Low-dielectric wollastonite series low-temperature co-fired ceramic material and preparation method thereof

Abstract

The invention discloses a low-dielectric wollastonite series low-temperature co-fired ceramic material and a preparation method thereof, and relates to the technical field of electronic materials. The formula of the ceramic material comprises the following components: CaxSiO3, awt% of SiO2, bwt% of R2O, cwt% of Bi2O3, dwt% of B2O3 and ewt% of MO, wherein x is more than or equal to 0.9 and less than or equal to 1.1, 0lt A < = 30, 1 < = b < = 5, 0lt; c < = 3, 0lt; d < = 6, 0 < = e < = 10; r2O is at least one of Li2O and K2O; and MO is one or more of ZnO, MgO, BaO, CoO, CuO, La2O3 and MnO2. The low-temperature co-fired ceramic material provided by the invention meets the requirements of low dielectric, low loss and low-temperature sintering, and can be applied to the fields of millimeter wave LTCC devices and the like.

Description

technical field

[0001] The invention belongs to the technical field of electronic materials, and particularly relates to a low-dielectric wollastonite-based low-temperature co-fired ceramic material and a preparation method thereof. Background technique

[0002] Low-temperature co-fired ceramics (LTCC) is a kind of electronic packaging technology, which includes low-temperature co-fired ceramic materials, device design and other technologies, of which low-temperature co-fired ceramics are the basis and key. In recent years, with the rapid development of 5G communication technology, microwave technology is developing towards higher frequencies, that is, towards the direction of millimeter wave and submillimeter wave, which also puts forward higher and higher requirements for low-temperature co-fired ceramic materials, including: Low dielectric constant to reduce the delay time of the signal during transmission; high Q value (1 / tanδ), that is, low dielectric loss, to reduce th...

Examples

Embodiment 1

[0032] 1) Synthesis of the main phase: according to the chemical formula Ca 0.98 SiO 3 Weighing raw material CaCO 3 and quartz, using deionized water as solvent, ball-milled for 24 hours, dried, passed through a 40-mesh sieve, pulverized evenly, put into an alumina crucible, and calcined at 1200 °C for 3 hours to synthesize the main phase ceramics.

[0033] 2) Synthesis of sintering aid: 3wt% Li 2 O+2wt% Bi 2 O 3 +3wt%B 2 O 3 The mass fraction ratio of the relative main phase ceramics of +3wt% ZnO, take Li by weighing 2 CO 3 , Bi 2 O 3 , H 3 BO 3 , ZnO and other raw materials, add ethanol according to the mass ratio of mixture and absolute ethanol 1:1, adopt wet mixing for 16 hours and then dry at 80 ℃, pass the dried mixture through a 40-mesh sieve, and put it into an alumina crucible , calcined at 600 ℃ for 3h, and used as a sintering aid after grinding.

[0034] 3) Ca in the main phase 0.98 SiO 3 The ceramics were mixed with fused silica and the sintering aid...

Embodiment 2

[0036] 1) Synthesis of the main phase: according to the chemical formula CaSiO 3 Weighing raw material CaCO 3 and quartz, using deionized water as solvent, ball milling and mixing for 24 hours, drying, passing through a 40-mesh sieve, pulverizing evenly, then loading into an alumina crucible and calcining at 1250 ℃ for 3 hours to synthesize the main phase ceramics.

[0037] 2) Synthesis of sintering aid: 1.5wt% Li 2 O+1wt%K 2 O+0.5wt% Bi 2 O 3 +2.5wt%B 2 O 3 +3wt%BaO+2wt%MnO 2 The mass fraction ratio of the relative main phase ceramics, weigh Li 2 CO 3 , K 2 CO 3 , Bi 2 O 3 , H 3 BO 3 , BaCO 3 , MnO 2 and other raw materials, add ethanol according to the mass ratio of mixture and absolute ethanol 1:1, adopt wet mixing for 16 hours and then dry at 80 °C, pass the dried mixture through a 40 mesh sieve, put it into an alumina crucible, and put it in an alumina crucible. It was calcined at 650 °C for 3 hours, and then used as a sintering aid after grinding.

[00...

Embodiment 3

[0040] 1) Synthesis of the main phase: according to the chemical formula Ca 1.02 SiO 3 Weighing raw material CaCO 3 and quartz, using deionized water as solvent, ball-milled for 24 hours, dried, passed through a 40-mesh sieve, pulverized evenly, put into an alumina crucible, and calcined at 1300 °C for 3 hours to synthesize the main phase ceramics.

[0041] 2) Synthesis of sintering aid: 2.5wt% Li 2 O+1wt% Bi 2 O 3 +2.5wt%B 2 O 3 The mass fraction ratio of the relative main phase ceramics of +2wt% MgO, take Li by weighing 2 CO 3 , Bi 2 O 3 , H 3 BO 3 , MgO and other raw materials, add ethanol according to the mass ratio of mixture and absolute ethanol 1:1, adopt wet mixing for 16 hours and then dry at 80 ℃, pass the dried mixture through a 40 mesh sieve, and put it into an alumina crucible , calcined at 700 ℃ for 3h, and used as a sintering aid after grinding.

[0042] 3) Ca in the main phase 1.02 SiO 3 The ceramics were mixed with fused silica and the sintering...

technical field

[0001] The invention belongs to the technical field of electronic materials, and particularly relates to a low-dielectric wollastonite-based low-temperature co-fired ceramic material and a preparation method thereof. Background technique

[0002] Low-temperature co-fired ceramics (LTCC) is a kind of electronic packaging technology, which includes low-temperature co-fired ceramic materials, device design and other technologies, of which low-temperature co-fired ceramics are the basis and key. In recent years, with the rapid development of 5G communication technology, microwave technology is developing towards higher frequencies, that is, towards the direction of millimeter wave and submillimeter wave, which also puts forward higher and higher requirements for low-temperature co-fired ceramic materials, including: Low dielectric constant to reduce the delay time of the signal during transmission; high Q value (1 / tanδ), that is, low dielectric loss, to reduce th...

Examples

Embodiment 1

[0032] 1) Synthesis of the main phase: according to the chemical formula Ca 0.98 SiO 3 Weighing raw material CaCO 3 and quartz, using deionized water as solvent, ball-milled for 24 hours, dried, passed through a 40-mesh sieve, pulverized evenly, put into an alumina crucible, and calcined at 1200 °C for 3 hours to synthesize the main phase ceramics.

[0033] 2) Synthesis of sintering aid: 3wt% Li 2 O+2wt% Bi 2 O 3 +3wt%B 2 O 3 The mass fraction ratio of the relative main phase ceramics of +3wt% ZnO, take Li by weighing 2 CO 3 , Bi 2 O 3 , H 3 BO 3 , ZnO and other raw materials, add ethanol according to the mass ratio of mixture and absolute ethanol 1:1, adopt wet mixing for 16 hours and then dry at 80 ℃, pass the dried mixture through a 40-mesh sieve, and put it into an alumina crucible , calcined at 600 ℃ for 3h, and used as a sintering aid after grinding.

[0034] 3) Ca in the main phase 0.98 SiO 3 The ceramics were mixed with fused silica and the sintering aid...

Embodiment 2

[0036] 1) Synthesis of the main phase: according to the chemical formula CaSiO 3 Weighing raw material CaCO 3 and quartz, using deionized water as solvent, ball milling and mixing for 24 hours, drying, passing through a 40-mesh sieve, pulverizing evenly, then loading into an alumina crucible and calcining at 1250 ℃ for 3 hours to synthesize the main phase ceramics.

[0037] 2) Synthesis of sintering aid: 1.5wt% Li 2 O+1wt%K 2 O+0.5wt% Bi 2 O 3 +2.5wt%B 2 O 3 +3wt%BaO+2wt%MnO 2 The mass fraction ratio of the relative main phase ceramics, weigh Li 2 CO 3 , K 2 CO 3 , Bi 2 O 3 , H 3 BO 3 , BaCO 3 , MnO 2 and other raw materials, add ethanol according to the mass ratio of mixture and absolute ethanol 1:1, adopt wet mixing for 16 hours and then dry at 80 °C, pass the dried mixture through a 40 mesh sieve, put it into an alumina crucible, and put it in an alumina crucible. It was calcined at 650 °C for 3 hours, and then used as a sintering aid after grinding.

[00...

Embodiment 3

[0040] 1) Synthesis of the main phase: according to the chemical formula Ca 1.02 SiO 3 Weighing raw material CaCO 3 and quartz, using deionized water as solvent, ball-milled for 24 hours, dried, passed through a 40-mesh sieve, pulverized evenly, put into an alumina crucible, and calcined at 1300 °C for 3 hours to synthesize the main phase ceramics.

[0041] 2) Synthesis of sintering aid: 2.5wt% Li 2 O+1wt% Bi 2 O 3 +2.5wt%B 2 O 3 The mass fraction ratio of the relative main phase ceramics of +2wt% MgO, take Li by weighing 2 CO 3 , Bi 2 O 3 , H 3 BO 3 , MgO and other raw materials, add ethanol according to the mass ratio of mixture and absolute ethanol 1:1, adopt wet mixing for 16 hours and then dry at 80 ℃, pass the dried mixture through a 40 mesh sieve, and put it into an alumina crucible , calcined at 700 ℃ for 3h, and used as a sintering aid after grinding.

[0042] 3) Ca in the main phase 1.02 SiO 3 The ceramics were mixed with fused silica and the sintering...

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