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Large-aperture laser direct writing objective lens

A laser direct writing, large aperture technology, applied in the field of optical lenses, can solve the problem of insufficient field of view at the image side, achieve the effects of eliminating axial chromatic aberration, increasing numerical aperture, and improving resolution

Active Publication Date: 2022-05-13
ZHEJIANG UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The infinity-corrected microscope objective lens used in the conventional direct writing exposure system is not specially optimized for the change of the refractive index of the two-photon photoresist, and the image field is not large enough

Method used

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  • Large-aperture laser direct writing objective lens
  • Large-aperture laser direct writing objective lens
  • Large-aperture laser direct writing objective lens

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0038] like Figure 1-7 As shown, the focal length fS of the lens is 12.34mm, the NA is 0.8, the image plane diameter is 3.07, the entrance pupil diameter is 19.75mm, the field of view is 14.3°, and the total lens length is 201.0mm. The data such as the radius of curvature, center thickness, refractive index nd and Abbe number vd of each lens are shown in the table below:

[0039]

[0040]

[0041] The surface numbers in the table are set sequentially along the direction of light incidence;

[0042] The variable data in the above table are as follows

[0043] 1st state 2nd state 3rd state Surface 35 Refractive Index 1.522 1.502 1.542 Abbe number on face 35 34.056 42 34.056 12th side thickness 42.8566 42.9305 42.828 Thickness of side 19 0.6302 0.6 0.6587 Thickness of side 35 1 0.9909 1.0091

[0044] A number marked with a * means that the surface is aspherical. The aspheric formula is as follows:

[0045] ...

Embodiment 2

[0056]The focal length fS of the lens is 9.87 mm, the NA is 1.0, the image plane diameter is 2.08, the entrance pupil diameter is 19.75 mm, the field of view is 12°, and the total length of the lens is 219.1 mm. The data such as the radius of curvature, center thickness, refractive index nd and Abbe number vd of each lens are shown in the table below.

[0057]

[0058]

[0059] The surface numbers in the table are set sequentially along the direction of light incidence;

[0060] The variable data in the above table are as follows

[0061] 1st state 2nd state 3rd state Surface 35 Refractive Index 1.522 1.514 1.53 Abbe number on face 35 34.056 38 34.056 12th side thickness 60.6512 60.6742 60.6274 Thickness of side 19 0.523 0.5 0.5468 Thickness of side 35 0.5 0.4984 0.5023

[0062] A number marked with a * means that the surface is aspherical.

[0063] Among them, c is the radius of curvature, and the aspheric co...

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PUM

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Abstract

The invention relates to a large-aperture laser direct writing objective lens. Comprising a first group with negative focal power, a second group with negative focal power and a third group with positive focal power which are sequentially arranged along the light incidence direction; wherein the first group is of a deformed double-Gaussian structure and is beneficial to eliminating vertical axis chromatic aberration, such as chromatic aberration of magnification, coma, aberration, distortion and the like; the second group is composed of a doublet lens and a triplet lens and is beneficial to eliminating axial chromatic aberration of the system, a meniscus single lens in the third group plays a role of making the lens clear and can greatly improve the numerical aperture, and the second group is an inner focusing group and can move and be adjusted along the optical axis direction. The numerical aperture NA value ranges from 0.6 to 1.0, the change of the refractive index of the two-photon photoresist is adapted by moving the second group, meanwhile, the image space view field is expanded, and the chromatic aberration of magnification is within the diffraction limit.

Description

technical field [0001] The invention relates to the field of optical lenses, in particular to a large-aperture laser direct writing objective lens. Background technique [0002] Compared with traditional micro-nano processing technology, laser micro-nano processing technology has the advantages of non-contact, simple structure, high precision, and environmental protection. With the rapid development of femtosecond pulsed laser two-photon micro-nano processing technology, the two-photon absorption effect, which is the threshold effect of the interaction between laser and matter, can achieve a resolution of hundreds of nanometers through laser direct writing processing. [0003] The direct writing lithography resolution of the laser direct writing exposure system is directly related to the focusing ability of the optical system. The large numerical aperture microscopic objective lens has focusing ability and high resolution, and is very suitable for focusing femtosecond laser...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B13/00G02B13/18G03F7/20
CPCG02B13/0045G02B13/18G02B13/006G03F7/2053G03F7/70025
Inventor 黄木旺刘旭匡翠方林法官
Owner ZHEJIANG UNIV