Glow discharge mass spectrometry detection method for tungsten-nickel powder

A glow discharge mass spectrometry and detection method technology, which is applied in the direction of measuring devices, preparation of test samples, material analysis by electromagnetic means, etc. Detection, narrow range of species, etc., to achieve high sensitivity, ensure accuracy, and shorten analysis time

Pending Publication Date: 2021-07-13
KONFOONG MATERIALS INTERNATIONAL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This method is to directly compress the sample into a sheet, which is applicable to a narrow range of samples, and it is dif

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0051] Example 1

[0052] This embodiment provides a glow discharge mass spectrometer detection method of tungsten nickel powder, the detection method comprising the steps of:

[0053] (1) The tungsten nickel powder is filled with the sample pit of the indium sheet using a polytetrafluoroethylene picker. The SYP-30TS manual pressurch is pressurized, and the pressure of the pressurized pressure is 10 MPa, and the time is 10 min. Get the sample to be tested;

[0054] Among them, the indium sheet is compressed by molten metal indium, which is cooled; the indium sheet is a circular cake, and the sample pit is a cylindrical shape, and the indium sheet is coincident with the center of the sample pit; the indium; The thickness of the sheet is 2 mm, the diameter of the sample pit is 0.7 mm, and the depth is 0.3 mm;

[0055] The indium sheet with a sample pit is cleaned before the tungsten nickel powder is placed in a sample pit of the indium sheet, and the cleaning treatment comprises pla...

Example Embodiment

[0058] Example 2

[0059] This embodiment provides a glow discharge mass spectrometer detection method of tungsten nickel powder, the detection method comprising the steps of:

[0060] (1) The tungsten nickel powder is filled with the sample pit of the indium sheet by the polytetrafluoroethylene picker, and the SYP-30TS manual pressurch is pressurized, and the pressure of the pressurized pressure is 8 MPa, and the time is 8 minutes. Get the sample to be tested;

[0061] Among them, the indium sheet is compressed by molten metal indium, which is cooled; the indium sheet is a circular cake, and the sample pit is a cylindrical shape, and the indium sheet is coincident with the center of the sample pit; the indium; The thickness of the sheet was 2.5 mm, and the diameter of the sample pit was 0.7 mm and the depth was 0.3 mm;

[0062] The indium sheet with a sample pit is cleaned before the tungsten nickel powder is placed in a sample pit of the indium sheet, and the cleaning treatment ...

Example Embodiment

[0065] Example 3

[0066] This embodiment provides a glow discharge mass spectrometer detection method of tungsten nickel powder, the detection method comprising the steps of:

[0067] (1) The tungsten nickel powder is filled with the sample pit of the indium sheet using a polytetrafluoroethylene picker, and the SYP-30TS manual pressurch is used to pressurize, and the pressure of the pressurized pressure is 12 MPa, and the time is 12 min. Get the sample to be tested;

[0068] Among them, the indium sheet is compressed by molten metal indium, which is cooled; the indium sheet is a circular cake, and the sample pit is a cylindrical shape, and the indium sheet is coincident with the center of the sample pit; the indium; The thickness of the sheet was 3 mm, the diameter of the sample pit was 1 mm, and the depth was 0.5 mm;

[0069] The indium sheet with a sample pit is cleaned before the tungsten nickel powder is placed in a sample pit of the indium sheet, and the cleaning treatment c...

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Abstract

The invention relates to a tungsten-nickel powder glow discharge mass spectrometry detection method, which comprises: (1) placing tungsten-nickel powder in a sample pit of an indium sheet and levelling the top surface, and pressurizing to obtain a sample to be detected; (2) putting the to-be-detected sample obtained in the step (1) into a sample chamber in a glow discharge mass spectrometer, fixing the to-be-detected sample by using a sample clamp, vacuumizing by using an ion source, pushing the to-be-detected sample into a discharge chamber, setting the discharge current to be 1-3mA, the discharge voltage to be 1-2kV and the resolution to be 3400-4000 in a direct-current mode, collecting the signal intensity of the to-be-detected element, and calculating the mass fraction of the to-be-detected element by using the relative sensitivity factor. According to the detection method, by setting the test parameters, a strong test signal can be obtained, and the sensitivity is high.

Description

technical field [0001] The invention relates to the technical field of sample analysis and detection, in particular to a glow discharge mass spectrometry detection method for tungsten-nickel powder. Background technique [0002] In recent years, with the increasing development of sputtering targets and sputtering technology, sputtering targets have played an increasingly important role in sputtering technology, and the quality of sputtering targets directly affects the film formation after sputtering quality. Tungsten-nickel alloy targets have the characteristics of high melting point, high strength, high hardness, excellent wear resistance, heat resistance and good corrosion resistance, and are widely used in machinery, electronics, medical equipment, auto parts, aerospace and military Industry, daily hardware parts, industrial tooling molds, etc. Among them, the tungsten-nickel alloy target has been popularized and applied as the electrochromic smart glass sputtering coa...

Claims

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Application Information

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IPC IPC(8): G01N27/68G01N1/28G01N1/34
CPCG01N27/68G01N1/286G01N1/34
Inventor 姚力军边逸军潘杰王学泽郝海天钟伟华
Owner KONFOONG MATERIALS INTERNATIONAL CO LTD
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