine is prepared from the following raw materials in percentage by mass: 5-20 percent of water-soluble organic acid, 0.03-5 percent of unitary inorganic acid and 75-94.97 percent of deionized water. The preparation method comprises the following steps: mixing the water-soluble organic acid and the unitary inorganic acid, adding the mixture into the deionized water, and uniformly stirring until the mixture is completely dissolved. According to the cleaning liquid medicine, fluoride in the polluted ceramic plate is converted into soluble washing impurities by utilizing the characteristic that water-soluble organic acid such as citric acid dissolves fluorine impurities in the ceramic plate polluted by fluorine ions, pollutants can be removed conveniently, the reaction speed can be increased by adding a proper amount of unitary inorganic acid such as nitric acid. The dirt of the ceramic plate polluted by fluoride ions in the plasma chamber is safely and efficiently removed, and the original color of the ceramic plate is recovered.

Description

technical field [0001] The invention belongs to the technical field of ceramic cleaning, and in particular relates to a liquid for cleaning a ceramic plate for a plasma chamber and an application thereof. Background technique [0002] Alumina and zirconia ceramics are the third-generation materials with rapid development after metal and engineering plastics. With the development of modern industry, ceramics are not only used for home decoration and family use. Its finished products have high temperature resistance, corrosion resistance, wear resistance, high insulation and other properties that metals and engineering plastics cannot match. Widely used in machinery, electronics, electrical appliances, chemicals, textiles, plumbing hardware, automobiles and other industries. The existing categories of precision ceramic products mainly include: structural ceramics, porous ceramics, and electronic ceramics. [0003] In TFT-LCD manufacturing, dry etching and PECVD processes, ce...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C11D7/26C11D7/08C11D7/60B08B3/08B08B3/10
CPCB08B3/08B08B3/10C11D7/08C11D7/265
Inventor 万俊刘超许杰
Owner 合肥微睿科技股份有限公司
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