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A target and process technology, applied in the field of recycling technology, can solve the problems of high cost and heavy pollution, and achieve the effects of low cost, reduced energy consumption, and low requirements for electrolytic current
Active Publication Date: 2021-11-16
ENSHI ZHICHUN ELECTRONIC MATERIAL CO LTD
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[0005] The purpose of the present invention is to overcome the defects and problems of relatively large pollution and high cost in the prior art, and provide a recycling process for ITO waste targets with low pollution and low cost
Method used
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Embodiment 1
[0056] see figure 1 — Figure 8 , a recovery process for ITO waste target material, the recovery process comprises the following steps:
[0057] Liquid-making step: prepare an electrolyte solution 10 in the electrolytic cell 1, the pH value of the electrolyte solution 10 is between 0.5-2; the solute in the electrolyte solution 10 is 0.01-5 mol / l of organic acid radicals and 0.01-5 mol of inorganic acid radicals / l, the solvent in the electrolytic solution 10 is ultrapure water;
[0058] Feeding steps: first put the waste ITO target into the anode basket 2, then put the cathode plate 3 and the anode basket 2 into the electrolyte 10, the inside of the anode basket 2 communicates with the electrolyte 10, and then put the anode basket 2 on The anode lug 22 on the cathode plate 3 is connected to the circuit;
[0059] Electrolysis step: start the circuit where the anode lug 22 and the cathode lug are located, start electrolysis, the electrolysis temperature is 10-50°C, the electr...
Embodiment 2
[0061] Basic content is the same as embodiment 1, the difference is:
[0062] The organic acid group is any one or any mixture of sulfonate, citrate, formate and sulfinate.
[0063] The inorganic acid group is any one of sulfate group and nitrate group or mixed arbitrarily.
Embodiment 3
[0065] Basic content is the same as embodiment 1, the difference is:
[0066] The top of the anode basket 2 is provided with an anode lug 22 at a position close to the anode basket opening 21, and the anode basket 2 is provided with an anode basket cavity 23 for setting waste ITO targets, and the side of the anode basket 2 is provided with A plurality of male through holes 24 communicate with the electrolyte solution 10 in the electrolytic cell 1 . Preferably, the anode basket 2 and the anode lug 22 are made of titanium.
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Abstract
The invention provides a recovery process of an ITO waste target material. The recovery process comprises the following steps: firstly, an electrolyte is prepared in an electrolytic tank, wherein the PH value of the electrolyte is 0.5-2, solutes in the electrolyte are 0.01-5mol/l of organic acid radicals and 0.01-5mol/l of inorganic acid radicals, and a solvent in the electrolyte is ultrapure water; then, the ITO waste target material is put in an anode basket; then, a cathode plate and the anode basket are both put in the electrolyte, and the internal of the anode basket communicates with the electrolyte; cathode lugs on the anode basket and the cathode plate are connected to a circuit; then, the circuit with the anode lugs and the cathode lugs is started to start electrolysis; the electrolysis temperature is 10-50 DEG C; the electrolysis current is 30-100A/m<2>; and indium elementary substances are generated on the surface of the cathode plate, and preferably, the indium elementary substances generated on the cathode plate are wholly flaky for wholly taking indium. The recovery process generates no waste gas and waste liquid, and is lower in pollution, free of loss and lower in cost.
Description
technical field [0001] The invention relates to a recycling technology, which belongs to the field of ITO target materials, in particular to a recycling process of ITO waste target materials. Background technique [0002] The ITO target is prepared by mixing indium with a purity of more than 99.99% and tin with a purity of more than 99.99% through electrochemical or fire methods. In the existing technology, the use efficiency of the ITO target is only about 30%. A large number of waste targets are produced, and as far as waste targets are concerned, they are still mainly a mixture of indium oxide and tin oxide. Among them, the mass ratio of indium oxide and tin oxide is generally between 95-80:5-15. The main purpose of the ITO target is to purify the high value-added metal indium in the target. The higher the purity, the better the performance of subsequent use. The total amount of metals in the earth is limited, and recycling and purification can use resources more efficien...
Claims
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