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Large-size molybdenum target material and preparation method and application thereof

A large-scale, molybdenum target technology, applied in metal material coating process, ion implantation plating, coating and other directions, can solve the problems of unsatisfactory molybdenum target purity, increased target demand, long length, etc. Diversity control of particles, the effect of meeting the requirements of sputtering

Pending Publication Date: 2022-04-29
宁波江丰钨钼材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the uniformity and grain size of the molybdenum target produced by the existing powder metallurgy process cannot meet the increasingly demanding sputtering process; the molybdenum target produced by the existing powder metallurgy process The purity cannot meet the sputtering process with higher and higher requirements for purity; the size of the molybdenum target produced by the existing powder metallurgy process cannot meet the sputtering process with increasing size requirements
[0008] With the increasing demand for display screens of 55 inches, especially those above 65 inches, the existing specifications of G6 and G8.5 targets cannot meet the requirements of high-generation production lines, and G10.5 has obvious advantages in cutting large-size TVs. , can effectively improve the cutting efficiency, so the demand for high-generation line G10.5 target materials is increasing
However, the high-generation line G10.5 has higher requirements for control of press molding, sintering and rolling processes, and binding process control due to its large size and long length, and it is more difficult to stabilize the grain size.

Method used

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  • Large-size molybdenum target material and preparation method and application thereof

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0057] This embodiment provides a large-size molybdenum target and its preparation method. The preparation method is as follows figure 1 shown, including the following steps:

[0058] (1) High-purity molybdenum powder molding: put high-purity molybdenum powder with a purity of 99.96% and a potassium content of 18ppm into rubber sleeves, roll, vibrate, then repeatedly roll and vibrate to make it smooth, and then seal;

[0059] (2) Cold isostatic pressing: four-stage pressurization and four-stage pressure relief are adopted; the pressure of the cold isostatic pressing is 170-250MPa, and the time is 45min;

[0060] (3) Sintering: Sinter the molybdenum target blank after cold isostatic pressing at a temperature of 1900° C. for 45 hours; the density of the sintered molybdenum target blank is 10.0 g / cm 3 ;The overall thickness deviation is 3mm, and the thickness difference between the two sides is 1.5mm;

[0061] (4) Hot rolling: the sintered molybdenum target blank is sequentiall...

Embodiment 2

[0067] This embodiment provides a large-size molybdenum target and its preparation method, the preparation method comprising the following steps:

[0068] (1) High-purity molybdenum powder molding: put high-purity molybdenum powder with a purity of 99.97% and a potassium content of 20ppm into rubber sleeves, roll, vibrate, then repeatedly roll and vibrate to level off, and then seal;

[0069] (2) Cold isostatic pressing: four-stage pressurization and four-stage pressure relief are adopted; the pressure of the cold isostatic pressing is 170-250MPa, and the time is 60min;

[0070] (3) Sintering: Sinter the molybdenum target blank after cold isostatic pressing at a temperature of 1800°C for 60h; the density of the sintered molybdenum target blank is 9.8g / cm 3 ;The overall thickness deviation is 4mm, and the thickness difference on both sides is 2mm;

[0071] (4) Hot rolling: the molybdenum target blank after the sintering is subjected to the second hot rolling treatment and the ...

Embodiment 3

[0077] This embodiment provides a large-size molybdenum target and its preparation method, the preparation method comprising the following steps:

[0078] (1) High-purity molybdenum powder molding: put high-purity molybdenum powder with a purity of 99.96% and a potassium content of 20ppm into rubber sleeves, roll, vibrate, roll repeatedly, shake repeatedly, and then seal;

[0079] (2) Cold isostatic pressing: four-stage pressurization and four-stage pressure relief are adopted; the pressure of the cold isostatic pressing is 170-250MPa, and the time is 30min;

[0080](3) Sintering: Sinter the molybdenum target blank after cold isostatic pressing at a temperature of 2000°C for 30h; the density of the sintered molybdenum target blank is 10.1g / cm 3 ;The overall thickness deviation is 2mm, and the thickness difference on both sides is 2mm;

[0081] (4) Hot rolling: the molybdenum target blank after the sintering is subjected to the second hot rolling treatment and the third hot ro...

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Abstract

The invention provides a large-size molybdenum target and a preparation method and application thereof.The preparation method comprises the steps of high-purity molybdenum powder die filling, isostatic cool pressing, sintering, hot rolling, leveling, heat treatment, machining and clean packaging which are sequentially carried out, and then the large-size molybdenum target is prepared; wherein the hot rolling is carried out by adopting a stage hot rolling method, and specifically comprises first hot rolling treatment, second hot rolling treatment and third hot rolling treatment which are sequentially carried out. The preparation method of the large-size molybdenum target material is simple and high in operability; according to the prepared large-size molybdenum target material, diversity control over crystal grains is achieved, and different sputtering requirements are met; and the production of large-size advanced-generation line target materials can also be realized.

Description

technical field [0001] The invention belongs to the technical field of sputtering target preparation, and relates to a method for preparing a molybdenum target, in particular to a large-size molybdenum target and its preparation method and application. Background technique [0002] Molybdenum is a silver-white metal, hard and tough, with a melting point of 2617°C and a boiling point of 4612°C. Molybdenum has good corrosion resistance and stability at room temperature, as well as low specific impedance, good electrical conductivity and good thermal expansion properties. Therefore, molybdenum is widely used in industries such as aerospace industry, electronics industry, glass manufacturing industry and solar photovoltaic industry. [0003] In recent years, with the continuous development of technologies in the fields of solar cells, flat panel displays, and semiconductor integrated circuits, thin films deposited by sputtering have high density and good adhesion to substrate m...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34B22F3/04B22F3/18B22F3/10B22F5/00B22F3/24
CPCC23C14/3414C23C14/3407B22F3/04B22F3/18B22F3/10B22F5/006B22F3/24B22F2003/185B22F2003/247
Inventor 姚力军潘杰郭红波李伟王林生吴庆勇
Owner 宁波江丰钨钼材料有限公司
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