Cleaning solution for semiconductor integrated circuit and production process of cleaning solution

Abstract

The invention discloses a cleaning solution for a semiconductor integrated circuit and a production process of the cleaning solution, and belongs to the technical field of cleaning solutions for integrated circuits. The cleaning solution for the semiconductor integrated circuit is prepared from the following raw materials in parts by weight: 30 to 50 parts of absolute ethyl alcohol, 10 to 20 parts of isopropyl alcohol, 5 to 15 parts of N, N-bis (hydroxyethyl) dodecyl amide, 5.2 to 6.2 parts of dichloromethane, 4.5 to 6.5 parts of 1, 4-butanediol and 4.3 to 6.5 parts of adsorbent, the cleaning solution for the semiconductor integrated circuit is prepared by the steps of preparing a solution A, preparing a solution B, mixing and the like, an adsorbent is prepared, attapulgite is used as a raw material, a modifier with quaternary ammonium salt is combined with the adsorbent, and the modified attapulgite has oleophylic groups and quaternary ammonium salt groups, so that microorganisms and oil stains can be taken away; and the cleaning solution prepared by using the adsorbent has excellent adsorption capacity.

Description

technical field [0001] The invention relates to the technical field of cleaning fluid for integrated circuits, in particular to a cleaning fluid for semiconductor integrated circuits and a production process thereof. Background technique [0002] Semiconductor integrated circuit refers to a semiconductor integrated circuit device with at least one circuit block on a semiconductor substrate. A semiconductor integrated circuit is a combination of active components such as transistors, diodes, and passive components such as resistors and capacitors. Interconnection, "integration" on a single semiconductor chip, so as to complete specific circuit or system functions. [0003] At present, semiconductor integrated circuits are used in various fields, such as computer industry, industrial control, machinery, electronics, aviation and many other fields. Due to its high precision and high performance, in the long-term use process, a variety of impurities and dust will accumulate in ...

AI Technical Summary

Problems solved by technology

Due to its high precision and high performance, in the long-term use process, a variety of impurities and dust will accumulate in the integrated circuit, which needs to be cleaned strictly, otherwise its performance will be seriously affected and cannot be used. requirements, so it is necessary to prepare a cleaning solution for semiconductor integrated circuits

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