System and method for processing micro-channel through femtosecond laser assisted by alternating electric field

A technology of femtosecond laser processing and alternating electric field, applied in the field of femtosecond laser application

Active Publication Date: 2021-05-07
TSINGHUA UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Through the above mechanisms, several problems existing in the processing of microchannels by the existing femtosecond laser-induced backside wet etching technology can be solved, so as to achieve higher quality and higher depth-to-diameter ratio microchannel processing

Method used

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  • System and method for processing micro-channel through femtosecond laser assisted by alternating electric field
  • System and method for processing micro-channel through femtosecond laser assisted by alternating electric field
  • System and method for processing micro-channel through femtosecond laser assisted by alternating electric field

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0041] SiO 2 Taking (fused silica) bulk samples as an example, the thickness L of the material sample 9 to be processed is 1100 microns. After the block sample was ultrasonically cleaned with ethanol and deionized water, it was fixed in the clamp 10 in the liquid container 7, leaving a gap of 20 mm below. The liquid in the liquid container 7 is deionized water, and a circuit system of an alternating electric field and a femtosecond laser optical system are built. The laser is focused through a 40X water immersion objective lens 6 (numerical aperture NA=0.90), so that the focal point is located at 20 μm on the lower surface of the sample. Control the optical axis angle of the half-wave plate 2 to set the single pulse energy of the output laser to 2.5 μJ. The control computer software sets the voltage intensity of the alternating electric field to 440V, the alternating frequency to 20KHz, the repetition frequency of the femtosecond laser to 1000Hz, and the moving speed of the ...

Embodiment 2

[0043] Taking the bulk sample of Corning glass (aluminosilicate glass) as an example, the thickness L of the material sample 9 to be processed is 1200 microns. After the block sample was ultrasonically cleaned with ethanol and deionized water, it was fixed in the fixture 10 in the liquid container 7, leaving a 30mm gap below. The liquid in the liquid container 7 is ethanol, and a circuit system of an alternating electric field and a femtosecond laser optical system are built. The laser is focused through a 60X water immersion objective lens 6 (numerical aperture NA=1.0), so that the focal point is located at 15 μm on the lower surface of the sample. Control the optical axis angle of the half-wave plate 2 to set the single pulse energy of the output laser to 1.35 μJ. The control computer software sets the voltage intensity of the alternating electric field to 520V, the alternating frequency to 50KHz, the repetition frequency of the femtosecond laser to 500Hz, and the moving sp...

Embodiment 3

[0045] Taking the borosilicate glass block sample as an example, the thickness L of the material sample 9 to be processed is 500 microns. After the block sample was ultrasonically cleaned with ethanol and deionized water, it was fixed in the fixture 10 in the liquid container 7, leaving a 30mm gap below. The liquid in the liquid container 7 is a potassium chloride salt solution, and a circuit system of an alternating electric field and a femtosecond laser optical system are built. The laser is focused through a 60X water immersion objective lens 6 (numerical aperture NA=1.0), so that the focal point is located at 10 μm on the lower surface of the sample. Control the optical axis angle of the half-wave plate 2 to set the single pulse energy of the output laser to 3.0 μJ. The control computer software sets the voltage intensity of the alternating electric field to 480V, the alternating frequency to 50KHz, the repetition frequency of the femtosecond laser to 1000Hz, and the movi...

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Abstract

The invention belongs to the technical field of application of femtosecond laser, and relates to a system and method for processing a micro-channel through femtosecond laser assisted by an alternating electric field. The system is composed of an alternating electric field circuit system and a femtosecond laser ray-path system, and comprises a femtosecond laser, optical components, electric pressing boards, an alternating current power supply, a frequency converter, a nanometer translation stage and the like. According to the micro-channel processing method, the external electric field which periodically changes is achieved by means of high-frequency alternating current, thus charged ablation products in a femtosecond laser processing process conduct low-amplitude reciprocating vibration at a corresponding frequency under the action of the periodic high-frequency alternating electric field, or after the ablation products are polarized, force imbalance is caused by uneven charges, thus reciprocating oscillation occurs, and dissociation and fragmentization of the processing products are achieved, so that vibration dissociation processes of the electroneutral ablation products of bubbles and the like are driven; and by means of the method, the ablation products of debris, residues, the bubbles and the like can be effectively discharged, the quality problem brought by defects or light field fluctuation is solved, and meanwhile, sample vibration is avoided, so that the high-quality micro-channel structure with a high depth-diameter ratio is obtained.

Description

technical field [0001] The invention belongs to the technical field of femtosecond laser application, and relates to a system and method for processing microchannels assisted by an alternating electric field with femtosecond laser. Background technique [0002] Microchannel structures play an irreplaceable role in biochemical analysis, drug research, cell culture screening and other fields. Due to the respective needs of these fields, the quality, aspect ratio and other characteristics of the microchannel are extremely important in the application. Research in these fields often requires microchannels to be of extremely high quality, with diameters on the order of tens of microns or even several microns, and a depth of hundreds of microns or more. Many methods such as traditional mechanical processing, electrochemical processing, and ion beam electron beam processing are difficult to meet these basic needs. Driven by the high quality and high aspect ratio manufacturing req...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K26/55B23K26/0622B23K26/06B23K26/70
CPCB23K26/55B23K26/0626B23K26/0622B23K26/70
Inventor 姜澜闫剑锋李佳群
Owner TSINGHUA UNIV
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