Low-temperature plasma generating device and application thereof
A low-temperature plasma and generating device technology, applied in the direction of plasma, electrical components, etc., can solve the problems of inability to process multiple working media at the same time, limit application flexibility and diversity, and cannot be sustained and stable, so as to increase the area of action and The effect of fit, reduce the difficulty of discharge, and work stably
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Embodiment 1
[0092] A low-temperature plasma generator according to an embodiment of the present invention, its main components include: a transformer, a pair of electrodes, a working medium 4 and a substrate 3 .
[0093] like figure 1 As shown, when the high-voltage power supply system 1 is a transformer, one side of the transformer is a low-voltage input terminal, the low-voltage input terminal is the transformer primary side I11 and the transformer primary side II12, and the other side of the transformer is the high voltage input terminal. Voltage output terminals, high voltage output terminals are transformer secondary side I13 and transformer secondary side II14, and the electrodes I21 and electrode II22 are electrically connected to transformer secondary side I13 and transformer secondary side II14 respectively. Electrode I21 and electrode II22 are used to load a high-voltage electric field under the action of the high-voltage power supply system 1;
[0094] The low-temperature plas...
Embodiment 2
[0114] like image 3 , The difference from Embodiment 1 is that a transmission member 23 is provided between the electrode I21 and the electrode II22. Specifically, the transmission member 23 is determined according to the number of electrodes I21 and electrodes II22. In this embodiment, two electrodes I 21 and two electrodes II 22 are provided on the substrate 3 , and correspondingly, two transmission members 23 are provided. The multiple transmission elements 23 can be electrically connected or not in contact with each other.
[0115] In addition, in this embodiment, the electrode I21 and the electrode II22 are arranged in zigzag lines, and are provided with a convex or concave structure to increase the active area. One or more working media 4 can be set along the zigzag path of electrode I21 and electrode II22, and the low-temperature plasma generator can use different working media 4 at the same time to meet different treatment needs and act on different treatment goals ...
Embodiment 3
[0120] As an improvement to the second embodiment, such as Figure 4 , on the basis of the series structure formed by the electrodes I21 and II22, one or more sets of electrodes I21 and II22 are connected in parallel to form a parallel structure. That is to say, the parallel structure is that the working medium 4 is added between the two electrodes I21 and II22 to form a parallel structure for processing multiple working mediums 4 .
[0121] In this embodiment, two pairs of electrodes are provided, and the two pairs of electrodes are respectively arranged as broken lines, and are provided with a convex or concave structure to increase the active area.
[0122] In this embodiment, in order to induce the discharge of the working medium 4 , especially to induce the discharge of the working medium 4 that is difficult to discharge (such as water vapor, etc.), four transmission members 23 are provided. The multiple transmission elements 23 can be electrically connected or not in co...
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