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Sandwich structure tactile sensing array preparation method

A tactile sensing and sandwich technology, applied in the field of tactile sensing, can solve the problems of time-consuming and labor-intensive, photoresist pollution, etc., and achieve the effect of improving efficiency and realizing effective combination

Active Publication Date: 2021-05-04
HANGZHOU INNOVATION RES INST OF BEIJING UNIV OF AERONAUTICS & ASTRONAUTICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The traditional micro-scale cell array sandwich tactile sensor often adopts photolithography first, and then magnetron or evaporation method, which is time-consuming and labor-intensive, and photoresist is easy to cause pollution

Method used

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  • Sandwich structure tactile sensing array preparation method
  • Sandwich structure tactile sensing array preparation method
  • Sandwich structure tactile sensing array preparation method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0036] An embodiment of the present invention is a method for manufacturing a sandwich structure tactile sensing array. include:

[0037] Cut half of an A4-sized PET substrate, scrub it with alcohol, paste 100μm thick double-sided PE tape on the clean PET substrate, and import the pre-drawn CAD drawing (8*8 array) into the femtosecond laser equipment software to realize For the patterning of double-sided PE tape, the laser uses the galvanometer mode, the wavelength is 343nm, the pulse width is 200fs, the spot diameter is 10μm, the power is 500mW, the processing speed is 300mm / s, the number of processing is 350 times, and the thickness of 100μm is removed with tweezers. Double-sided PE tape pattern, and then scrape the Ag slurry with the scraper method. During the scraping process, the Ag slurry should fully fill the pattern; ensure that the final Ag slurry is horizontally aligned with the uppermost layer of double-sided PE; place the sprayed electrode at 60°C Cured on the glu...

Embodiment 2

[0041] Cut half an A4-sized AlN ceramic substrate, scrub it with alcohol, paste 50 μm thick double-sided PI tape on the clean AlN ceramic substrate, import the pre-drawn CAD drawing (5*25) into the femtosecond laser equipment software, Realize the patterning of double-sided PI tape. Here, the laser adopts the galvanometer mode, the wavelength is 343nm, the pulse width is 20ps, the spot diameter is 50μm, the power is 200mW, the processing speed is 500mm / s, the processing times is 800 times, and 50μm is removed with tweezers. Thick double-sided PI tape pattern, and then spray conductive Pt paste by spraying method, the Pt paste should fully fill the pattern during the spraying process; ensure that the final Pt paste is horizontally aligned with the uppermost layer of double-sided PI; place the sprayed electrode at 150°C Curing on the glue drying machine for 15min, then removing the protective layer on the unteared double-sided PI adhesive tape with tweezers to retain the adhesive...

Embodiment 3

[0044] Cut half an A4-sized stainless steel substrate, scrub it with alcohol, paste 50 μm thick double-sided PET tape on the clean stainless steel ceramic substrate, and import the pre-drawn CAD drawing (5*25) into the femtosecond laser equipment software to realize For the patterning of double-sided PET tape, the laser uses the galvanometer mode, the wavelength is 343nm, the pulse width is 314fs, the spot diameter is 30μm, the power is 100mW, the processing speed is 100mm / s, the number of processing is 10 times, and the thickness of 50μm is removed with tweezers. The pattern of the double-sided PET tape, and then prepare the conductive carbon paste by inkjet printing. Cured on a glue drying machine at 60°C for 60min, then removed the protective layer on the unteared double-sided PET tape with tweezers to retain the adhesive layer, and obtained an arrayed conductive carbon electrode pattern with PET glue (the prepared carbon electrode line width was 600 μm , with a line spacing ...

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Abstract

The invention discloses a sandwich structure tactile sensing array preparation method, and belongs to the technical field of tactile sensing. The method provided by the invention comprises the following steps of: scrubbing a substrate with ethanol, and adhering a double-faced adhesive tape on the clean substrate; directly writing a preset electrode pattern on the double-faced adhesive tape through laser, and removing the double-faced adhesive tape in the corresponding area; uniformly coating the area without the double-faced adhesive tape with electrode slurry, and ensuring that the thickness of the electrode slurry is consistent with that of the residual double-faced adhesive tape on the substrate; heating and curing the electrode slurry, removing a protective layer of the residual double-faced adhesive tape, and retaining an adhesive layer of the residual double-faced adhesive tape to obtain an array electrode pattern with the adhesive layer of the double-faced adhesive tape as an upper electrode or a lower electrode; respectively aligning the two surfaces of the sensitive layer with the upper electrode and the lower electrode, and attaching the sensitive layer to the upper electrode and the lower electrode together through the adhesive layer of the residual double-faced adhesive layer on the upper electrode or the lower electrode. The prepared sandwich structure tactile sensing array has the advantages of high charging efficiency, high anti-interference capability, intelligentization, low construction and maintenance cost, low loss, high safety performance and the like.

Description

technical field [0001] The invention belongs to the technical field of tactile sensing, and in particular relates to a method for preparing a sandwich structure tactile sensing array. Background technique [0002] A smart tactile sensor is as crucial as a human hand because it not only reads physical characteristics such as position, temperature and shape, but also performs various operations by sensing hardness and pressure. The tactile sensor is not simply equivalent to the pressure sensor. It can not only read the pressure signal, but also have the ability to detect physical characteristics such as temperature, thermal conductivity, humidity, etc., and has the function of data processing and transmission. and other physical properties to make corresponding judgments. Tactile sensors convert physiological activity signals into visible electrical signals in the form of signal conduction, thereby realizing rapid and accurate transmission of tactile information. Tactile sen...

Claims

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Application Information

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IPC IPC(8): G01L1/16G01L1/14G01L1/18G01K7/00G01K7/16H01L35/32H01L35/34H01L41/113H01L41/33
CPCG01L1/16G01L1/18G01L1/142G01K7/16G01K7/00H10N19/101H10N10/01H10N30/302H10N30/08
Inventor 邓元俞佳杰张珂杨杰张帅
Owner HANGZHOU INNOVATION RES INST OF BEIJING UNIV OF AERONAUTICS & ASTRONAUTICS
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