Photo-thermal spectrum trace gas detection device and method based on cavity enhancement

A technology of trace gas and detection device, which is applied in the direction of measuring device, color/spectral characteristic measurement, material analysis through optical means, etc. It can solve the problem of limiting the detection performance of sensors, the increase of thermal noise amplitude of tuning fork, and the signal noise of sensing system Ratio deterioration and other issues, to achieve the effect of low cost, enhanced amplitude, high sensitivity

Active Publication Date: 2021-08-13
HARBIN INST OF TECH
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Problems solved by technology

However, if the laser power is too high, the thermal noise amplitude in the tuning fork will rise sharply, which will lead to the deterioration of the signal-to-noise ratio of the sensing system, and ultimately limit the detection performance of the sensor, making this method have great limitations.

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  • Photo-thermal spectrum trace gas detection device and method based on cavity enhancement
  • Photo-thermal spectrum trace gas detection device and method based on cavity enhancement

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Embodiment Construction

[0023] The technical solution of the present invention will be further described below in conjunction with the accompanying drawings, but it is not limited thereto. Any modification or equivalent replacement of the technical solution of the present invention without departing from the spirit and scope of the technical solution of the present invention should be covered by the present invention. within the scope of protection.

[0024] The invention provides a cavity-enhanced photothermal spectroscopy trace gas detection device, such as figure 1 As shown, the device includes a tunable semiconductor laser 1, a laser collimation system 2, a gas chamber 3 for the gas to be measured, a focusing lens 4, a quartz tuning fork 5, a resonance tube 6, a lock-in amplifier 7, a signal generator 8, a laser control Device 9, adder 10, computer 11, wherein:

[0025] The resonance tube 6 has two sections, and the two sections of the resonance tube 6 are placed on the front and rear sides of t...

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Abstract

The invention discloses a photo-thermal spectrum trace gas detection device and method based on cavity enhancement. Llow-frequency sawtooth waves generated by a signal generator and high-frequency sine waves generated by a lock-in amplifier are sent into a summator, and superposed signals form modulation signals of laser wavelength; a modulation signal is sent into a laser controller, the wavelength of laser output by the tunable semiconductor laser is changed through a temperature module and a current module, the laser enters a gas chamber of gas to be measured after passing through a laser collimation system, and target gas to be measured absorbs part of laser energy; laser is emitted from the gas chamber of the gas to be measured and then is focused to the root position of a quartz tuning fork interdigital through a light spot of a focusing lens, a generated vibration signal is converted into an electric signal due to photoinduced thermoelastic deformation and a piezoelectric effect, and the electric signal is input into a lock-in amplifier for harmonic signal acquisition; the harmonic data are finally input into a computer to be processed, and the gas concentration is inverted. The device has the advantages of high sensitivity, low cost, non-contact measurement and the like.

Description

technical field [0001] The invention relates to a cavity-enhanced photothermal spectrum trace gas detection device and method. Background technique [0002] Quartz-enhanced photothermal spectroscopy technology is a new type of trace gas detection technology proposed by Ma Yufei and others in 2018. In recent years, many research institutes at home and abroad have used this technology to achieve high sensitivity, good selectivity, and fast response. Fast, non-contact gas measurement. The technology takes advantage of the light-absorbing properties of quartz materials and converts the absorbed light energy into heat energy. Due to the thermoelastic effect, the surface of the quartz tuning fork will be mechanically deformed, and the piezoelectric effect of the quartz can be used to detect the electrical signal, thereby reversing the gas concentration. Under the same gas concentration and experimental conditions, the noise value will only fluctuate randomly in a small range, an...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/17G01N21/25
CPCG01N21/171G01N21/1717G01N21/255G01N2021/1725
Inventor 马欲飞郎梓婷乔顺达何应于欣
Owner HARBIN INST OF TECH
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