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High-toughness TiAlNiN coating and preparation method and application thereof

A high-toughness, coating technology, applied in the coating, metal material coating process, vacuum evaporation coating, etc., can solve the problems of surface coating cracking and peeling, failure, TiAlN coating tool cutting performance decline, etc., to achieve Reduce elastic modulus, improve toughness, controllability and operability

Active Publication Date: 2021-07-27
GUANGDONG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The TiAlN coated tool will also be subjected to force during use. For intermittent cutting (such as milling), the coated tool will also be subject to a certain impact, so the surface coating will crack and peel off, and its reliability will be affected. The restriction of coating toughness makes the cutting performance of TiAlN coating tools decrease prematurely or even fail. Therefore, it is not only necessary to prepare TiAlN-based coatings with high hardness (>30GPa), but also to find effective ways to improve the toughness of TiAlN coatings.

Method used

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  • High-toughness TiAlNiN coating and preparation method and application thereof
  • High-toughness TiAlNiN coating and preparation method and application thereof

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Effect test

Embodiment 1

[0032] 1. Place the polished hard alloy block in acetone and ethanol solutions for ultrasonic cleaning, respectively, for 15 minutes; after cleaning, blow dry with nitrogen with a purity of ≥99.5%;

[0033] 2. Clamp the cleaned sample on the workpiece turret, adjust the revolution speed of the turret to 3rmp, turn on the mechanical pump and molecular pump to draw vacuum, turn on the heater, and set the heating temperature to 500°C;

[0034] 3. When the vacuum reaches 5.0×10 -3 Pa, open the Ar gas flow valve, adjust the flow rate, control the chamber pressure at 2.0Pa, set the bias voltage on the substrate to -400V, and the frequency to 100kHz, glow and clear the substrate for 60min, and adjust the temperature to 350°C;

[0035] 4. Close the Ar gas flow valve, open the N 2 Air flow valve, adjust the flow to keep the cavity pressure at 3.0Pa, set the bias voltage on the substrate to -150V, set Ti 45 al 50 Ni 5 Arc target current is 100A, ignites Ti 45 al 50 Ni 5 Arc targe...

Embodiment 2

[0046]1. Place the polished hard alloy blocks in acetone and ethanol solutions for ultrasonic cleaning, respectively, for 30 minutes; after cleaning, blow dry with nitrogen with a purity of ≥99.5%;

[0047] 2. Clamp the cleaned sample on the workpiece turret, adjust the revolution speed of the turret to 3rmp, turn on the mechanical pump and molecular pump to draw vacuum, turn on the heater, and set the heating temperature to 500°C;

[0048] 3. When the vacuum reaches 5.0×10 -3 Pa, open the Ar gas flow valve, adjust the flow rate, control the chamber pressure at 2.0Pa, set the bias voltage on the substrate to -1000V, and the frequency to 10kHz, glow and clear the substrate for 30min, and adjust the temperature to 350°C;

[0049] 4. Close the Ar gas flow valve, open the N 2 Air flow valve, adjust the flow to keep the cavity pressure at 3.0Pa, set the bias voltage on the substrate to -140V, set Ti 40 Al 50 Ni 10 Arc target current is 60A, ignite Ti 40 Al 50 Ni 10 Arc targe...

Embodiment 3

[0053] 1. Place the polished hard alloy blocks in acetone and ethanol solutions for ultrasonic cleaning, respectively, for 15 minutes; after cleaning, blow dry with nitrogen with a purity of ≥99.5%;

[0054] 2. Clamp the cleaned sample on the workpiece turret, adjust the revolution speed of the turret to 3rmp, turn on the mechanical pump and molecular pump to draw vacuum, turn on the heater, and set the heating temperature to 500°C;

[0055] 3. When the vacuum reaches 5.0×10 -3 Pa, open the Ar gas flow valve, adjust the flow rate, control the chamber pressure at 2.0Pa, set the bias voltage on the substrate to -800V, and the frequency to 80kHz, glow and clear the substrate for 30min, and adjust the temperature to 350°C;

[0056] 4. Close the Ar gas flow valve, open the N 2 Air flow valve, adjust the flow to keep the cavity pressure at 3.0Pa, set the bias voltage on the substrate to -100V, set Ti 30 Al 50 Ni 20 Arc target current is 80A, ignite Ti 30 Al 50 Ni 20 Arc targe...

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Abstract

The invention belongs to the technical field of surface engineering and cutting tools, and discloses a high-toughness TiAlNiN coating and a preparation method and application thereof. The coating has the molecular formula of Ti < x > Al < y > Ni < z > N, wherein x is 15.00 to 65.00 at.%, y is 15.00 to 65.00 at.%, z is 5.00 to 20.00 at.%, x + y + z = 100%, and the atomic ratio of metal to nitrogen is normalized to be 1: 1. According to the high-toughness TiAlNiN coating and the preparation method and application thereof, an arc ion plating deposition method is adopted, a TiAl alloy target containing Ni is used, the prepared TiAlNiN coating is high in deposition rate and good in film-substrate binding force, a nitride / metal two-phase composite structure is obtained by introducing a metal phase, the hardness is high, the toughness is remarkably superior to that of a traditional TiAlN coating, the TiAlNiN coating is suitable for tools and molds with the surfaces subjected to certain impact loads, the service performance is improved, and the service life is prolonged.

Description

technical field [0001] The invention belongs to the technical field of surface engineering and cutting tools, and in particular relates to a high-toughness TiAlNiN coating and its preparation method and application. Background technique [0002] The rapid development of modern cutting technology has put forward higher requirements for tool materials. The correct selection of tool materials plays a decisive role in the quality and precision of cutting and improving the service life of tools. As the most common ternary coating, TiAlN coating has a NaCl crystal structure, and its Al atoms replace the positions of Ti atoms in the TiN lattice, which has high hardness, good wear resistance and oxidation resistance. In particular, it will produce amplitude-modulated decomposition reactions under the action of heat at high temperatures (800-1000°C), forming Ti-rich and Al-rich nano-sized regions, resulting in obvious age hardening effects, so it is widely used in cutting tools, grea...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/32C23C14/06C23C14/02
CPCC23C14/325C23C14/0641C23C14/0021C23C14/022
Inventor 许雨翔江龙王启民彭滨
Owner GUANGDONG UNIV OF TECH
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