Fabric substrate piezoelectric sensor based on zinc oxide nanorod structures and preparation method of fabric substrate piezoelectric sensor

[0027]Example 1

[0028]First, the preparation of high conductive performance fabric electrodes

[0029]Plasma treatment is carried out on the surface of the polyester fabric, the treatment atmosphere is oxygen, the processing power is 400W, the treatment time is 120s, then adding 100 ml of deionized water, adding 0.5 g of tin chloride and 0.1 ml of mass concentration of 30% hydrochloric acid. The mixed solution obtained by chloride-containing and hydrochloric acid was prepared, and the treated polyester fabric was immersed in a mixed solution, impregnated at a temperature of 80 ° C; then 0.3 g of oxide oxide powder was dispersed at 100 ml after ultrasound treatment. For 30 min in deionized water, 3 mg / ml oxide solution was prepared, and the impurities were removed by deionized water, and the polyester fabric continued to impregnate the polyester fabric in the graphene solution, impregnated at a temperature of 25 ° C for 0.25 h, and repeatedly impregnated 3 times Drying; Finally, the polyester fabric electrode was obtained after the drying polyester fabric was reduced at a temperature of 95 ° C at a temperature of 95 ° C.

[0030]Second, the preparation of zinc oxide fabric electrode

[0031]First formulated zinc oxide seed solution: Weigh 1.10 g of zinc acetate dihydrate dissolved in 50 mm of isopropyl alcohol to prepare 100 mmol / L of acetate solution, stirred at 85 ° C for 15 min, then 700 μl of triethylamine was stirred at 85 ° C. 10min, standing for 3 h; re-formulated zinc oxide growth solution, formulated an equal molar ratio of hexamethylenedicitriamine with a zinc nitrate hexahydrate solution, respectively, respectively, respectively, 7.71 g of six-methylene tetraamine and 16.4 g of zinc nitrate hexahydrate In 550 ml of deionized water, stirred at room temperature for 24 h; the polyester fabric electrode was placed in a zinc oxide seed solution for 8 minutes, washed with ethanol, placed at 70 ° C for 1 h, and place it under room temperature, then it is hanging it vertically In the zinc oxide growth solution, the growth liquid was 8 h at 95 ° C, 10 h at room temperature, and then cleaned and dried, and obtained a polyester fabric electrode containing zinc oxide nanorod array; seefigure 2 The zinc oxide nano rod on the surface of the polyester fabric electrode is long along the C-axis, and the structure formed is a hexa fibrite structure having a piezoelectric effect.

[0032]Third, the preparation of polyvinylidene fluoride film

[0033]12 wt% polyvinylidene fluoride (MW = 180000) solution was dissolved in N, N-dimethylformamide (DMF), and then stirred at 85 ° C, 600 rpm for 3 hours. The spray coating is rotated in the pretreatment glass, the spin coating rate is 500 rpm, the spin coating time is 20s, and then the glass is placed in a vacuum drying tank for 30 minutes, then heated at 60 ° C for 30 minutes, and finally immerse the polyvinylidene fluoride film into deion The water was isolated from glass, dried to give an β-phase polyvinylidene fluoride film, and the polyvinylidene fluoride film had a thickness of 40 μm.

[0034]Fourth, the preparation of fabric base piezoelectric sensor based on zinc oxide nano rod

[0035]The polyester fabric electrodes of the above-mentioned zinc oxide nano-rod arrays were assembled, and the PDMS mold and the polyimide tape were packaged. As a sandwich structure, the upper and lower layers are a fabric electrode having a zinc oxide nano-rod, and the electrode is connected with a copper wire, and the intermediate is a β-phase polyfluidic fluoride film having a piezoelectric effect, and placed it in the PDMS mold. Upper layer polyimide tape package, such asfigure 1 Indicated.

[0036]Example 2

[0037]First, the preparation of high conductive performance fabric electrodes

[0038]The surface of the polyester fabric is plasma treatment, the treatment atmosphere is oxygen, the treatment power is 400 W, the treatment time is 120s, then adding 100 mL of deionized water, adding 1 g of chloride and 0.2 ml of mass concentration of 32% hydrochloric acid, preparation A mixed solution containing chloride and hydrochloric acid was obtained, and the treated polyester fabric was immersed in a mixed solution, impregnated at a temperature of 70 ° C; then 0.2 g of oxide in graphene powder was dispersed in 100 ml after ultrasound treatment. The ionized water was 30 minutes, and 2 mg / ml of the oxide solution was prepared. The impurities were removed by deionized water, and the polyester fabric continued in the graphene solution, impregnated at 20 ° C for 0.35 h, and repeatedly impregnated 5 times Dry; Finally, the polyester fabric electrode was obtained after drying of the dried polyester fabric at a temperature of 90 ° C with 8 g / L of hydrated hydrate solution.

[0039]Second, the preparation of zinc oxide fabric electrode

[0040]First formulated zinc oxide seed solution: 1.00 g of zinc acetate dihydrate is dissolved in 50 mm of isopropyl alcohol to prepare 100 mmol / L of zinc acetate solution, stirred at 80 ° C for 15 min, then add 600 μl of triethylamine at 80 ° C stirring 10min, standing for 3 h; re-formulated zinc oxide growth solution, formulated an equal molar ratio of hexamethylenedicitriamine with a zinc nitrate hexahydrate solution, respectively, respectively, respectively, 7.71 g of six-methylene tetraamine and 16.4 g of zinc nitrate hexahydrate In 550 ml of deionized water, stirred at room temperature for 24 h; the polyester fabric electrode was placed in a zinc oxide seed solution for 10 min, washed with ethanol, placed at 80 ° C, place 7h under room temperature, and then hang it vertically In the zinc oxide growth solution, the growth fluid was 9 h at 80 ° C, at room temperature for 10 h, after removing, washed, to obtain a polyester fabric electrode containing zinc oxide nanorod array.

[0041]Third, the preparation of polyvinylidene fluoride film

[0042]12 wt% polyvinylidene fluoride (MW = 180000) solution was dissolved in N, N-dimethylformamide (DMF), and then stirred at 85 ° C, 600 rpm for 3 hours. The spray coating is rotated in the pretreatment glass, the spin coating rate is 400 rpm, the spin coating time is 25s, and then the glass is placed in a vacuum drying tank for 30 minutes, then heated at 60 ° C for 30 minutes, and finally immerse the polyvinylidene ethylene film into deion The water was isolated from glass, dried to give an β-phase polyfluoride fluoride film, and the polyvinylidene fluoride film had a thickness of 150 μm.

[0043]Fourth, the preparation of fabric base piezoelectric sensor based on zinc oxide nano rod

[0044]The polyester fabric electrodes of the above-mentioned zinc oxide nano-rod arrays were assembled, and the PDMS mold and the polyimide tape were packaged. As a sandwich structure, the upper and lower layers are a fabric electrode having a zinc oxide nano-rod, and the electrode is connected with a copper wire, and the intermediate is a β-phase polyfluidic fluoride film having a piezoelectric effect, and placed it in the PDMS mold. Upper layer polyimide tape package, such asfigure 1 Indicated.

[0045]Example 3

[0046]First, the preparation of high conductive performance fabric electrodes

[0047]The surface of the polyester fabric is plasma treatment, the treatment atmosphere is oxygen, the treatment power is 400 W, the treatment time is 120s, then 100 ml of deionized water, add 1.5 g of chloride and 0.3 ml of mass concentration of 36% hydrochloric acid. A mixed solution containing chloride and hydrochloric acid was prepared. The treated polyester fabric was immersed in a mixed solution, impregnated at a temperature of 90 ° C; then 0.5 g of oxide oxide powder was dispersed at 100 ml after ultrasound treatment. For 30 minutes of deionized water, a 5 mg / ml oxide solution was prepared, and the impurities were removed by deionized water, and the polyester fabric continued to impregnate the polyester fabric, impregnated at a temperature of 30 ° C for 0.4 h, repeatedly impregnated 3 times Drying; Finally, a polyester fabric electrode was obtained after drying of the dried polyester fabric for 12 h at a temperature of 100 ° C at a temperature of 10 g / L.

[0048]Second, the preparation of zinc oxide fabric electrode

[0049]First formulated zinc oxide seed solution: 1.20 g of zinc acetate dihydrate is dissolved in 50 mmol / L in a zinc zinc solution, stirred at 85 ° C for 15 min, then 800 μl of triethylamine is stirred at 85 ° C. 10min, standing for 3 h; re-formulated zinc oxide growth solution, formulated an equal molar ratio of hexamethylenedicitriamine with a zinc nitrate hexahydrate solution, respectively, respectively, respectively, 7.71 g of six-methylene tetraamine and 16.4 g of zinc nitrate hexahydrate The material was dissolved in 550 mL of deionized water, stirred at room temperature for 24 h; the polyester fabric electrode was placed in a zinc oxide seed solution for 15 min, washed with ethanol, placed at 90 ° C, placed under room temperature, and then vertically In the zinc oxide growth solution, the growth fluid was 7 h at 95 ° C, 10 h at room temperature, and then cleaned and dried to obtain a polyester fabric electrode containing zinc oxide nano array.

[0050]Third, the preparation of polyvinylidene fluoride film

[0051]12 wt% polyvinylidene fluoride (MW = 180000) solution was dissolved in N, N-dimethylformamide (DMF), and then stirred at 85 ° C, 600 rpm for 3 hours. The spray coating is rotated in the pretreatment glass, the spin coating rate is 600 rpm, the spin coating time is 15s, and then the glass is placed in a vacuum drying tank for 30 minutes, then heated at 60 ° C for 30 minutes, and finally immerse the polyvinylidene fluoride film into deion The water was isolated from the glass, dried to give an β-phase polyfluoride fluoride film, and the polyvinylidene fluoride film had a thickness of 80 μm.

[0052]Fourth, the preparation of fabric base piezoelectric sensor based on zinc oxide nano rod

[0053]The polyester fabric electrodes of the above-mentioned zinc oxide nano-rod arrays were assembled, and the PDMS mold and the polyimide tape were packaged. As a sandwich structure, the upper and lower layers are a fabric electrode having a zinc oxide nano-rod, and the electrode is connected with a copper wire, and the intermediate is a β-phase polyfluidic fluoride film having a piezoelectric effect, and placed it in the PDMS mold. Upper layer polyimide tape package, such asfigure 1 Indicated.