Dielectric barrier glow discharge ion source structure
A glow discharge and dielectric barrier technology, applied in ion sources/guns, discharge tubes, circuits, etc., can solve the problems of reduced service life, short service life, easy surface oxidation, etc., achieving a small limit voltage value, easy miniaturization, Not easy to be oxidized
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[0017] The present invention will be described in detail below with reference to the accompanying drawings and examples.
[0018] The invention provides a dielectric barrier glow discharge ion source structure, such as figure 1 and figure 2 As shown, it includes an ion generating structure and a supporting base 6 . The ion generating structure mainly includes a first metal wire 1 , a second metal wire 2 , a first glass sleeve 3 and a second glass sleeve 4 . The first wire 1 is partially wrapped from the head by the first glass sleeve 3, and the second wire 2 is wrapped by the second glass sleeve 4 from the head to the bending part. The first glass sleeve 3 and the second glass sleeve The tubes 4 are arranged in parallel and in close contact. The support base 6 is used to support and fix the ion generating structure, and is provided with 2 parallel through holes, the glass sleeve is installed on the support base 6, and the first metal wire 1 and the second metal wire 2 resp...
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