Resonant cavity, laser unit, laser and laser radar
A resonant cavity and laser technology, applied in the field of lasers, can solve the problems of increasing the risk of lattice structure defects, reducing external quantum efficiency and power, and reducing device reliability.
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[0061] It is known from the background art that the introduction of strain into the active region of a VCSEL increases the risk of lattice structure defects. Now combined with the structure of VCSEL to analyze the reasons for the increased risk of lattice structure defects:
[0062] refer to figure 1 , showing a schematic cross-sectional structure of a VCSEL unit.
[0063] The VCSEL laser chip includes a plurality of VCSEL units. like figure 1 As shown, between the upper electrode 15 and the annular lower electrode 16, the device structure of the VCSEL unit includes: a lower DBR 11, an active region 12, a current confinement layer 13 and an upper DBR 14 epitaxially grown on the substrate 10 in sequence . Each epitaxial layer is epitaxial on the substrate 10 (at least one of GaAs substrate, doped Si substrate and doped C substrate) by metal-organic chemical vapor deposition (Metal-Organic Chemical Vapour Deposition, MOCVD) technology growth obtained.
[0064] In each VCSE...
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