Vacuum adsorption clamp and adsorption method for clamping thin-wall spherical shell type micro component

Abstract

The invention provides a vacuum adsorption clamp and an adsorption method for clamping a thin-wall spherical shell type micro component, and relates to the technical field of clamping of thin-wall spherical shell type micro components. The vacuum adsorption clamp and the adsorption method are provided for solving the problems that in the machining process of uniformly distributing micro pit structures on the whole surface of the thin-wall spherical shell type micro component, an existing clamping mode is difficult to operate, a control part is complex, consequently, spherical shell deformation is large, and the repeated positioning precision is low. According to the technical key points, a vacuum suction head is detachably connected with the adsorption end of a vacuum adsorption clamp body in a sealed mode, and the hole diameter of a vacuum cavity in the vacuum adsorption clamp body in the axial direction of the vacuum adsorption clamp body is decreased from the connecting end to the adsorption end; and the vacuum cavity serves as a main air source channel, and an auxiliary air source connector communicating with the vacuum cavity is formed in the vacuum adsorption clamp body. When the vacuum adsorption clamp is adopted to adsorb the thin-wall spherical shell type micro component, the specific structure shape of the suction head and the vacuum negative pressure are calculated and checked. A clamp chuck is suitable for flexibly adjusting the vacuum degree according to the deformation condition of a thin-wall spherical shell, that is, the suction force of the clamp chuck is adjusted, clamping deformation is reduced, and the machining precision is guaranteed.

Description

technical field [0001] The invention relates to a vacuum adsorption fixture and an adsorption method for clamping thin-walled spherical shell micro components, and relates to the technical field of thin-wall spherical shell micro components clamping. [0002] technical background [0003] With the continuous development and progress of science and technology, various thin-walled spherical shell micro components with weak stiffness are widely used in the fields of biomedicine, electronic information, aerospace, national defense and military, etc., and the surface shape is required to reach sub-micron shape accuracy, Nanoscale surface roughness and minimal subsurface damage. It is necessary to adopt appropriate clamping methods to reduce clamping deformation and ensure that the workpiece is not damaged, and ultra-precision micro-milling can achieve high-precision machining of the full-surface cross-scale feature structure. [0004] For example, thin-walled spherical shell micr...

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Problems solved by technology

[0006] The technical problem to be solved by the present invention is: in the process of processing the thin-walled spherical micro-components uniformly distributed on the entire surface of the micro-pit structure, the existing clamping method is difficult to operate and the control parts are relatively complicated, resulting in large deformation of the spherical shell and repetitive In order to solve the problems of low positioning accuracy, and then provide a vacuum adsorption fixture and adsorption method for the clamping of small components of thin-walled spherical shells

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