The invention belongs to the technical field of
etching, surface brightening or acid
pickling compositions, and particularly relates to ITO-Ag-ITO
etching liquid as well as a preparation method and application thereof. Comprising the following components in percentage by
mass: 15-30% of
tartaric acid, 8-20% of sulfocarboxylic acid, 5-15% of disulfate, 3-10% of
nitric acid, 2-6% of a
sugar alcohol compound, 0.1-5% of polyether amine, 0.01-1% of a
corrosion inhibitor and the balance of water. All the components interact with one another, so that the
etching selectivity is adjusted, etching is uniform, and undesirable phenomena such as partial falling, black spots, dark spots or short circuits of the Ag film layer are reduced; the activity of the etching liquid to Al is reduced, and Al lateral
erosion is not caused; and through multiple mechanisms of complexation-dispersion-adsorption, the reduction reaction of Ag < + > is inhibited, silver particle residues after etching and
precipitation in areas such as Al are reduced, the pattern precision is greatly improved, and the product yield in the
OLED manufacturing process is remarkably improved. The problems of ITO and Ag etching difference, silver residue, silver
precipitation and
metal Al
corrosion in the prior art are solved.