Sub-wavelength grating and vertical cavity surface emitting laser

Abstract

The invention discloses a sub-wavelength grating and a vertical cavity surface emitting laser. The sub-wavelength grating comprises a substrate layer (2) formed by indium tin oxide; and a grating layer (1) formed by amorphous silicon or aluminum gallium arsenide, wherein the grating layer is formed on the substrate layer (2). The sub-wavelength grating based on the substrate layer (2) formed by indium tin oxide serves as a P-surface reflecting mirror. The vertical cavity surface emitting laser comprises a light emitting device, and the sub-wavelength grating disposed on a P-type doped layer (4) of the light emitting device, wherein the light-emitting device comprises a substrate (8), an N-type doping layer (7) and a supporting table (10) which are sequentially stacked from bottom to top, and a lower electrode (9) is arranged on the bottom surface of the substrate.

Description

technical field [0001] The invention relates to the field of optoelectronic technology, in particular to a sub-wavelength grating and a vertical cavity surface emitting laser. Background technique [0002] The traditional VCSEL device (Vertical Cavity Surface Emitting Laser) uses a distributed Bragg reflector (DBR) as a highly reflective mirror structure. However, the DBR has a large thickness, poor conductivity and serious heat generation. In recent years, the technology of VCSEL using high-contrast subwavelength grating (HCG) as a high reflection mirror has been developed, which has broad application scenarios in the fields of optical communication, medical imaging and three-dimensional sensing. [0003] A sub-wavelength grating is a periodic grating layer whose grating period is smaller than the wavelength of light, and the contrast between the refractive index of the grating and the refractive index of the filling medium is relatively large. Through structural design, t...

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Problems solved by technology

[0004] However, the materials currently used to make subwavelength gratings for VCSELs usually include insulating oxide materials, all-dielectric materials, air-plus-semiconductor / dielectric materials, or all-semiconductor materials. These materials have excellent optical properties but extremely poor electrical conductivity. It leads to problems such as high power, large-diameter HCG VCSEL current injection difficulties, small current extension distance, and uneven current distribution, which seriously affects the reliability and beam quality of HCG VCSEL devices

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