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Capacitive flexible tactile sensor based on graded inclined micro-cylinder structure

A tactile sensor, capacitive technology, applied in the field of tactile sensing, can solve the problems of easy deformation, low detection limit, small detection range, etc., and achieve the effect of strong deformation ability, good stability and high sensitivity

Pending Publication Date: 2022-01-18
ANHUI UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] 1) The microstructure dielectric layer of the existing capacitive touch sensor adopts structures such as pyramids and cones, which are distributed in arrays in the dielectric layer; the presence of the tip of the microstructure will improve the sensitivity of the sensor, because the microstructure in the dielectric layer The tip is easily deformed when it is stressed, resulting in a rapid change in the dielectric constant and the distance between the electrodes, but the adhesion between the tip and its connection layer is not strong enough, and the tip is easily damaged when the force is applied, resulting in slippage
Therefore, there is no tight adhesion between the microstructure dielectric layer and the electrode layer of the existing capacitive tactile sensor, and there is a slip factor, which limits the popularization and application of the capacitive tactile sensor
[0006] 2) The traditional capacitive tactile sensor pursues the extremely small detection limit of the sensor during research, and needs to continuously miniaturize the microstructure of the dielectric layer, so that the maximum pressure limit that the sensor can withstand is reduced, resulting in a small detection range and a low detection limit. lower
Therefore, the existing capacitive tactile sensors are difficult to have a small detection limit and a wide detection range at the same time, and will fail under a slightly larger pressure, resulting in a limited application range

Method used

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  • Capacitive flexible tactile sensor based on graded inclined micro-cylinder structure
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  • Capacitive flexible tactile sensor based on graded inclined micro-cylinder structure

Examples

Experimental program
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Effect test

Embodiment 1

[0042] In this embodiment, a flexible tactile sensor with a 5×5 micro-cylindrical unit structure is prepared according to the above preparation method. Specifically, the height (H) of the long micro cylinder (comprising the long micro cylinder 312 of the upper dielectric layer and the long micro cylinder 322 of the lower dielectric layer) is 3 mm, the thickness (c) of the upper substrate 11 and the lower substrate 21 is 0.8 mm, the length and The width is 24mm, the upper dielectric layer substrate 311 and the lower dielectric layer substrate 321 are both 0.8mm, the thickness (d) of the upper electrode and the lower electrode 22 is 0.3mm, the length and width are 24mm, and the micro cylinder diameter (R) is 1.6mm remains unchanged, through different microstructures, the ratio of the diameter of the micro cylinder to the spacing (a:b), the height (h) of the short micro cylinder (including the short micro cylinder 313 in the upper dielectric layer and the short micro cylinder 323 ...

Embodiment 2

[0057] The preparation method of the flexible tactile sensor prepared in Example 2 is the same as that in Example 1, except that the micro-cylindrical unit array of the prepared sensor is different. Specifically, the height (H) of the long micro-column in the dielectric layer (including the long micro-column 312 in the dielectric layer and the long micro-cylinder 322 in the lower dielectric layer) is 3mm, and the thickness (c) of the upper substrate 11 and the lower substrate 21 is 0.8mm , the upper dielectric layer substrate 311 and the lower dielectric layer substrate 321 are 0.8 mm, the thickness (d) of the upper electrode 12 and the lower electrode 22 is 0.3 mm, the diameter of the micro cylinder (R) is 1.6 mm, and the ratio of the diameter of the micro cylinder to the spacing is 1 2. The height of the short micro cylinders (including the short micro cylinders 313 in the upper dielectric layer and the short micro cylinders 323 in the lower dielectric layer) is 2.25mm, and t...

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Abstract

The invention discloses a capacitive flexible touch sensor based on a graded inclined micro-cylinder structure. The capacitive flexible touch sensor comprises an upper electrode layer, a lower electrode layer and a dielectric layer; the dielectric layer is composed of an upper dielectric layer and a lower dielectric layer, and the upper dielectric layer and the lower dielectric layer are symmetrically distributed up and down; the upper and lower dielectric layers comprise upper and lower dielectric layer substrates, upper and lower dielectric layer long micro-cylinders and upper and lower dielectric layer short micro-cylinders, the upper and lower dielectric layer substrates are tightly bonded with the lower sides / upper sides of the upper and lower electrode layers, and the upper and lower dielectric layer long micro-cylinders and the upper and lower dielectric layer short micro-cylinders are staggered and distributed at the bottoms / tops of the upper and lower dielectric layer substrates at equal intervals; and the long micro-cylinders of the upper dielectric layer and the long micro-cylinders of the lower dielectric layer are tightly bonded, and a distance exists between the short micro-cylinders of the upper dielectric layer and the short micro-cylinders of the lower dielectric layer. According to the invention, the structure is stable, the viscous effect is overcome, the dielectric layer is easy to bend and deform, the sensitivity is higher, the response / recovery time is shorter, the hysteresis quality is lower, and the stability is better.

Description

technical field [0001] The invention relates to a capacitive flexible tactile sensor, in particular to a capacitive flexible tactile sensor based on a graded inclined micro-cylindrical structure, belonging to the technical field of tactile sensing. Background technique [0002] With the continuous development of sensing technology and artificial intelligence, intelligent robots are developing in the direction of health monitoring, human-computer interaction, etc. Tactile perception is an important way for robots to interact with external information. Flexible tactile sensors are directly and widely used in intelligent robots, electronics, etc. areas such as skin. Based on the wide application of intelligent robots in industry and the high-precision operation requirements of intelligent robots in special industries, tactile sensors, as one of the key components of intelligent robots, have more and more requirements on the dynamic response, sensitivity, and structural stabilit...

Claims

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Application Information

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IPC IPC(8): G01L1/14
CPCG01L1/142G01L1/146
Inventor 郭小辉洪炜强吴俊杰王伊凡宣文瀚毛善安段章领杨利霞许耀华屈磊
Owner ANHUI UNIVERSITY