Method for preparing indium tin oxide-indium oxide thin film thermocouple with crystal face preferred orientation

A preferred orientation, thermocouple technology, applied in thermometers, mechanical equipment, heat measurement and other directions that use directly heat-sensitive electrical/magnetic components, can solve problems that affect heat conduction efficiency, cannot measure transient temperature, and difficult thermal balance, etc., Achieve the effects of not easy to fall off, high stability, high Seebeck coefficient and sensitivity

Active Publication Date: 2021-07-27
AVIC BEIJING INST OF AERONAUTICAL MATERIALS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Existing bonding coatings usually have a relatively large thickness, at least tens of microns, which affects heat conduction efficiency. Excessive thickness makes it more difficult for thin-film thermocouples to achieve thermal balance between the bonding coating and the surface of the workpiece, and it is impossible to measure the temperature instantaneously.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0030] Embodiment 1 provides a method for preparing a crystal plane preferred orientation film thermocouple on a metal surface, comprising the following steps:

[0031] Step 1, deposit yttrium-stabilized zirconia (YSZ) bonding coating on the metal workpiece surface by physical vapor deposition process, Al in the evaporated powder of described physical vapor deposition process 2 o 3 The mole percentage is more than 3%, so that the bonding coating is an insulating coating;

[0032] Step 2. Prepare a thin-film thermocouple with a preferred crystal plane orientation on the bonding coating by a magnetron sputtering process. The thin-film thermocouple includes two thermoelectric arms and two electrodes; one of the thermoelectric arms is deposited on an indium tin oxide target. The other part of the thermoelectric arm is deposited from an indium oxide target, and the electrode is deposited from a platinum target and an iridium target;

[0033] Step 3, heat-treating the metal workpi...

Embodiment 2

[0041] Embodiment 2 provides a method for preparing a crystal plane preferred orientation film thermocouple on a metal surface, comprising the following steps:

[0042] Step 1, deposit yttrium-stabilized zirconia (YSZ) bonding coating on the metal workpiece surface by physical vapor deposition process, Al in the evaporated powder of described physical vapor deposition process 2 o3 The mole percentage is more than 3%, so that the bonding coating is an insulating coating;

[0043] Step 2. Prepare a thin-film thermocouple with a preferred crystal plane orientation on the bonding coating by a magnetron sputtering process. The thin-film thermocouple includes two thermoelectric arms and two electrodes; one of the thermoelectric arms is deposited on an indium tin oxide target. The other part of the thermoelectric arm is deposited from an indium oxide target, and the electrode is deposited from a platinum target and an iridium target;

[0044] Step 3, heat-treating the metal workpiec...

Embodiment 3

[0052] Embodiment 3 provides a method for preparing a crystal plane preferred orientation film thermocouple on a metal surface, comprising the following steps:

[0053] Step 1, deposit yttrium-stabilized zirconia (YSZ) bonding coating on the metal workpiece surface by physical vapor deposition process, Al in the evaporated powder of described physical vapor deposition process 2 o 3 The mole percentage is more than 3%, so that the bonding coating is an insulating coating;

[0054] Step 2. Prepare a thin-film thermocouple with a preferred crystal plane orientation on the bonding coating by a magnetron sputtering process. The thin-film thermocouple includes two thermoelectric arms and two electrodes; one of the thermoelectric arms is deposited on an indium tin oxide target. The other part of the thermoelectric arm is deposited from an indium oxide target, and the electrode is deposited from a platinum target and an iridium target;

[0055] Step 3, heat-treating the metal workpi...

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Abstract

The invention relates to a method for preparing an indium tin oxide-indium oxide thin film thermocouple with crystal face preferred orientation. A metal surface is a curved surface, and the method comprises the following steps of 1, depositing a yttrium-stabilized zirconia (YSZ) bonding coating on the surface of a metal workpiece through a physical vapor deposition process; 2, preparing a thin film thermocouple with crystal face preferred orientation on the bonding coating through a magnetron sputtering process; 3, carrying out heat treatment on the metal workpiece with the thin film thermocouple; and 4, preparing a protective layer on the bonding coating through the magnetron sputtering process. According to the thin-film thermocouple, the firm bonding coating serves as a deposition interface, a transition interface between the thin-film thermocouple and a high-temperature alloy blade is fewer, a stress interface is fewer, the thin-film thermocouple is not prone to falling off, the thickness is smaller, and the temperature measurement precision is high. Meanwhile, the thin film thermocouple with the crystal face preferred orientation can be prepared on an unpolished curved surface of the bonding coating by overcoming stress and breaking through the limitation of a traditional plane substrate, so that the thin film thermocouple has relatively high stability.

Description

technical field [0001] The invention relates to a technology for measuring the surface temperature of a high-temperature alloy, and specifically provides a method for preparing a crystal plane preferred orientation film thermocouple on a metal surface, so as to realize rapid and accurate acquisition of temperature data on the surface of a high-temperature alloy. Background technique [0002] Using thin-film thermocouples to measure temperature is a common method to obtain real-time temperature data of high-temperature parts of aero-engines. This technology can effectively avoid overheating of aeroengine blades and provide data support for engine design. However, the combination of thin-film thermocouples on the turbine blades requires the preparation of an insulating layer on the turbine blades. The insulating layer needs to have good insulation, high-temperature bonding ability, and is not easy to fall off, which leads to a certain thickness and affects to temperature meas...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/30C23C14/02C23C14/08C23C14/16C23C14/35C23C14/58G01K7/02F01D5/28
CPCC23C14/30C23C14/08C23C14/024C23C14/35C23C14/086C23C14/352C23C14/165C23C14/081C23C14/5806G01K7/02F01D5/286F01D5/288
Inventor 罗炳威马可欣周海涛罗飞刘大博田野祁洪飞
Owner AVIC BEIJING INST OF AERONAUTICAL MATERIALS
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