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Separation method of resin/pigment in color photoresist stripping waste liquid

A technology for stripping waste liquid and color photoresist, applied in separation methods, chemical instruments and methods, organic dyes, etc., can solve the problems of non-conformity with the development concept of carbon reduction, high disposal costs, waste of resources, etc., to reduce impact, reduce Yields, the effect of simplifying separation steps

Pending Publication Date: 2022-03-08
石泰山
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the cost of disposal is high and the waste of resources is large, which is not in line with the development concept of carbon reduction

Method used

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  • Separation method of resin/pigment in color photoresist stripping waste liquid
  • Separation method of resin/pigment in color photoresist stripping waste liquid
  • Separation method of resin/pigment in color photoresist stripping waste liquid

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Experimental program
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Effect test

Embodiment 1

[0031] (1) Green stripping waste liquid, carry out thermogravimetric analysis (TGA), analysis result sees figure 1 , Two peaks appeared at 104.2°C and 386.83°C respectively, the weight loss below 140°C was 81.474%, the weight loss was 2.066% at 140°C to 270°C, and the residual amount at 270°C to 500°C was 9.962%. Through thermogravimetric analysis, it can be known that the components include low molecular volatile organic compounds, higher molecular resins / pigments, etc.

[0032] (2) green stripping waste liquid, carry out chromatographic analysis (GPC), see figure 2 ; The molecular weight distribution appears in three peaks of 105, 314, and 900, mainly low-molecular substances.

[0033] (3) Green stripping waste liquid, carry out gas-mass analysis (GC-MS), see image 3 , the main substances retrieved are acetaldehyde o-methyl oxime (CAS 33581-43-0), ethylene glycol monoethyl ether (CAS 110-80-5), diethylene glycol diethyl ether (CAS 112-36-7), propylene glycol Methyl ethe...

Embodiment 2

[0042] (1) 1L of green stripping waste liquid is evaporated, the evaporation temperature is 80-120°C, the steam is cooled by cooling water, and about 0.8L of organic solution is collected as the product; when the volume of the solution is reduced to 20%, the evaporation is stopped, and the remaining about 0.2L is evaporated residual liquid.

[0043] (2) Pour the evaporated residue in step (1) into a reaction flask, add about 0.2L of water, the total volume is about 0.4L, a green viscous solid forms, and the solution becomes clear to obtain a solid-containing mixed solution.

[0044] (3) Separating the solid-containing mixed liquid in step (2) through a centrifuge to obtain resin / pigment solids and aqueous organic matter.

[0045] (4) Place the resin / pigment solid in step (3) in an oven and dry it at 150°C, the green solid is about 0.1kg.

[0046] (5) The organic solvent in the step (1) is used as the thinner of the paint, and the aqueous organic matter in the step (3) is used...

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Abstract

The invention discloses a method for separating resin / pigment in color photoresist stripping waste liquid, and relates to reduction and comprehensive utilization of hazardous wastes. The method comprises the following steps: 1) evaporating the stripping waste liquid to reduce the volume to obtain evaporated residual liquid; 2) adding water into the evaporation raffinate to reduce the solubility of resin / pigment in the evaporation raffinate and promote precipitation of the resin / pigment until a liquid phase in the evaporation raffinate is basically colorless to obtain a solid-containing mixed solution; 3) carrying out solid-liquid separation on the solid-containing mixed solution to obtain a viscous resin / pigment solid and a water-containing organic matter; and 4) drying the viscous resin / pigment solid to obtain the resin / pigment solid. And the method can also be applied to resin separation in achromatic photoresist stripping waste liquid. The separation step of the waste stripping liquid can be simplified, the resin / pigment can be separated out, the influence of the resin / pigment on the separation process is reduced, the generation amount of hazardous waste is greatly reduced, and the organic solvent in the waste stripping liquid can be utilized in a gradient and cyclic mode.

Description

technical field [0001] The invention relates to the reduction and comprehensive utilization of hazardous waste, in particular to a method for separating resin / pigment in color photoresist stripping waste liquid. Background technique [0002] The integrated circuit industry is one of the foundations and cores of modern information industry. Its materials are the link with the most subdivided fields in the industrial chain, which runs through the whole process of chip manufacturing and packaging. A large number of high-purity (electronic grade) chemicals such as acids, alcohols, ketones, esters, ethers and other organic substances are used in the entire industrial chain. High-purity chemicals do not account for much of the cost of the entire industrial chain, but they are a major factor in environmental risks and environmental impacts, and are the main source of "three wastes" in the industrial chain. [0003] Photoresists and strippers contain various chemicals and are widel...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C08J11/02C08L101/00C09B67/54B01D1/00
CPCC08J11/02C09B67/0096B01D1/00C08J2300/00
Inventor 刘丽华郑剑滨冷雅琼张江龙兰伟平方志山李志鹏石泰山
Owner 石泰山
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