Novel thermopile heat flow sensor

Abstract

The invention discloses a novel thermopile heat flow sensor. The sensor comprises: a plurality of thermoelectric materials I and thermoelectric materials II, which are connected in a staggered and stacked manner, wherein an insulating layer is arranged outside each thermoelectric material I and each thermoelectric material II; two nodes I arranged on different sides are exposed on the thermoelectric material I, and two nodes II arranged on different sides are exposed on the thermoelectric material II; the node I and the node II are tightly connected to form a thermocouple node; two sides of the thermopile heat flow sensor are respectively provided with a wire node, and the wire nodes are connected with wires; the thermocouple node close to the heat flow is a front-end thermocouple node, the thermocouple node far away from the heat flow is a rear-end thermocouple node, and the adjacent front-end and rear-end thermocouple nodes form a thermocouple pair; and the wire node leads out the thermal potential difference generated by the thermocouple pair through the connecting wire. The thermopile heat flow sensor disclosed by the invention has high sensitivity coefficient and high frequency response heat flow test capability, and can meet the test requirements of conventional hypersonic wind tunnel, flight test and shock tunnel test.

Description

technical field [0001] The invention belongs to the technical field of heat flow sensor development and heat flow testing, and more specifically, the invention relates to a thermopile heat flow sensor. Background technique [0002] At present, heat flow sensors based on temperature gradients for heat flow testing mainly include Gardon meters, Schmidt-Boelter heat flow meters, thin-film thermopile heat flow sensors, and atomic layer thermopile heat flow sensors. Among them, except for the atomic layer thermopile heat flow sensor, the direction of the temperature gradient in the other three heat flow sensors is parallel to the direction of the potential difference. Since the sensitive element of the Gardon meter is mainly a suspended metal sheet, the pressure resistance is weak, and in order to maintain a stable temperature difference, a larger heat sink needs to be designed, which restricts its miniaturization development. At the same time, the miniaturization of the sensiti...

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Problems solved by technology

However, since the yttrium barium copper oxide film is deposited on a single crystal substrate with poor heat resistance such as strontium titanate or lanthanum manganate and a certain crystal orientation, the resistance to flow field erosion of the atomic layer thermopile heat flow sensor and Poor temperature resistance, not suitable for multiple, long-term and high-temperature environments

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