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Multi-ring high-efficiency external cavity wavelength-adjustable optical feedback waveguide structure and preparation method thereof

A waveguide structure and high-efficiency technology are applied in the field of growth and preparation of a multi-loop high-efficiency external cavity wavelength-tunable optical feedback waveguide structure, which can solve problems such as unfavorable applications and technological progress and development, low feedback efficiency, and incompetence, and achieve improved performance. The effect of optical feedback efficiency and optical modulation efficiency, high modulation efficiency, and low cost

Pending Publication Date: 2021-04-09
HAINAN NORMAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The previous external cavity wavelength tunable technology adopts single-cycle technology, that is, after the light is input, the light is modulated, and the feedback efficiency is low
So far, there is no single-mode waveguide structure with such a wide wavelength tunable range, narrow linewidth, and wide wavelength tunable range.
Other structures have complicated process, high cost, poor performance, and incomplete functions, which are not conducive to the progress and development of related applications and technologies.

Method used

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  • Multi-ring high-efficiency external cavity wavelength-adjustable optical feedback waveguide structure and preparation method thereof
  • Multi-ring high-efficiency external cavity wavelength-adjustable optical feedback waveguide structure and preparation method thereof
  • Multi-ring high-efficiency external cavity wavelength-adjustable optical feedback waveguide structure and preparation method thereof

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Experimental program
Comparison scheme
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Embodiment 1

[0035] Such as figure 1 As shown, this embodiment provides a multi-ring high-efficiency external cavity wavelength-tunable optical feedback waveguide structure based on SOI, which includes: a substrate, an insulating medium low-refractive index layer, and a crystal layer from bottom to top;

[0036] An insulating medium low-refractive index layer and a crystal layer are sequentially arranged upward on the upper surface of the substrate;

[0037] The upper surface of the crystal layer is the output cavity surface 14, and the output cavity surface 14 is provided with an optical waveguide modulation ring, a feedback loop 9, a connection waveguide structure, a beam splitter / combiner 10 and an input / output waveguide 13 structure; and the optical waveguide modulation Both the ring and the feedback loop 9 are provided with heating electrodes;

[0038] Wherein, the optical waveguide modulation ring includes a coarse adjustment ring 7 and a fine adjustment ring 8, and the coarse adjus...

Embodiment 2

[0068] Such as figure 1 As shown, this embodiment provides a multi-ring high-efficiency external cavity wavelength-tunable optical feedback waveguide structure based on GOI, including:

[0069] a substrate, the substrate is a single crystal germanium substrate;

[0070] An insulating dielectric low-refractive index layer of Al2O3, single crystal silicon layer or germanium layer grown sequentially on the upper surface of the substrate;

[0071] On the above structure, two optical waveguide modulation loops, one feedback loop 9, three straight waveguide structures, and one beam splitter / combiner 10 are prepared by etching;

[0072] On the above-mentioned optical waveguide modulation loop and feedback loop 9, a heating electrode is prepared;

[0073] The input / output waveguide 13 has a certain inclination angle to the output cavity surface 14 .

[0074] It should be noted that: in this embodiment, the connecting waveguide structure includes a long waveguide 11 and a short wave...

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Abstract

The invention discloses a multi-ring high-efficiency external cavity wavelength-adjustable optical feedback waveguide structure, which sequentially comprises a substrate, an insulating medium low-refractive-index layer and a crystal layer from bottom to top, wherein the insulating medium low-refractive-index layer and the crystal layer are sequentially arranged on the upper surface of the substrate upwards; a light wave conduction modulation ring, a feedback ring, a connecting waveguide structure, a beam splitter / combiner and an input / output waveguide structure are prepared on the crystal layer; heating electrodes are arranged on the light wave conduction modulation ring and the feedback ring; the invention further discloses a preparation method of the waveguide structure. The multi-ring optical feedback structure is simple in preparation process and low in cost, the optical feedback efficiency and the optical modulation efficiency of light entering the waveguide structure are improved, high optical feedback efficiency and high modulation efficiency are provided for an external cavity semiconductor laser and the optical feedback structure, external cavity modulation of light and high-power output of the external cavity laser are achieved, and the structure is suitable for integrated annular semiconductor lasers with various wavelengths.

Description

technical field [0001] The invention relates to the technical field of semiconductor optoelectronics, and more specifically relates to a multi-ring high-efficiency external cavity wavelength adjustable optical feedback waveguide structure growth and a preparation method thereof. Background technique [0002] The multi-ring high-efficiency external cavity wavelength tunable optical feedback waveguide based on GOI or SOI is suitable for the integrated development of military, industrial, aviation and aerospace systems. In terms of military affairs, multi-ring high-efficiency external cavity wavelength tunable optical feedback waveguides based on GOI or SOI can be used for laser guidance, anti-laser interference, gas detection, etc.; industrial aspects, based on multi-ring high-efficiency external cavity wavelengths on GOI or SOI Tunable optical feedback waveguides can be used for atomic / analytical spectroscopy and special gas detection; in aerospace, multi-ring high-efficiency...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01S5/20H01S5/14
CPCH01S5/20H01S5/14
Inventor 乔忠良赵志斌李再金陈浩刘国军李林曲轶
Owner HAINAN NORMAL UNIV