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Method and device for producing high-purity electronic-grade propylene glycol monomethyl ether

A propylene glycol monomethyl ether, electronic-grade technology, applied in ether preparation, ether separation/purification, organic chemistry, etc., can solve the problem of inability to achieve electronic-grade PGME recycling, no control means for metals and particles, and no application in the semiconductor industry. Standard production technology and other issues, to achieve the effect of short process, high purity and low impurity content

Pending Publication Date: 2022-06-24
北京袭明科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] At present, high-purity electronic grade propylene glycol methyl ether (PGME) is usually purified from industrial grade propylene glycol methyl ether (PGME) raw materials. The purity of the current production in my country can only meet the standards of chromatography and pesticide residues, and cannot meet the application standards of the semiconductor industry. Production technology, the patent in this area is blank in our country, and there is only one related patent as follows: application number: 201580033942.2; authorization number: CN106660914B, applicant: Showa Denko Co., Ltd.; inventor: Mikawa Yasuhiro, Ogata Fujimo , the patent proposes a method of recovering PGME from PGME, PGMEA, and electronic waste solvents above the third component by esterification reaction-rectification, by adding alkaline substances such as sodium hydroxide to convert PGMEA into PGME and obtain it by rectification PGME products, the PGME products recovered by this method have no control means for metals and particles, and cannot reach electronic grade PGME for recycling

Method used

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  • Method and device for producing high-purity electronic-grade propylene glycol monomethyl ether
  • Method and device for producing high-purity electronic-grade propylene glycol monomethyl ether
  • Method and device for producing high-purity electronic-grade propylene glycol monomethyl ether

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0101] continue to refer to figure 2 , the parameters corresponding to each component in the device are shown in Table 4.

[0102] Table 4. Parameters corresponding to each component in the device of Example 1.

[0103]

[0104]

[0105] A high-clean and high-purity propylene glycol monomethyl ether product higher than the SEMIC12 (G4) standard was obtained, and the product index is shown in Table 12.

Embodiment 2

[0107] continue to refer to image 3 , the parameters corresponding to each component in the device are shown in Table 5,

[0108] Table 5. Parameters corresponding to each component in the device of Example 2.

[0109]

[0110] A high-clean and high-purity propylene glycol monomethyl ether product higher than the SEMIC12 (G4) standard was obtained, and the product index is shown in Table 12.

Embodiment 3

[0111] Embodiment 3 (preferred embodiment)

[0112] continue to refer to Figure 4 , the parameters corresponding to each component in the device are shown in Table 6,

[0113] Table 6. Parameters corresponding to each component in the device of Example 3.

[0114]

[0115]

[0116] A high-clean and high-purity propylene glycol monomethyl ether product higher than the SEMIC12 (G4) standard was obtained, and the product index is shown in Table 12.

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Abstract

The invention provides a method and a device for producing high-purity electronic-grade propylene glycol monomethyl ether. The device is sequentially connected in series with a precision rectifying tower, a micro-filter, a zwitterion remover, a dehydration processor and a nano-filter in the direction from industrial-grade propylene glycol monomethyl ether feeding to high-purity electronic-grade propylene glycol monomethyl ether discharging. The precise rectifying tower comprises a dividing wall tower string for precise rectifying; the dividing wall column string for precise rectification comprises two dividing wall columns with middle dividing walls; the area ratio of the feeding side to the product extraction side of the dividing wall column ranges from 1: 9 to 9: 1, and the number of theoretical plates is 20-100; the invention provides the ultra-clean high-purity propylene glycol monomethyl ether production method and device which are short in flow, low in energy consumption, good in separation effect, high in process continuity and high in purity.

Description

technical field [0001] The invention relates to high-purity electronic chemicals propylene glycol monomethyl ether (PGME) required in the fields of semiconductor chips, display panels, solar cell manufacturing and the like, in particular to an industrial grade propylene glycol monomethyl ether (PGME) with high efficiency, energy saving and flexible utilization ) method for producing high-purity electronic grade propylene glycol monomethyl ether (PGME). Background technique [0002] With the rapid development of semiconductor and liquid crystal display technology, the requirements for high-purity chemical reagents are getting higher and higher. In the process of integrated circuit and liquid crystal display processing, high-purity and high-clean chemical reagents are mainly used for the cleaning and etching of chips, silicon circles and liquid crystal display surfaces, and their purity and cleanliness are very important to yield, electrical performance and reliability As an ...

Claims

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Application Information

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IPC IPC(8): C07C41/36C07C41/42C07C43/13
CPCC07C41/36C07C41/42C07C43/13
Inventor 孙津
Owner 北京袭明科技有限公司