Organic-inorganic hybrid integrated variable optical attenuator and preparation method thereof

Abstract

The invention discloses an organic-inorganic hybrid integrated variable optical attenuator and a preparation method thereof, and belongs to the technical field of planar optical waveguide devices and preparation thereof. The organic-inorganic hybrid integrated variable optical attenuator is composed of a silicon substrate, a silicon dioxide lower cladding layer, a germanium-doped silicon dioxide input waveguide and a germanium-doped silicon dioxide output waveguide which are of strip-shaped structures, an interlayer converter based on a vertical MMI structure, a boron and phosphorus-doped silicon dioxide upper cladding layer, a 1 * 1 Mach-Zehnder thermo-optical switch, a polymer upper cladding layer and a heating electrode, wherein the refractive indexes of the input waveguide and the output waveguide are larger than the refractive index of the silicon dioxide upper cladding. The vertical MMI is compact in structure, a VOA device of a traditional inorganic PLC is replaced with a polymer thermo-optical switch type VOA device, and transmission of light from a lower-layer inorganic waveguide to an upper-layer polymer waveguide is achieved; the light transmission power is efficiently adjusted, device power consumption is low, and monolithic integration of organic and inorganic photonic devices is achieved; and the organic-inorganic hybrid integrated variable optical attenuator is compatible with an existing silicon dioxide PLC technology, is easy for large-scale production and low in cost.

Description

technical field [0001] The invention belongs to the technical field of planar optical waveguide devices and their preparation, and in particular relates to an organic-inorganic hybrid integrated variable optical attenuator and a preparation method thereof. Background technique [0002] Variable Optical Attenuator (VOA) is one of the most basic passive devices in optical communication, and has been widely used in Wavelength Division (De) Multiplex (WDM) networks to realize the optical power between channels in the system. Dynamic monitoring of equalization and transmission systems. Silica waveguide has low coupling loss and good thermal stability, but its thermo-optic coefficient is small, so the thermo-optic variable optical attenuator (Variable Optical Attenuator, VOA) used to prepare it consumes a lot of power. Compared with inorganic materials, organic polymer materials have the characteristics of low thermal conductivity and high thermo-optic coefficient, and the prepar...

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Problems solved by technology

Silica waveguide has low coupling loss and good thermal stability, but its thermo-optic coefficient is small, and the thermo-optic variable optical attenuator (Variable Optical Attenuator, VOA) used to prepare it consumes a lot of power

[0003] At present, most integrated optical devices are based on two-dimensional planar optical waveguide structures. When the integration level of devices gradually increases, two-dimensional integrated optical waveguide devices will introduce a large number of waveguide intersections, thereby introducing crosstalk and loss, limiting device scale and integration. degree of further improvement

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