Method for customizing AFM probe based on FIB equipment and atomic force microscope
A kind of equipment and probe technology, applied in the direction of scanning probe microscopy, scanning probe technology, measuring device, etc., can solve the problems that the detection results deviate from the actual shape of the sample, the AFM probe process is complicated, and the bottom of the sample cannot be touched. , to achieve the effect of improving the preparation yield, reducing the preparation cost and simple method
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[0036] Embodiments of the present invention are described below through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and various modifications or changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of the present invention. For example, when describing the embodiments of the present invention in detail, for the convenience of explanation, the cross-sectional view showing the device structure will not be partially enlarged according to the general scale, and the schematic diagram is only an example, which should not limit the protection scope of the present invention. In addition, the three-dimensional space dimensions of length, width and depth should be included in...
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